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IJAT Vol.12 No.1 pp. 4-14
doi: 10.20965/ijat.2018.p0004
(2018)

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MEMS Sensor Devices with a Piezo-Resistive Cantilever

Kiyoshi Matsumoto*,† and Isao Shimoyama**

*Department of Mechanical Engineering, Faculty of Science and Engineering, Toyo University
2100 Kujirai, Kawagoe, Saitama 350-8585, Japan

†Corresponding author

**Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Tokyo, Japan

Received:
June 28, 2017
Accepted:
October 6, 2017
Published:
January 5, 2018
Creative Commons License
Keywords:
cantilever, sensor, piezo-resistive, MEMS
Abstract

We have engaged in researching and developing a large number of sensor devices using piezo-resistive cantilevers. The important technical features of our sensor devices lie in their very high detection sensitivity that has been achieved by the use of cantilevers of a very thin structure: as a typical example, force-detection sensitivity of about 10 pN has been achieved by using cantilevers of 300-nm thickness. This paper presents our developed sensor devices and applications and their respective features: more specifically, devices to directly measure object-contacting forces, devices embedded in an elastic body to measure its deformations, devices to measure air flows and vibrations, devices to measure differential air pressure, devices to measure differential pressure between cavities and external environment, and devices with cantilevers arranged on the liquid interface.

Cite this article as:
K. Matsumoto and I. Shimoyama, “MEMS Sensor Devices with a Piezo-Resistive Cantilever,” Int. J. Automation Technol., Vol.12 No.1, pp. 4-14, 2018.
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References
  1. [1] M. Tortonese, R. C. Barrett, and C. F. Quate, “Atomic resolution with an atomic force microscope using piezoresistive detection,” Applied Physics Letters, Vol.62, No.8, pp. 834-836, 1993.
  2. [2] M. Gel and I. Shimoyama, “Force sensing submicrometer thick cantilevers with ultra-thin piezoresistors by rapid thermal diffusion,” J. of Micromechanics and Microengineering, Vol.14, No.3, pp. 423-428, 2003.
  3. [3] H. Takahashi, N. Minh Dung, K. Matsumoto, and I. Shimoyama, “Differential pressure sensor using a piezoresistive cantilever,” J. of Micromechanics and Microengineering, Vol.22, No.5, Article Number 055015, 2012.
  4. [4] H. Onoe, M. Gel, K. Hoshino, K. Matsumoto, and I. Shimoyama, “Direct measurement of the binding force between micro-fabricated particles and a planar surface in aqueous solution by force-sensing piezoresistive cantilevers,” Langmuir, Vol.21, No.24, pp. 11251-11261, 2005.
  5. [5] T. Kan, K. Matsumoto, and I. Shimoyama, “Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning,” Review of Scientific Instruments, Vol.78, No.8, Article Number 083106, 2007.
  6. [6] K. Kuwana, K. Matsumoto, and I. Shimoyama, “Measurementa of Binding Force between a Receptor-coated Cantilever and a Ligand-coated Surface for Protein Sensor,” The 11th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (uTAS2007), pp. 1095-1097, 2007.
  7. [7] K. Kuwana, Y. J. Heo, K. Matsumoto, and I. Shimoyama, “Measurement Method of Cell-surface Receptor Concentration Using Antibody Conjugated Piezoresistive Cantilever,” The 13th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences(microTAS2009), pp. 2022-2024, 2009.
  8. [8] T. V. Nguyen, M. D. Nguyen, H. Takahashi, K. Matsumoto, and I. Shimoyama, “Viscosity measurement based on the tapping-induced free vibration of sessile droplets using MEMS-based piezoresistive cantilevers,” Lab on a Chip, The Royal Society of Chemistry, Vol.15, No.18, pp. 3670-3676, 2015.
  9. [9] T. V. Nguyen , K. Matsumoto, and I. Shimoyama, “A Viscometer Based on Vibration of Droplets on a Piezoresistive Cantilever Array,” The 28th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’15), 2015.
  10. [10] T. V. Nguyen, K. Matsumoto, and I. Shimoyama, “Pressure Distribution on the Contact Area During the Impact of a Droplet on a Textured Surface,” The 29th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’16), 2016.
  11. [11] K. Noda, K. Hoshino, K. Matsumoto, and I. Shimoyama, “ A Shear Stress Sensor for Tactile Sensing with the Piezoresistive Cantilever Standing in Elastic Material,” Sensors and Actuators A: Physical, Vol.127, No.2, pp. 295-301, 2006.
  12. [12] K. Noda, H. Onoe, E. Iwase, K. Matsumoto, and I. Shimoyama, “Flexible tactile sensor for shear stress measurement using transferred sub-μ m-thick Si piezoresistive cantilevers,” J. of Micromechanics and Microengineering, Vol.22, No.11, article No.115025, 2012.
  13. [13] Y. Tanaka, A. Nakai, E. Iwase, T. Goto, K. Matsumoto, and I. Shimoyama, “Triaxial Tactile Sensor Chips with Piezoresistive Cantilevers Mountable on Curved Surface,” Asia-Pacific Conf. on Transducers and Micro-Nano Technology 2008 (APCOT2008), pp. 1B1-1, 2008.
  14. [14] K. Noda, K. Matsumoto, and I. Shimoyama, “Tactile sensor with standing piezoresistive cantilevers covered with 2-layer skin type structures for texture detection of object surface,” The 2008 IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (IROS2008), pp. 3953-3958, 2008.
  15. [15] K. Noda, K. Matsumoto, and I. Shimoyama, “Skin-type Tactile Sensor Using Standing Piezoresistive Cantilever for Micro Structure Detection,” The 9th Annual IEEE Conf. on Sensors (Sensors2010), pp. 2089-2092, 2010.
  16. [16] K. Noda, K. Matsumoto, and I. Shimoyama, “Flexible tactile sensor sheet with liquid filter for shear force detection,” The 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’09), pp. 785-788, 2009.
  17. [17] K. Yamazaki, R. Ueda, S. Nozawa, M. Kojima, K. Okada, K. Matsumoto, M. Ishikawa, I. Shimoyama, and M. Inaba, “Home-Assistant Robot for an Aging Society,” Procs. of the IEEE, Vol.100, No.8, pp. 2429-2441, 2012.
  18. [18] H. Takahashi, E. Iwase, K. Matsumoto, and I. Shimoyama, “Air Flow Senser for an Insect-Like Flapping Wing,” The 21st IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’08), pp. 916-919, 2008.
  19. [19] H. Takahashi, K. Sato, M. D. Nguyen, K. Matsumoto, and I. Shimoyama, “Characteristic evaluation of a bristled wing using mechanical models of a thrips wings with MEMS piezoresistive cantilevers,” J. of Biomechanical Science and Engineering, Vol.10, No.2, paper No.14-00233, 2014.
  20. [20] H. Takahashi, T. Kan, K. Matsumoto, and I. Shimoyama, “Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever,” Measurement Science and Technology, Vol.24, No.2, article No.025107, 2013.
  21. [21] S. Yoshimi, K. Hoshino, K. Matsumoto, and I. Shimoyama, “A Cantilever Microphone Using Resonance of Closed-End Air Columns,” The 19th Int. Conf. on Micro Electro Mechanical Systems (MEMS ’06), pp. 574-577, 2006.
  22. [22] H. Takahashi, A. Suzuki, E. Iwase, K. Matsumoto, and I. Shimoyama, “MEMS microphone with a micro Helmholtz resonator,” J. of Micromechanics and Microengineering, Vol.22, No.8, article No.085019, 2012.
  23. [23] M. D. Nguyen, A. Inaba, H. Takahashi, E. Iwase, K. Matsumoto, and I. Shimoyama, “Sound Direction Sensor with an Acoustic Channel,” Procs. of the 23rd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2010), pp. 655-658, 2010.
  24. [24] H. Takahashi, K. Matsumoto, and I. Shimoyama, “Air pressure sensor for an insect wing,” The 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’09), pp. 825-828, 2009.
  25. [25] H. Takahashi, Y. Aoyama, K. Ohsawa, H. Tanaka, E. Iwase, K. Matsumoto, and I. Shimoyama, “Differential Pressure Measurement Using A Free-Flying Insect-Like Ornithopter with A MEMS Sensor,” Bioinspiration and Biomimetics, Vol.5, No.3, 036005, 2010.
  26. [26] H. Takahashi, K. Sato, K. Matsumoto, and I. Shimoyama, “Measuring differential pressures with multiple MEMS sensors during takeoff of an insect-like ornithopter,” J. of Biomechanical Science and Engineering, Vol.9, No.1, article No.JBSE0004, 2014.
  27. [27] H. Takahashi, K. Matsumoto, and I. Shimoyama, “Measurement of Differential Pressure on a Butterfly Wing,” Procs. of the 23rd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2010), pp. 63-66, 2010.
  28. [28] H. Takahashi, H. Tanaka, K. Matsumoto, and I. Shimoyama, “Differential pressure distribution measurement with an MEMS sensor on a free-flying butterfly wing,” Bioinspiration & Biomimetics, Vol.7, No.036020, 2012.
  29. [29] M. D. Nguyen, H. Takahashi, K. Kuwana, T. Takahata, K. Matsumoto, and I. Shimoyama, “3D Airflow Velocity Vector Sensor,” The 24th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’11), pp. 513-516, 2011.
  30. [30] M. D. Nguyen, H. Takahashi, K. Matsumoto, and I. Shimoyama, “Barometric pressure change measurement,” The 16th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers2011), pp. 898-901, 2011.
  31. [31] M. D. Nguyen, H. Takahashi, T. Uchiyama, K. Matsumoto, and I. Shimoyama, “A barometric pressure sensor based on the air-gap scale effect in a cantilever,” Applied Physics Letters, Vol.103, No.14, article No.143505, 2013.
  32. [32] M. D. Nguyen, H. P. Phan, K. Matsumoto, and I. Shimoyama, “A Sensitive Liquid-Cantilever Diaphragm for Pressure Sensor,” The 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’13), 2013.
  33. [33] M. D. Nguyen, H. P. Phan, K. Matsumoto, and I. Shimoyama, “A Hydrophone Using Liquid to Bridge the Gap of a Piezo-Resistive Cantilever,” The 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers), 2013.
  34. [34] T. Kaneko, M. D. Nguyen, R. Aoki, T. Takahata, K. Matsumoto, and I. Shimoyama, “Measurement of Mechanomyogram,” The 27th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’14), 2014.
  35. [35] T. Kaneko, M. D. Nguyen, Q. K. Pham, Y. Takei, T. Takahata, K. Matsumoto, and I. Shimoyama, “Pulse Wave Measurement in Human Using Piezoresistive Cantilever on Liquid,” The 28th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’15), 2015.
  36. [36] Q. K. Pham, M. D. Nguyen, B. K. Nguyen, H. P. Phan, K. Matsumoto, and I. Shimoyama, “Multi-Axis Force Sensor with Dynamic Range up to Ultrasonic,” The 27th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’14), 2014.
  37. [37] R. Aoki, Y. Takei, M. D. Nguyen, T. Takahata, K. Matsumoto, and I. Shimoyama, “Detection of High-Frequency Component of Mechanomyogram,” The 29th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ’16), 2016.
  38. [38] Q. K. Pham, M. D. Nguyen, K. Matsumoto, and I. Shimoyama, “Acoustic Emission Sensor Using Liquid-On-Beam Structure,” The 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers), 2015.
  39. [39] T. Omori, T. Usui, K. Watabe, M. D. Nguyen, K. Matsumoto, and I. Shimoyama, “Elastic wave measurement using a MEMS AE sensor,” 8th Int. Conf. on Acoustic Emission, Kyoto, Japan, December 5-9, pp. 339-344, 2016.

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