The high-accuracy manufacturing of optical requires highly integrated ultraprecision cutting technologies. However, all sorts of small errors adversely affect machining accuracy because of the miniaturization and complexity of objects. Among these errors, slight setting errors critically impact machining accuracy because it is difficult to place a cutting tool accurately on a ultraprecision machine tool. The authors have conducted multi-axis control ultraprecision cutting based on tool setting errors compensation. In this compensation method, the workpiece must be removed from the machine tool after test cutting to measure grooves to detect actual tool positions and to calculate setting errors. However, after the workpiece is removed, it cannot be perfectly replaced on a ultraprecision machine tool. This makes it difficult to automate setting errors compensation. In order to solve these problems, tool positioning must be detected without removing the workpiece. Therefore, in this study, a novel compensation method is developed by means of non-contact measurement with a laser imaging device. Furthermore, in order to improve compensation performance, a laser imaging device is calibrated on an ultraprecision machine tool. The proposed method enables direct detection of actual tool position and calculation of the tool centerpoint coordinate on the machine coordinate system. By modifying an NC program, the tool setting errors can be finally compensated. The feasibility of the proposed compensation method is verified by conducting experiments of creating grooves.

1. [1] F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Annals – Manufacturing Technology, Vol.62, No.2, pp. 823-846, 2013.
2. [2] J. Otsuka and S. Hayama, “Special issue on precision and ultraprecision positioning,” Int. J. Automation Technol., Vol.3, No.3. pp. 223-226, 2009.
3. [3] J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. of Materials Processing Technology, Vol.209, Issue 10, pp. 4802-4808, 2009.
4. [4] N. Sugita, K. Nishioka, and M. Mitsuishi, “Ultra-precision machining of tungsten-based alloys by cutting and burnishing,” Int. J. Automation Technol., Vol.5, No.3, pp. 320-325, 2011.
5. [5] K. Nakamoto, S. Matsumoto, and M. Anzai, “Development of high-acceleration and ultra-precision linear motor driven machining center and its characteristics,” Int. J. Automation Technol., Vol.6, No.4, pp. 454-459, 2010.
6. [6] T. Hirose, Y. Kami, T. Shimizu, M. Yabuya, and Y. Morimoto, “Development of on-measurement unit for correction processing of aspheric lens mold with high numerical aperture,” Int. J. Automation Technol., Vol.8, No.1, pp. 34-42, 2014.
7. [7] D. Tao, X. Gao, H. Lu, Z. Liu, Y. Li, H. Tong, N. Pesika, Y. Meng, and Y. Tian, “Controllable anisotropic dry adhesion in vacuum: gecko inspired wedged surface fabricated with ultraprecision diamond cutting,” Advanced Functional Materials, Vol.27, Issue 22, 1606576, 2017.
8. [8] K. Nakamoto, T. Aoyama, K, Katahira, P. Fonda, and K. Yamazaki, “A study of nanometric surface generation on tungsten carbide using a micro polycrystalline diamond end mill,” Int. J. Automation Technol., Vol.4, No.5, pp. 547-553, 2012.
9. [9] S. J. Zhang, S. To, S. J. Wang, and Z. W. Zhu, “A review of surface roughness generation in ultra-precision machining,” Int. J. of Machine Tools and Manufacture, Vol.91, pp. 76-95, 2015.
10. [10] T. Yazawa, Y. Hattori, Y. Ogiya, and T. Kojima, “Figure error control for microgrooving on ordinary lateral milling machines using a reference surface to control cutting,” Int. J. Automation Technol., Vol.3, No.4, pp. 428-432, 2009.
11. [11] X. Ruibin and H. Wu, “Study on cutting mechanism of Ti6Al4V in ultra-precision machining,” Int. J. of Advanced Manufacturing Technology, Vol.86, Issues 5-8, pp. 1311-1317, 2016.
12. [12] B. Guo, X. Yu, Z. Zeng, Q. Zhao, L. Xu, and X. Liu, “Ultra-precision cutting of linear micro-groove array for distributed feedback laser devices,” Int. J. of Nanomanufacturing, Vol.14, Issue 1, pp. 9-22, 2018.
13. [13] C. Y. Chan, L. H. Li, W. B. Lee, and H. C. Wong, “Monitoring life of diamond tool in ultra-precision machining,” The Int. J. of Advanced Manufacturing Technology, Vol.82, Nos.5-8, pp. 1141-1152, 2016.
14. [14] H. Sawano, R. Kobayashi, H. Yoshioka, and H. Shinno, “A proposed ultraprecision machining process monitoring method using causal network model of air spindle system,” Int. J. Automation Technol., Vol.5, No.3, pp. 362-368, 2011.
15. [15] M. Mukaida and J. Yan, “Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo,” Int. J. of Machine Tools and Manufacture, Vol.115, pp. 2-14, 2017.
16. [16] X. Chen, J. Xiao, Y. Zhu, R. Tian, X. Shu, and J. Xu, “Micro-machinability of bulk metallic glass in ultra-precision cutting,” Materials & Design, Vol.136, pp. 1-12, 2017.
17. [17] Y. Nakao, K. Suzuki, K. Yamada, and K. Nagasaka, “Feasibility study on design of spindle supported by high-stiffness water hydrostatic thrust bearing,” Int. J. Automation Technol., Vol.8, No.4, pp. 530-538, 2014.
18. [18] K. Nakamoto, T. Ishida, N. Kitamura, and Y. Takeuchi, “Fabrication of microinducer by 5-axis control ultraprecision micromilling,” CIRP Annals – Manufacturing Technology, Vol.60, No.1, pp. 407-410, 2011.
19. [19] X. Tang, K. Nakamoto, K. Obata, and Y. Takeuchi, “Ultraprecision micromachining of hard material with tool wear suppression by using diamond tool with special chamfer,” CIRP Annals – Manufacturing Technology, Vol.62, pp. 51-54, 2013.
20. [20] S. Baba, K. Nakamoto, and Y. Takeuchi, “Multi-axis control ultraprecision machining based on tool setting errors compensation,” Int. J. Automation Technol., Vol.10, No.1, pp. 114-120, 2016.