Sensors, which are transducer-type devices, are indispensable to today’s advanced information society. A huge number of sensors are used not only in everyday devices but also in advanced industrial systems. They are used in Internet of things (IoT) services to gather external information, intelligent robots to recognize the world around them and control their movements, and all advanced vehicle technologies to operate safely and automatically. Sensors detect light, motion, force, fluid flow, electric/magnetic fields, and other physical, chemical, and biological aspects of the external environment.

To improve the performances of these sensors, such as their sensitivity, sensing resolution, and power consumption, extensive R&D is conducted in industry and academia. Recent technological progress in MEMS technology has allowed sensors to be manufactured on scales that are increasingly microscopic. More recently, the extreme downsizing of structures to nanometer scale has led to innovative sensing devices called NEMS.

This special issue addresses the latest research advances in nanosensing and microsensing science and engineering. It covers a wide range of topics, including novel sensing devices and technologies; small structures fabrication technologies for sensors; MEMS/NEMS sensing devices; physical, chemical, optical and biological sensing devices; and nanoscale science and engineering for sensors.

All papers were refereed through careful peer reviews. We would like to express our sincere thanks to the authors for their submissions and to the reviewers for their invaluable efforts. Lastly, we hope this special issue provides valuable and useful information to our interested readers and researchers.