Top > JACIII > A Dual-Axis Liquid-Rate Microgyroscope Using Electro-Conjugate ...

single-jc.php

JACIII Vol.14 No.7 pp. 751-755
doi: 10.20965/jaciii.2010.p0751
(2010)

Paper:

Views over last 60 days: 630

A Dual-Axis Liquid-Rate Microgyroscope Using Electro-Conjugate Fluid

Shinichi Yokota*, Yoshitsugu Ogawa*, Kenjiro Takemura**,
and Kazuya Edamura***

*Precision and Intelligence Lab., Tokyo Institute of Technology, R2-41, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan

**Department of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan

***New Technology Management Co., Ltd.

Received:
December 10, 2009
Accepted:
April 10, 2010
Published:
November 20, 2010
Creative Commons License
Keywords:
gyroscope, micro sensor, liquid, Coriolis force, functional fluid
Abstract
The dual-axis liquid-rate gyroscope using Electro-Conjugate Fluid (ECF) proposed here follows a previously proposed single-axis liquid-rate gyroscope using ECF [1], a dielectric “smart fluid” generating a powerful jet flow (ECF jet) under a strong Direct-Current (DC) electric field. Although the proposed gyroscope’s sensing principle is based on that of a conventional gas rate sensor [2-4], the gyroscope itself is much more sensitivity because its density is generally higher than that of a gas. The gyroscope is more suitable for a microsensor than a gas rate sensor having a pump with piezoelectric actuator because the proposed gyroscope’s pump consists of a pair of tiny electrodes. We fabricated a 40×40×21 mm3 dual-axis liquid-rate gyroscope prototype applying a single-axis liquid-rate microgyroscope and confirmed performance in experiments. Scale factors for the X and Y-axes measured in the gyroscope are -24 mV/°/s and -21 mV/°/s. Experimental results confirmed the dual-axis liquid-rate gyroscope potential.
Cite this article as:
S. Yokota, Y. Ogawa, K. Takemura, and K. Edamura, “A Dual-Axis Liquid-Rate Microgyroscope Using Electro-Conjugate Fluid,” J. Adv. Comput. Intell. Intell. Inform., Vol.14 No.7, pp. 751-755, 2010.
Data files:
References
  1. [1] S. Yokota, M. Suzuki, K. Takemura, K. Edamura, H. Kumagai, and T. Imamura, “Concept of a Liquid Rate Gyroscope using an Electroconjugate Fluid,” Proc. IEEE Int. Conf. Robotics and Automation, pp. 317-322, 2008.
  2. [2] R. Zhu, H. Ding, Y. Su, and Z. Zhou, “Micromachined gas inertial sensor based on convection heat transfer,” Sensors and Actuators A, Vol.130, pp. 68-74, 2006.
  3. [3] D. V. Dao, V. T. Dau, T. Shiozawa, and S. Sgiyama, “Development of a Dual-Axis Convective Gyroscope With Low Thermal-Induced Stress Sensing Element,” J. Microelectromechanical Systems, Vol.16, No.4, pp. 950-958, 2007.
  4. [4] T. Shiozawa, V. T. Dau, D. V. Dao, H. Kumagai, and S. Sgiyama, “A Dual Axis Thermal Convective Silicon Gyroscope,” Micro Nanomechatronics and Human Science, Vol.31, pp. 277-282, 2004.
  5. [5] R. Oboe, R. Antonello, E. Lasalandra, G. Spinola Durante, and L. Prandi, “Control of a z-axis MEMS vibrational gyroscope,” IEEE/ASME Trans. on Mechatronics, Vol.10, No.4, pp. 364-370, 2005.
  6. [6] T. Rogers, N. Aitken, K. Stribley, and J. Boyd, “Improvements in MEMS gyroscope production as a result of using in situ, aligned, currentlimited anodic bonding,” Sensors and Actuators A, Vol.123, No.4, pp. 106-110, 2005.
  7. [7] S. Lee, S. Park, J. Kim, S. Lee, and D. I. Cho, “Surface/bulk micromachined singlecrystalline silicon micro-gyroscope,” J. Microelectromechanical Systems, Vol.9, No.4, pp. 557-567, 2000.
  8. [8] S. Yokota, Y. Otsubo, and K. Edamura, “Electro-sensitive movable fluids, method of using the same and motors for the electro-sensitive movable fluids,” USP6, Vol.30, p. 544, 2000.
  9. [9] S. Yokota, Y. Kondoh, A. Sadamoto, Y. Otsubo, and K. Edamura, “A micro motor using electro-conjugate fluids (ECF) (proposition of stator electrode-type (SE-type) micro ECFmotors),” Int. J. of JSME Series C, Vol.44, No.3, pp. 756-762, 2001.
  10. [10] S. Yokota, “A 2mm ECF micromotor,” Proc.of the 7th Int. Conf. on Mechatronics Technology (ICMT’03), pp. 361-366, 2003.
  11. [11] R. Abe and S. Yokota, “A micro actuator using ECF-jetwith needletype electrode,” Proc. of FLUCOME’03, CD-ROM, 2003.
  12. [12] K. Takemura, S. Yokota, and K. Edamura, “A micro artificial muscle actuator using electro-conjugate fluid,” Proc. of the IEEE Inter. Conf. on Robotics and Automation (ICRA2005), pp. 534-539, 2005.
  13. [13] S. Yokota, K. Kawamura, K. Takemura, and K. Edamura, “A high-integrated micromotor using electro-conjugate fluid (ECF),” J. Robotics and Mechatronics, pp. 142-148, 2005.
  14. [14] W.-S. Seo, K. Yoshida, S. Yokota, and K. Edamura, “A high performance planar pump using electro-conjugate fluid with improved electrode patterns,” Sensors and Actuators A, Vol.134, No.2, pp. 606-614, 2007.
  15. [15] “Introduction of Gyro Technology,” Tamagawa Seiki Co. Ltd. (in Japanese).

Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Apr. 22, 2024