Review:
Recent Developments and Applications of Precision Positioning Technology in Taiwan
Yung-Tien Liu

Department of Mechatronics Engineering, National Kaohsiung University of Science and Technology
No.1, University Road, Yanchao District, Kaohsiung 824005, Taiwan
Corresponding author
Positioning technology is an interdisciplinary field of engineering that supports the development of industrial manufacturing. Well-developed positioning technology also demonstrates a certain degree of product competitiveness. It typically comprises four main components: actuator, sensor, controller, and transmission element. This review briefly introduces research related to positioning technology conducted in Taiwan, focusing on studies published mainly after 2009. The papers surveyed are categorized according to the four main components, which are discussed separately in Sections 2 through 5. Section 2 presents various types of actuators, including piezoelectric, electromagnetic, electrostatic, shape memory alloy, fluidic, and microelectromechanical-system-based actuators. Section 3 covers displacement sensors. In addition to contact-type sensors, noncontact sensors such as eddy current sensor, optical sensor, encoder, and laser interferometry system are described. Section 4 discusses controllers, introducing both classical control-based strategies and modern control schemes, such as sliding mode control, fuzzy control, repetitive control, iterative learning control, and others. Section 5 focuses on transmission elements, including flexure hinge, ball screw, linear guideway, ball bearing, fluidic bearing, magnetic bearing, and other related components. Applications of positioning technology in various fields are addressed in Section 6. Finally, based on the surveyed papers, a brief summary and concluding remarks are provided in Section 7. This review offers an overview of positioning technology and highlights the research capabilities related to this field in Taiwan.
- [1] Y.-T. Liu, “Nano-positioning and sensing technologies,” C. A. Grimes and E. Dickey (Eds.), “Encyclopedia of Sensors,” Vol.6, pp. 435-500, American Scientific Publishers, 2006.
- [2] Y.-T. Liu and S.-C. Lee, “Recent developments of precision positioning technologies in Taiwan,” Proc. of the 3rd Int. Conf. on Positioning Technology (ICPT 2008), pp. 3-8, 2008.
- [3] S.-C. Lee, “A study of recent development on precision positioning technology in Taiwan,” Master’s thesis, National Kaohsiung University of Science and Technology, 2012 (in Chinese).
- [4] C.-J. Lin, H.-T. Yau, C.-R. Lin, and C.-R. Hsu, “Simulation and experimental analysis for hysteresis behavior of a piezoelectric actuated micro stage using modified charge system search,” Microsystem Technologies, Vol.19, No.11, pp. 1807-1815, 2013. https://doi.org/10.1007/s00542-013-1814-z
- [5] Y.-C. Wu, Y.-H. Huang, and C.-C. Ma, “Theoretical analysis and experimental measurement of flexural vibration and dynamic characteristics for piezoelectric rectangular plate,” Sensors and Actuators A: Physical, Vol.264, pp. 308-332, 2017. https://doi.org/10.1016/j.sna.2017.07.034
- [6] H.-S. Liao et al., “Astigmatic detection system with feedback mechanism for calibrating driving waveform of piezoelectric actuators,” IEEE Trans. on Instrumentation and Measurement, Vol.72, Article No.1007907, 2023. https://doi.org/10.1109/TIM.2023.3300412
- [7] K.-M. Chang, J.-M. Chen, and Y.-T. Liu, “Nonlinear sliding mode control for piezoelectric tool holder with bellows-type hydraulic displacement amplification mechanism,” Sensors and Actuators A: Physical, Vol.361, Article No.114543, 2023. https://doi.org/10.1016/j.sna.2023.114543
- [8] P.-Y. Lin, C.-H. Ke, D.-Y. Wang, S.-Y. Lin, and Y.-T. Liu, “Numerical study of a piezoelectric XY-stage with diamond-type displacement amplification mechanism,” Advances in Mechanism and Machine Science: Proc. of the 16th IFToMM World Congrass, Vol.2, pp. 167-175, 2023. https://doi.org/10.1007/978-3-031-45770-8_17
- [9] J.-W. Lee, Y.-C. Li, K.-S. Chen, and Y.-H. Liu, “Design and control of a cascaded piezoelectric actuated two-degrees-of-freedom positioning compliant stage,” Precision Engineering, Vol.45, pp. 374-386, 2016. https://doi.org/10.1016/j.precisioneng.2016.03.015
- [10] Y.-T. Liu and B.-J. Li, “A 3-axis precision positioning device using PZT actuators with low interference motions,” Precision Engineering, Vol.46, pp. 118-128, 2016. https://doi.org/10.1016/j.precisioneng.2016.04.006
- [11] B.-J. Li, Y.-T. Liu, K.-M. Chang, and W.-L. Li, “Study of oblique vibration cutting using a 3-axis PZT stage,” The 7th Int. Conf. on Positioning Technology (ICPT 2016), 2016.
- [12] H.-W. Lee, T.-T. Hsieh, C.-C. Liu, and C.-H. Liu, “Development of a flat type six-axis stage based on piezoelectric actuators,” Mathematical Problems in Engineering, Vol.2014, Article No.523786, 2014. https://doi.org/10.1155/2014/523786
- [13] T. Higuchi, M. Watanabe, and K. Kudou, “Precise positioner utilizing rapid deformations of a piezoelectric element,” J. of the Japan Society for Precision Engineering, Vol.54, No.11, pp. 2107-2112, 1988 (in Japanese). https://doi.org/10.2493/jjspe.54.2107
- [14] C.-H. Cheng and S.-K. Hung, “A Piezoelectric two-degree-of-freedom nanostepping motor with parallel design,” IEEE/ASME Trans. on Mechatronics, Vol.21, No.4, pp. 2197-2199, 2016. https://doi.org/10.1109/TMECH.2015.2502266
- [15] Y.-J. Wang, J.-L. Ho, and Y.-B. Jiang, “A self-positioning linear actuator based on a piezoelectric slab with multiple pads,” Mechanical Systems and Signal Processing, Vol.150, Article No.107245, 2021. https://doi.org/10.1016/j.ymssp.2020.107245
- [16] H.-S. Liao et al., “Low-cost, open-source XYZ nanopositioner for high-precision analytical applications,” HardwareX, Vol.11, Article No.e00317, 2022. https://doi.org/10.1016/j.ohx.2022.e00317
- [17] Y. Ting, Y.-R. Tsai, B.-K. Hou, S.-C. Lin, and C.-C. Lu, “Stator design of a new type of spherical piezoelectric motor,” IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.57, No.10, pp. 2334-2342, 2010. https://doi.org/10.1109/TUFFC.2010.1694
- [18] T.-H. Yu and C.-C. Yin, “A modal sensor integrated circular cylindrical wedge wave ultrasonic motor,” Sensors and Actuators A: Physical, Vol.174, pp. 144-154, 2012. https://doi.org/10.1016/j.sna.2011.10.004
- [19] T.-H. Yu, “Transient wave motion analysis for modal suppression of a circular cylindrical wedge wave ultrasonic motor,” Sensors and Actuators A: Physical, Vol.212, pp. 133-142, 2014. https://doi.org/10.1016/j.sna.2014.03.010
- [20] S.-T. Ho and W.-H. Chiu, “A piezoelectric screw-driven motor operating in shear vibration modes,” J. of Intelligent Material Systems and Structures, Vol.27, No.1, pp. 134-145, 2016. https://doi.org/10.1177/1045389X14563863
- [21] Y. Ting, K.-C. Chang, C.-H. Yu, and A. Sugondo, “Design of a single and dual hybrid piezoelectric motors,” Int. J. of Acoustics and Vibration, Vol.25, No.2, pp. 236-242, 2020. https://doi.org/10.20855/ijav.2020.25.21649
- [22] Y. Ting, C.-H. Yu, J.-H. Lin, T. Johar, and C.-W. Wang, “Design of a short-beam linear traveling-wave piezoelectric motor,” IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.68, No.8, pp. 2815-2823, 2021. https://doi.org/10.1109/TUFFC.2021.3075449
- [23] Y.-M. Lin, Y.-H. Hsu, W.-C. Su, Y.-T. Kao, and C.-K. Lee, “Development of a two-dimensional piezoelectric traveling-wave generator,” J. of Intelligent Material Systems and Structures, Vol.32, No.10, pp. 1071-1088, 2021. https://doi.org/10.1177/1045389X20943942
- [24] Y.-H. Hsu, Y.-M. Lin, and C.-K. Lee, “A two-dimensional piezoelectric traveling wave generator using a multi-integer frequency, two-mode method (MIF-TM),” Smart Materials and Structures, Vol.30, No.12, Article No.125026, 2021. https://doi.org/10.1088/1361-665X/ac3432
- [25] S.-L. Tai and C.-K. Lee, “One-dimensional traveling wave type linear piezoelectric moving platform driven by a new two-frequency two-mode excitation method,” Smart Materials and Structures, Vol.31, No.3, Article No.035027, 2022. https://doi.org/10.1088/1361-665X/ac4db5
- [26] H.-K. Guo, Y.-H. Hsu, and C.-K. Lee, “Control of a multidirection piezoelectric linear motor using a gyroscopic feedback control,” Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2024 (SPIE Proc. Vol.12949), Article No.129490L, 2024. https://doi.org/10.1117/12.3010023
- [27] S.-J. Chang and J. Chen, “Design and fabrication of the large thrust force piezoelectric actuator,” Advances in Materials Science and Engineering, Vol.2013, Article No.912587, 2013. https://doi.org/10.1155/2013/912587
- [28] S.-T. Ho and Y.-J. Shin, “Design of a semi-oval shaped ultrasonic motor,” Int. J. Automation Technol., Vol.7, No.5, pp. 537-543, 2013. https://doi.org/10.20965/ijat.2013.p0537
- [29] S.-T. Ho and S.-J. Jan, “A piezoelectric motor for precision positioning applications,” Precision Engineering, Vol.43, pp. 285-293, 2016. https://doi.org/10.1016/j.precisioneng.2015.08.007
- [30] Y.-J. Wang, Y.-C. Chen, and S.-C. Shen, “Design and analysis of a standing-wave trapezoidal ultrasonic linear motor,” J. of Intelligent Material Systems and Structures, Vol.26, No.17, pp. 2295-2303, 2015. https://doi.org/10.1177/1045389X14554130
- [31] Y.-J. Wang, C. Yang, C.-Y. Sue, and Y.-T. Wang, “Analysis of a 0.1-µm stepping bi-axis piezoelectric stage using a 2-DOF lumped model,” Microsystem Technologies, Vol.26, No.2, pp. 425-436, 2020. https://doi.org/10.1007/s00542-019-04511-2
- [32] Y. Ting, H.-P. Lin, Y.-K. Sung, and C.-H. Yu, “Design a composite piezoelectric motor using face-shear and longitudinal resonance vibration,” Sensors and Actuators A: Physical, Vol.290, pp. 62-70, 2019. https://doi.org/10.1016/j.sna.2019.03.002
- [33] T.-H. Yu, “Reflection and transmission analysis of surface acoustic wave devices,” Micromachines, Vol.14, No.10, Article No.1898, 2023. https://doi.org/10.3390/mi14101898
- [34] W.-C. Hsu, Y.-H. Hsu, and C.-K. Lee, “Study on the generation of surface acoustic waves by using a ring-type piezoelectric actuator on a thick ringdisk,” Active and Passive Smart Structures and Integrated Systems XVIII (SPIE Proc. Vol.12946), Article No.129461L, 2024. https://doi.org/10.1117/12.3010097
- [35] Y.-T. Liu and C.-K. Wang, “A study of the characteristics of a one-degree-of-freedom positioning device using spring-mounted piezoelectric actuators,” Proc. of the Institution of Mechanical Engineers, Part C: J. of Mechanical Engineering Science, Vol.223, No.9, pp. 2017-2027, 2009. https://doi.org/10.1243/09544062JMES1422
- [36] Y.-T. Liu and B.-J. Li, “Precision positioning device using the combined piezo-VCM actuator with frictional constraint,” Precision Engineering, Vol.34, No.3, pp. 534-545, 2010. https://doi.org/10.1016/j.precisioneng.2010.02.006
- [37] C.-H. Liu, W.-Y. Jywe, Y.-R. Jeng, T.-H. Hsu, and Y.-T. Li, “Design and control of a long-traveling nano-positioning stage,” Precision Engineering, Vol.34, No.3, pp. 497-506, 2010. https://doi.org/10.1016/j.precisioneng.2010.01.003
- [38] J.-C. Shen and C.-H. Hwang, “Performance enhancements of a high precision scanning stage,” J. of Automation and Control Engineering, Vol.4, No.5, pp. 360-364, 2016. https://doi.org/10.18178/joace.4.5.360-364
- [39] F.-C. Wang, J.-F. Lu, W.-J. Su, and J.-Y. Yen, “Precision positioning control of a long-stroke stage employing multiple switching control,” Microsystem Technologies, Vol.28, No.1, pp. 319-332, 2022. https://doi.org/10.1007/s00542-020-04759-z
- [40] Y.-T. Liu, K.-M. Chang, and H.-R. Lee, “Study of a precision pneumatic positioning device using PZT dither,” Int. J. Automation Technol., Vol.5, No.6, pp. 780-785, 2011. https://doi.org/10.20965/ijat.2011.p0780
- [41] M.-Y. Chen, H.-H. Huang, and S.-K. Hung, “A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism,” IEEE Trans. on Industrial Electronics, Vol.57, No.1, pp. 96-106, 2010. https://doi.org/10.1109/TIE.2009.2033091
- [42] C.-S. Liu, S.-S. Ko, and P.-D. Lin, “Experimental characterization of high-performance miniature auto-focusing VCM actuator,” IEEE Trans. on Magnetics, Vol.47, No.4, pp. 738-745, 2011. https://doi.org/10.1109/TMAG.2010.2103084
- [43] C.-L. Hsieh, C.-S. Liu, and C.-C. Cheng, “Design of a 5 degree of freedom-voice coil motor actuator for smartphone camera modules,” Sensors and Actuators A: Physical, Vol.309, Article No.112014, 2020. https://doi.org/10.1016/j.sna.2020.112014
- [44] C.-S. Liu, Y.-C Wu, and Y.-J. Lan, “Design of 4-DOF voice coil motor with function of reducing laser geometrical fluctuations,” Actuators, Vol.10, No.12, Article No.320, 2021. https://doi.org/10.3390/act10120320
- [45] C.-Y. Cheng, J.-C. Renn, I. Saputra, and C.-E. Shi, “FEM design and implementation of a novel linear motor for fluid-power proportional valves,” J. of Innovative Technology, Vol.4, No.2, pp. 13-19, 2022. https://doi.org/10.29424/JIT.202209_4(2).0002
- [46] C.-J. Lin, H.-T. Yau, and Y.-C. Tian, “Identification and compensation of nonlinear friction characteristics and precision control for a linear motor stage,” IEEE/ASME Trans. on Mechatronics, Vol.18, No.4, pp. 1385-1396, 2013. https://doi.org/10.1109/TMECH.2012.2202679
- [47] C.-K. Lin, J.-T. Yu, Y.-S. Lai, and H.-C. Yu, “Improved model-free predictive current control for synchronous reluctance motor drives,” IEEE Trans. on Industrial Electronics, Vol.63, No.6, pp. 3942-3953, 2016. https://doi.org/10.1109/TIE.2016.2527629
- [48] C.-K. Lin et al., “A dual-voltage-vector model-free predictive current controller for synchronous reluctance motor drive systems,” Energies, Vol.11, No.7, Article No.1743, 2018. https://doi.org/10.3390/en11071743
- [49] C.-H. Lin and J.-C. Ting, “Novel nonlinear backstepping control of synchronous reluctance motor drive system for position tracking of periodic reference inputs with torque ripple consideration,” Int. J. of Control, Automation and Systems, Vol.17, No.1, pp. 1-17, 2019. https://doi.org/10.1007/s12555-017-0703-0
- [50] C.-H. Lin, “Precision motion control of a linear permanent magnet synchronous machine based on linear optical-ruler sensor and hall sensor,” Sensors, Vol.18, No.10, Article No.3345, 2018. https://doi.org/10.3390/s18103345
- [51] P.-S. Tsai, T.-F. Wu, J.-Y. Chen, and P.-T. Teng, “Micro-stepping motor for instrument panel using PWM drive method,” Processes, Vol.11, No.2, Article No.329, 2023. https://doi.org/10.3390/pr11020329
- [52] M.-Y. Chen, S.-C. Huang, S.-K. Hung, and L.-C. Fu, “Design and implementation of a new six-DOF Maglev positioner with a fluid bearing,” IEEE/ASME Trans. on Mechatronics, Vol.16, No.3, pp. 449-458, 2011. https://doi.org/10.1109/TMECH.2011.2121917
- [53] M.-Y. Chen, T.-B. Lin, S.-K. Hung, and L.-C. Fu, “Design and experiment of a macro–micro planar Maglev positioning system,” IEEE Trans. on Industrial Electronics, Vol.59, No.11, pp. 4128-4139, 2012. https://doi.org/10.1109/TIE.2011.2174531
- [54] P. Berkelman and Y.-S. Lu, “Long range six degree-of-freedom magnetic levitation using low cost sensing and control,” J. Robot. Mechatron., Vol.32, No.3, pp. 683-691, 2020. https://doi.org/10.20965/jrm.2020.p0683
- [55] C.-C. Liu, “Dynamic behavior analysis of cantilever-type nano-mechanical electrostatic actuator,” Int. J. of Non-Linear Mechanics, Vol.82, pp. 124-130, 2016. https://doi.org/10.1016/j.ijnonlinmec.2016.03.007
- [56] C.-C. Liu, “Surface effect on dynamic characteristics of the electrostatically nano-beam actuator,” Computers & Electrical Engineering, Vol.51, pp. 284-290, 2016. https://doi.org/10.1016/j.compeleceng.2015.09.019
- [57] K.-H. Liang, K.-H. Kao, and S.-C. Tien, “Precision positioning with shape-memory-alloy actuators,” Int. J. of Automation and Smart Technology, Vol.3, No.4, pp. 265-271, 2013.
- [58] J.-H. Lin and M.-H. Chiang, “Hysteresis analysis and positioning control for a Magnetic shape memory actuator,” Sensors, Vol.15, No.4, pp. 8054-8071, 2015. https://doi.org/10.3390/s150408054
- [59] C.-H. Yeh et al., “Real-time digital hardware simulation of the rodless pneumatic system,” IEEE Trans. on Circuits and Systems II: Express Briefs, Vol.63, No.9, pp. 853-857, 2016. https://doi.org/10.1109/TCSII.2016.2535043
- [60] H.-T. Lin, “A novel real-time path servo control of a hardware-in-the-loop for a large-stroke asymmetric rod-less pneumatic system under variable loads,” Sensors, Vol.17, No.6, Article No.1283, 2017. https://doi.org/10.3390/s17061283
- [61] L.-W. Lee, H.-H. Chiang, and I.-H. Li, “Development and control of a pneumatic-actuator 3-DOF translational parallel manipulator with robot vision,” Sensors, Vol.19, No.6, Article No.1459, 2019. https://doi.org/10.3390/s19061459
- [62] I.-H. Li, H.-H. Chiang, and L.-W. Lee, “Development of a linear delta robot with three horizontal-axial pneumatic actuators for 3-DOF trajectory tracking,” Applied Sciences, Vol.10, No.10, Article No.3526, 2020. https://doi.org/10.3390/app10103526
- [63] L.-W. Lee, Y.-H. Yang, and I.-H. Li, “A design of pneumatic-driven translational pyramidal manipulator and its actively disturbance rejection tracking control,” Mechatronics, Vol.98, Article No.103122, 2024. https://doi.org/10.1016/j.mechatronics.2023.103122
- [64] D. Shaw, J.-J. Yu, and C. Chieh, “Design of a hydraulic motor system driven by compressed air,” Energies, Vol.6, No.7, pp. 3149-3166, 2013. https://doi.org/10.3390/en6073149
- [65] S.-H. Chen and L.-C. Fu, “Observer-based backstepping control of a 6-dof parallel hydraulic manipulator,” Control Engineering Practice, Vol.36, pp. 100-112, 2015. https://doi.org/10.1016/j.conengprac.2014.11.011
- [66] M.-H. Chiang, L.-W. Lee, and H.-H. Liu, “Adaptive fuzzy controller with self-tuning fuzzy sliding-mode compensation for position control of an electro-hydraulic displacement-controlled system,” J. of Intelligent and Fuzzy Systems: Applications in Engineering and Technology, Vol.26, No.2, pp. 815-830, 2014. https://doi.org/10.3233/IFS-130773
- [67] K.-S. Ou, K.-S. Chen, T.-S. Yang, and S.-Y. Lee, “Fast positioning and impact minimizing of MEMS devices by suppression of motion-induced vibration by command-shaping method,” J. of Microelectromechanical Systems, Vol.20, No.1, pp. 128-139, 2011. https://doi.org/10.1109/JMEMS.2010.2100023
- [68] C.-D. Chen, Y.-J. Wang, and P. Chang, “A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection,” Optics Express, Vol.20, No.24, pp. 27003-27017, 2012. https://doi.org/10.1364/OE.20.027003
- [69] M. T. Shih, S. C. Shen, S. J. Chang, and H.-J. Huang, “A novel dual screen projection system using balance-type micromirror with piezoelectric actuator,” 16th Int. Solid-State Sensors, Actuators and Microsystems Conf., pp. 562-565, 2011. https://doi.org/10.1109/TRANSDUCERS.2011.5969714
- [70] S. C. Shen, Y. J. Wang, and M. T. Shih, “A novel dual-screen projection system using a balance-type micromirror with a piezoelectric actuator,” Sensors and Actuators A: Physical, Vol.199, pp. 80-88, 2013. https://doi.org/10.1016/j.sna.2013.05.005
- [71] C.-M. Sun et al., “Implementation of complementary metal–oxide–semiconductor microelectromechanical systems Lorentz force two axis angular actuator,” Japanese J. of Applied Physics, Vol.51, No.6S, Article No.06FL09, 2012. https://doi.org/10.1143/JJAP.51.06FL09
- [72] A. Vergara, T. Tsukamoto, W. Fang, and S. Tanaka, “Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator,” J. of Micromechanics and Microengineering, Vol.30, No.11, Article No.115020, 2020. https://doi.org/10.1088/1361-6439/abb756
- [73] A. Vergara, T. Tsukamoto, W. Fang, and S. Tanaka, “Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors,” Sensors and Actuators A: Physical, Vol.332, Part 1, Article No.113131, 2021. https://doi.org/10.1016/j.sna.2021.113131
- [74] A. Vergara, T. Tsukamoto, W. Fang, and S. Tanaka, “Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control,” J. of Micromechanics and Microengineering, Vol.33, No.1, Article No.014001, 2022. https://doi.org/10.1088/1361-6439/aca101
- [75] H.-C. Cheng et al., “On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle,” Sensors and Actuators A: Physical, Vol.349, Article No.114010, 2023. https://doi.org/10.1016/j.sna.2022.114010
- [76] S.-T. Wu, S.-C. Mo, and B.-S. Wu, “An LVDT-based self-actuating displacement transducer,” Sensors and Actuators A: Physical, Vol.141, No.2, pp. 558-564, 2008. https://doi.org/10.1016/j.sna.2007.10.027
- [77] S.-T. Wu and J.-L. Hong, “Five-point amplitude estimation of sinusoidal signals: With application to LVDT signal conditioning,” IEEE Trans. on Instrumentation and Measurement, Vol.59, No.3, pp. 623-630, 2010. https://doi.org/10.1109/TIM.2009.2025072
- [78] H. Y. Tsai, J. S. Chen, and Y. Y. Hsu, “Design and implementation of a novel communication interface for eddy current displacement sensor,” Advanced Materials Research, Vols.201-203, pp. 2312-2316, 2011. https://doi.org/10.4028/www.scientific.net/AMR.201-203.2312
- [79] Y.-T. Liu, Y.-L. Kuo, and D.-W. Yan, “System integration for on-machine measurement using a capacitive LVDT-like contact sensor,” Advances in Manufacturing, Vol.5, No.1, pp. 50-58, 2017. https://doi.org/10.1007/s40436-016-0169-y
- [80] G.-Y. Zhuang, H.-W. Lee, and C.-H. Liu, “Determination of the position and orientation of a flat piezoelectric micro-stage by moving the optical axis,” Review of Scientific Instruments, Vol.85, No.10, Article No.105004, 2014. https://doi.org/10.1063/1.4897492
- [81] H.-W. Lee, W.-H. Lin, and C.-H. Liu, “Development of a radial error measurement device for rotary tables,” J. of the Chinese Society of Mechanical Engineers, Vol.35, No.2, pp. 149-156, 2014.
- [82] Y.-C. Wang, L.-H. Shyu, E. Manske, C.-P. Chang, and S.-S. Lin, “Automatic calibration system for precision angle measurement devices,” Int. J. of Automation and Smart Technology, Vol.4, No.3, pp. 163-168, 2014.
- [83] H.-W. Lee, K.-Y. Huang, H.-T. Peng, and C.-H. Liu, “A real time error measuring device for meso-scale machine tools,” Sensors and Actuators A: Physical, Vol.244, pp. 213-222, 2016. https://doi.org/10.1016/j.sna.2016.04.005
- [84] H.-W. Lee and C.-H. Liu, “High precision optical sensors for real-time on-line measurement of straightness and angular errors for smart manufacturing,” Smart Science, Vol.4, No.3, pp. 134-141, 2016. https://doi.org/10.1080/23080477.2016.1207407
- [85] W. N. Cheng et al., “On-line linear guideway monitoring using laser mouse sensor,” IOP Conf. Series: Materials Science and Engineering, Vol.1009, Article No.012012, 2021. https://doi.org/10.1088/1757-899X/1009/1/012012
- [86] Y.-T. Chen, W.-C. Lin, and C.-S. Liu, “Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage,” Optics and Lasers in Engineering, Vol.92, pp. 94-104, 2017. https://doi.org/10.1016/j.optlaseng.2016.10.026
- [87] C.-S. Liu, J.-Y. Zeng, and Y.-T. Chen, “Development of positioning error measurement system based on geometric optics for long linear stage,” The Int. J. of Advanced Manufacturing Technology, Vol.115, No.7, pp. 2595-2606, 2021. https://doi.org/10.1007/s00170-021-07332-8
- [88] S.-K. Hung, Y.-H. Chung, C.-L. Chen, and K.-H. Chang, “Optoelectronic angular displacement measurement technology for 2-dimensional mirror galvanometer,” Sensors, Vol.22, No.3, Article No.872, 2022. https://doi.org/10.3390/s22030872
- [89] Y.-T. Chen, C.-L. Wang, and C.-S. Liu, “Design of a measurement system for measuring geometric errors of a workpiece table during two-axis synchronous motion,” Proc. of the Institution of Mechanical Engineers, Part B: J. of Engineering Manufacture, 2022. https://doi.org/10.1177/09544054221136395
- [90] Y.-S. Hsu, C.-S. Liu, J.-H. Hung, and H.-H. Chiang, “Development of fixed-point two-degree-of-freedom positioning errors measurement system with precision improvement function,” Measurement, Vol.239, Article No.115525, 2025. https://doi.org/10.1016/j.measurement.2024.115525
- [91] S.-T. Wu, J.-Y. Chen, and S.-H. Wu, “A rotary encoder with an eccentrically mounted ring magnet,” IEEE Trans. on Instrumentation and Measurement, Vol.63, No.8, pp. 1907-1915, 2014. https://doi.org/10.1109/TIM.2014.2302243
- [92] S.-T. Wu and Z.-L. Wang, “Equilateral measurement of rotational positions with magnetic encoders,” IEEE Trans. on Instrumentation and Measurement, Vol.65, No.10, pp. 2360-2368, 2016. https://doi.org/10.1109/TIM.2016.2578579
- [93] Z.-H. Xu et al., “Grooved multi-pole magnetic gratings for high-resolution positioning systems,” Japanese J. of Applied Physics, Vol.54, No.6S1, Article No.06FP01, 2015. https://doi.org/10.7567/JJAP.54.06FP01
- [94] L. H. Shyu, Y. C. Wang, and J. C. Lin, “A compact signal processing with position sensitive detectors utilized for Michelson interferometer,” Key Engineering Materials, Vol.437, pp. 98-102, 2010. https://doi.org/10.4028/www.scientific.net/kem.437.98
- [95] H.-L. Hsieh, J.-C. Chen, G. Lerondel, and J.-Y. Lee, “Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer,” Optics Express, Vol.19, No.10, pp. 9770-9782, 2011. https://doi.org/10.1364/OE.19.009770
- [96] H.-L. Hsieh, J.-Y. Lee, and Y.-C. Chung, “Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement,” Advanced Optical Technologies, Vol.3, No.4, pp. 395-400, 2014. https://doi.org/10.1515/aot-2014-0027
- [97] H.-L. Hsieh and P.-C. Kuo, “Heterodyne speckle interferometry for measurement of two-dimensional displacement,” Optics Express, Vol.28, No.1, pp. 724-736, 2020. https://doi.org/10.1364/OE.382494
- [98] C.-P. Chang, T.-C. Tu, S.-R. Huang, Y.-C. Wang, and S.-C. Chang, “Development of the heterodyne laser encoder system for the X–Y positioning stage,” Sensors, Vol.21, No.17, Article No.5775, 2021. https://doi.org/10.3390/s21175775
- [99] H.-L. Hsieh and B.-Y. Sun, “Development of a compound speckle interferometer for precision three-degree-of-freedom displacement measurement,” Sensors, Vol.21, No.5, Article No.1828, 2021. https://doi.org/10.3390/s21051828
- [100] Y.-T. Liu, H.-L. Wu, J.-Y. Wang, and Y. Yamagata, “Contact-type profile measuring device using laser interferometry system incorporating hybrid actuating system,” Int. J. Automation Technol., Vol.7, No.5, pp. 489-497, 2013. https://doi.org/10.20965/ijat.2013.p0489
- [101] J.-Y. Lee, M.-P. Lu, K.-Y. Lin, and S.-H. Huang, “Measurement of in-plane displacement by wavelength-modulated heterodyne speckle interferometry,” Applied Optics, Vol.51, No.8, pp. 1095-1100, 2012. https://doi.org/10.1364/AO.51.001095
- [102] H.-L. Hsieh and W. Chen, “Heterodyne Wollaston laser encoder for measurement of in-plane displacement,” Optics Express, Vol.24, No.8, pp. 8693-8707, 2016. https://doi.org/10.1364/OE.24.008693
- [103] L.-Y. Chen, J.-Y. Lee, H.-S. Chang, and Y. Yang, “Development of an angular displacement measurement by birefringence heterodyne interferometry,” Smart Science, Vol.3, No.4, pp. 188-192, 2015. https://doi.org/10.1080/23080477.2015.11670490
- [104] H.-L. Hsieh, J.-Y. Lee, L.-Y. Chen, and Y. Yang, “Development of an angular displacement measurement technique through birefringence heterodyne interferometry,” Optics Express, Vol.24, No.7, pp. 6802-6813, 2016. https://doi.org/10.1364/OE.24.006802
- [105] J.-Y. Lee, C.-T. Hsu, S.-H. Chang, and W.-Y. Chen, “Dual beam polarization interferometry for roll angular displacement measurement,” Measurement, Vol.222, Article No.113571, 2023. https://doi.org/10.1016/j.measurement.2023.113571
- [106] C.-C. Hsu, H. Chen, C.-W. Chiang, and Y.-W. Chang, “Dual displacement resolution encoder by integrating single holographic grating sensor and heterodyne interferometry,” Optics Express, Vol.25, No.24, pp. 30189-30202, 2017. https://doi.org/10.1364/OE.25.030189
- [107] C.-M. Jan, C.-S. Liu, and C.-Y. Lin, “Development of low-cost heterodyne interferometer with virtual electronic phasemeter,” Measurement and Control, Vol.55, Nos.5-6, pp. 229-238, 2022. https://doi.org/10.1177/00202940221095529
- [108] C.-P. Chang, S.-C. Chang, Y.-C. Wang, and P.-Y. He, “A novel analog interpolation method for heterodyne laser interferometer,” Micromachines, Vol.14, No.3, Article No.696, 2023. https://doi.org/10.3390/mi14030696
- [109] C.-P. Chang, P.-C. Tung, L.-H. Shyu, Y.-C. Wang, and E. Manske, “Fabry–Perot displacement interferometer for the measuring range up to 100 mm,” Measurement, Vol.46, No.10, pp. 4094-4099, 2013. https://doi.org/10.1016/j.measurement.2013.06.029
- [110] C.-P. Chang, P.-C. Tung, L.-H. Shyu, Y.-C. Wang, and E. Manske, “Modified Fabry-Perot interferometer for displacement measurement in ultra large measuring range,” Review of Scientific Instruments, Vol.84, No.5, Article No.053105, 2013. https://doi.org/10.1063/1.4803672
- [111] L.-H. Shyu, Y.-C. Wang, C.-P. Chang, H.-T. Shih, and E. Manske, “A signal interpolation method for Fabry–Perot interferometer utilized in mechanical vibration measurement,” Measurement, Vol.92, pp. 83-88, 2016. https://doi.org/10.1016/j.measurement.2016.05.072
- [112] C.-P. Chang, Y.-C. Shih, S.-C. Chang, and Y.-C. Wang, “Laser encoder system for X-Y positioning stage,” Mechatronics, Vol.63, Article No.102274, 2019. https://doi.org/10.1016/j.mechatronics.2019.102274
- [113] H.-T. Shih et al., “Automatic calibration system for micro-displacement devices,” Measurement Science and Technology, Vol.29, No.8, Article No.084003, 2018. https://doi.org/10.1088/1361-6501/aacac8
- [114] S.-C. Chang, C.-P. Chang, Y.-C. Wang, and Z.-F. You, “Linear displacement and straightness measurement by Fabry-Perot interferometer integrated with an optoelectronic module,” Tehnički Glasnik, Vol.16, No.3, pp. 420-425, 2022. https://doi.org/10.31803/tg-20220424124800
- [115] C.-H. Liu, H.-L. Huang, and H.-W. Lee, “Five-degrees-of-freedom diffractive laser encoder,” Applied Optics, Vol.48, No.14, pp. 2767-2777, 2009. https://doi.org/10.1364/AO.48.002767
- [116] J.-Y. Lee and G.-A. Jiang, “Displacement measurement using a wavelength-phase-shifting grating interferometer,” Optics Express, Vol.21, No.21, pp. 25553-25564, 2013. https://doi.org/10.1364/OE.21.025553
- [117] C.-C. Hsu, Y.-Y. Sung, Z.-R. Lin, and M.-C. Kao, “Prototype of a compact displacement sensor with a holographic diffraction grating,” Optics & Laser Technology, Vol.48, pp. 200-205, 2013. https://doi.org/10.1016/j.optlastec.2012.10.003
- [118] H.-L. Hsieh and S.-W. Pan, “Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements,” Optics Express, Vol.23, No.3, pp. 2451-2465, 2015. https://doi.org/10.1364/oe.23.002451
- [119] C.-C. Hsu, H. Chen, H.-Y. Tseng, S.-C. Lan, and J. Lin, “High displacement resolution encoder by using triple grating combination interferometer,” Optics & Laser Technology, Vol.105, pp. 221-228, 2018. https://doi.org/10.1016/j.optlastec.2018.03.005
- [120] J.-Y. Lee and Y.-X. Wang, “Polarization-standing-wave interferometer for displacement measurement,” Optics & Laser Technology, Vol.111, pp. 110-114, 2019. https://doi.org/10.1016/j.optlastec.2018.09.025
- [121] Y.-C. Huang and C.-H. Cheng, “Robust tracking control of a piezodriven monolithic flexure-hinge stage,” Science in China Series G: Physics, Mechanics and Astronomy, Vol.52, No.6, pp. 926-934, 2009. https://doi.org/10.1007/s11433-009-0110-5
- [122] C.-Y. Lin and P.-Y. Chen, “Precision tracking control of a biaxial piezo stage using repetitive control and double-feedforward compensation,” Mechatronics, Vol.21, No.1, pp. 239-249, 2011. https://doi.org/10.1016/j.mechatronics.2010.11.002
- [123] Y. Ting, T. V. Nguyen, and J.-C. Chen, “Design and performance evaluation of an exponentially weighted moving average–based adaptive control for piezo-driven motion platform,” Advances in Mechanical Engineering, Vol.10, No.6, 2018. https://doi.org/10.1177/1687814018767194
- [124] Y. Ting, C. C. Li, and C. M. Lin, “Controller design for high-frequency cutting using a piezo-driven microstage,” Precision Engineering, Vol.35, No.3, pp. 455-463, 2011. https://doi.org/10.1016/j.precisioneng.2011.02.004
- [125] C.-J. Lin and P.-T. Lin, “Particle swarm optimization based feedforward controller for a XY PZT positioning stage,” Mechatronics, Vol.22, No.5, pp. 614-628, 2012. https://doi.org/10.1016/j.mechatronics.2012.02.001
- [126] Y.-J. Li and S.-C. Tien, “Linear model-based feedforward control for improving tracking-performance of linear motors,” Asian J. of Control, Vol.16, No.6, pp. 1602-1611, 2014. https://doi.org/10.1002/asjc.842
- [127] C.-Y. Lin and C.-M. Chang, “Hybrid proportional derivative/repetitive control for active vibration control of smart piezoelectric structures,” J. of Vibration and Control, Vol.19, No.7, pp. 992-1003, 2013. https://doi.org/10.1177/1077546312436749
- [128] H.-C. Yu, T.-C. Chen, and C.-S. Liu, “Adaptive fuzzy logic proportional-integral-derivative control for a miniature autofocus voice coil motor actuator with retaining force,” IEEE Trans. on Magnetics, Vol.50, No.11, Article No.8203204, 2014. https://doi.org/10.1109/TMAG.2014.2323423
- [129] W.-L. Mao and D.-Y. Shiu, “Precision trajectory tracking on XY motion stage using robust interval type-2 fuzzy PI sliding mode control method,” Int. J. of Precision Engineering and Manufacturing, Vol.21, No.5, pp. 797-818, 2020. https://doi.org/10.1007/s12541-019-00267-x
- [130] C.-Y. Lin, Y.-H. Huang, and W.-T. Chen, “Multimodal suppression of vibration in smart flexible beam using piezoelectric electrode-based switching control,” Mechatronics, Vol.53, pp. 152-167, 2018. https://doi.org/10.1016/j.mechatronics.2018.06.005
- [131] F.-C. Kuo et al., “Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage,” The Int. J. of Advanced Manufacturing Technology, Vol.111, No.9, pp. 2759-2772, 2020. https://doi.org/10.1007/s00170-020-06274-x
- [132] Y. Ting, C.-C. Li, and T. V. Nguyen, “Composite controller design for a 6DOF Stewart nanoscale platform,” Precision Engineering, Vol.37, No.3, pp. 671-683, 2013. https://doi.org/10.1016/j.precisioneng.2013.01.012
- [133] Y.-C. Huang and Y.-H. Li, “Improved particle swarm optimization by updating constraints of PID control for real time linear motor positioning,” Intelligent Automation & Soft Computing, Vol.19, No.3, pp. 425-437, 2013. https://doi.org/10.1080/10798587.2013.796624
- [134] J. Lin and C. B. Chiang, “Positioning and vibration suppression for multiple degrees of freedom flexible structure by genetic algorithm and input shaping,” Smart Structures and Systems, Vol.14, No.3, pp. 347-365, 2014. https://doi.org/10.12989/sss.2014.14.3.347
- [135] P.-L. Yen, M.-T. Yan, and Y. Chen, “Hysteresis compensation and adaptive controller design for a piezoceramic actuator system in atomic force microscopy,” Asian J. of Control, Vol.14, No.4, pp. 1012-1027, 2012. https://doi.org/10.1002/asjc.453
- [136] C.-T. Hsieh, H.-T. Yau, C.-C. Wang, and Y.-S. Hsieh, “Particle swarm optimization used with proportional–derivative control to analyze nonlinear behavior in the atomic force microscope,” Advances in Mechanical Engineering, Vol.8, No.9, 2016. https://doi.org/10.1177/1687814016667271
- [137] C.-T. Hsieh, H.-T. Yau, C.-C. Wang, and Y.-S. Hsieh, “Nonlinear behavior analysis and control of the atomic force microscope and circuit implementation,” J. of Low Frequency Noise, Vibration and Active Control, Vol.38, Nos.3-4, pp. 1576-1593, 2019. https://doi.org/10.1177/1461348418775891
- [138] Y.-C. Huang, Y.-W. Su, and P.-C. Chuo, “Iterative learning control bandwidth tuning using the particle swarm optimization technique for high precision motion,” Microsystem Technologies, Vol.23, No.2, pp. 361-370, 2017. https://doi.org/10.1007/s00542-015-2649-6
- [139] K.-H. Tseng, C.-Y. Chang, Y. Cahyadi, M.-Y. Chung, and C.-L. Hsieh, “Development of proportional–integrative–derivative (PID) optimized for the micro electric discharge machine fabrication of nano-bismuth colloid,” Micromachines, Vol.11, No.12, Article No.1065, 2020. https://doi.org/10.3390/mi11121065
- [140] Y.-T. Liu, “Recent development of piezoelectric fast tool servo (FTS) for precision machining,” Int. J. of Precision Engineering and Manufacturing, Vol.25, No.4, pp. 851-874, 2024. https://doi.org/10.1007/s12541-023-00913-5
- [141] J.-C. Shen, W.-Y. Jywe, H.-K. Chiang, and Y.-L. Shu, “Precision tracking control of a piezoelectric-actuated system,” Precision Engineering, Vol.32, No.2, pp. 71-78, 2008. https://doi.org/10.1016/j.precisioneng.2007.04.002
- [142] H.-Y. Chen and J.-W. Liang, “Control of a 3D piezo-actuating table by using an adaptive sliding-mode controller for a drilling process,” Computers & Mathematics with Applications, Vol.64, No.5, pp. 1226-1234, 2012. https://doi.org/10.1016/j.camwa.2012.03.066
- [143] C.-J. Lin, C.-R. Lin, S.-K. Yu, and C.-R. Hsu, “Enhanced sliding mode control with CEMF compensation for tracking control of a piezoactuated flexure-based mechanism,” Advances in Mechanical Engineering, Vol.6, 2014. https://doi.org/10.1155/2014/769192
- [144] A.-C. Huang, Y.-M. Lin, and C.-Y. Kai, “Adaptive control of horizontal magnetic levitation system subject to external disturbances,” 7th IEEE Conf. on Industrial Electronics and Applications, pp. 467-471, 2012. https://doi.org/10.1109/ICIEA.2012.6360773
- [145] C.-Y. Kai and A.-C. Huang, “Adaptive control of magnetic levitation system subject to external disturbances,” J. of the Chinese Institute of Engineers, Vol.39, No.4, pp. 513-520, 2016. https://doi.org/10.1080/02533839.2015.1125992
- [146] J.-C. Shen and C.-C. Yan, “Tracking control of a precision stage with integral sliding-mode friction estimator,” Microsystem Technologies, Vol.19, No.11, pp. 1731-1736, 2013. https://doi.org/10.1007/s00542-013-1858-0
- [147] C.-J. Lin, M.-J. Li, and K.-R. Liu, “Tracking control of an ultrasonic linear motor actuated stage using a sliding-mode controller with friction compensation,” Smart Science, Vol.3, No.1, pp. 35-39, 2015. https://doi.org/10.1080/23080477.2015.11665634
- [148] Y.-T. Liu, T.-T. Kung, K.-M. Chang, and S.-Y. Chen, “Observer-based adaptive sliding mode control for pneumatic servo system,” Precision Engineering, Vol.37, No.3, pp. 522-530, 2013. https://doi.org/10.1016/j.precisioneng.2012.12.003
- [149] L.-W. Lee and I.-H. Li, “Design and implementation of a robust FNN-based adaptive sliding-mode controller for pneumatic actuator systems,” J. of Mechanical Science and Technology, Vol.30, No.1, pp. 381-396, 2016. https://doi.org/10.1007/s12206-015-1243-2
- [150] C.-J. Lin, T.-Y. Sie, W.-L. Chu, H.-T. Yau, and C.-H. Ding, “Tracking control of pneumatic artificial muscle-activated robot arm based on sliding-mode control,” Actuators, Vol.10, No.3, Article No.66, 2021. https://doi.org/10.3390/act10030066
- [151] K.-M. Chang, W.-T. Cheng, and Y.-T. Liu, “Development of non-axisymmetric aspheric ultraprecision machining using FPGA-based piezoelectric FTS,” Sensors and Actuators A: Physical, Vol.291, pp. 99-106, 2019. https://doi.org/10.1016/j.sna.2019.03.052
- [152] K.-M. Chang, C.-H. Li, and Y.-T. Liu, “Integral non-singular terminal sliding mode control for tri-axis piezoelectric stage,” 25th Int. Conf. on Mechatronics Technology, 2022. https://doi.org/10.1109/ICMT56556.2022.9997692
- [153] H.-T. Yau, C.-C. Wang, C.-T. Hsieh, and C.-C. Cho, “Nonlinear analysis and control of the uncertain micro-electro-mechanical system by using a fuzzy sliding mode control design,” Computers & Mathematics with Applications, Vol.61, No.8, pp. 1912-1916, 2011. https://doi.org/10.1016/j.camwa.2010.07.019
- [154] C.-Y. Lin and H.-W. Jheng, “Active vibration suppression of a motor-driven piezoelectric smart structure using adaptive fuzzy sliding mode control and repetitive control,” Applied Sciences, Vol.7, No.3, Article No.240, 2017. https://doi.org/10.3390/app7030240
- [155] S.-H. Chen, W.-L. Mao, and W.-X. Lu, “Application of the adaptive fuzzy wavelet neural network for two-axis trajectory control,” IET Control Theory & Applications, Vol.16, No.10, pp. 1015-1031, 2022. https://doi.org/10.1049/cth2.12282
- [156] W.-L. Mao and Suprapto, “Indirect fuzzy contour tracking for X–Y PMSM actuated motion system applications,” IET Electric Power Applications, Vol.12, No.1, pp. 12-24, 2018. https://doi.org/10.1049/iet-epa.2016.0881
- [157] W.-L. Mao and C.-T. Chu, “Modeless magnetic bearing system tracking using an adaptive fuzzy Hermite neural network method,” IEEE Sensors J., Vol.19, No.14, pp. 5904-5915, 2019. https://doi.org/10.1109/JSEN.2019.2906730
- [158] C.-Y. Lin and P.-Y. Chen, “Hysteresis compensation and high-performance tracking control of piezoelectric actuators,” Proc. of the Institution of Mechanical Engineers, Part I: J. of Systems and Control Engineering, Vol.226, No.8, pp. 1050-1059, 2012. https://doi.org/10.1177/0959651812447666
- [159] C.-Y. Lin and Y.-C. Liu, “Precision tracking control and constraint handling of mechatronic servo systems using model predictive control,” IEEE/ASME Trans. on Mechatronics, Vol.17, No.4, pp. 593-605, 2012. https://doi.org/10.1109/TMECH.2011.2111376
- [160] C.-Y. Lin, C.-Y. Li, F.-J. Shiou, and C.-J. Chen, “Servo control design of a micro/nano positioning stage using FPGA based embedded hardware,” Advanced Science Letters, Vol.8, pp. 136-140, 2012. https://doi.org/10.1166/asl.2012.2380
- [161] C.-Y. Lin and C.-Y. Li, “Design and implementation of advanced digital controls for piezo-actuated systems using embedded control platform,” Applied Mathematics & Information Sciences, Vol.9, No.1, pp. 251-258, 2015. https://doi.org/10.12785/amis/091L32
- [162] F.-S. Lee, J.-C. Wang, and C.-J. Chien, “B-spline network-based iterative learning control for trajectory tracking of a piezoelectric actuator,” Mechanical Systems and Signal Processing, Vol.23, No.2, pp. 523-538, 2009. https://doi.org/10.1016/j.ymssp.2008.06.003
- [163] Y.-C. Huang and M.-S. Lin, “Tracking control of a piezo-actuated stage based on a frictional model,” Asian J. of Control, Vol.11, No.3, pp. 287-294, 2009. https://doi.org/10.1002/asjc.105
- [164] C.-Y. Lin and S.-C. Hsu, “Robust μ control and repetitive control for precision motion control of a pneumatic actuating table,” Proc. of the Institution of Mechanical Engineers, Part I: J. of Systems and Control Engineering, Vol.229, No.7, pp. 625-638, 2015. https://doi.org/10.1177/0959651815577238
- [165] W.-H. Hsieh, Y.-S. Chen, and S.-T. Wu, “Iterative learning control of an inverse novel ball screw transmission system,” J. of Intelligent & Fuzzy Systems: Applications in Engineering and Technology, Vol.40, No.4, pp. 8043-8052, 2021. https://doi.org/10.3233/JIFS-189627
- [166] Y. Wang, F. Gao, and F. J. Doyle III, “Survey on iterative learning control, repetitive control, and run-to-run control,” J. of Process Control, Vol.19, No.10, pp. 1589-1600, 2009. https://doi.org/10.1016/j.jprocont.2009.09.006
- [167] Y.-T. Liu, K.-M. Chang, and W.-Z. Li, “Model reference adaptive control for a piezo-positioning system,” Precision Engineering, Vol.34, No.1, pp. 62-69, 2010. https://doi.org/10.1016/j.precisioneng.2009.03.006
- [168] Y.-F. Peng, “Development of robust intelligent tracking control system for uncertain nonlinear systems using H∞ control technique,” Applied Soft Computing, Vol.11, No.3, pp. 3135-3146, 2011. https://doi.org/10.1016/j.asoc.2010.12.016
- [169] W.-L. Huang et al., “Integrating time-optimal motion profiles with position control for a high-speed permanent magnet linear synchronous motor planar motion stage,” Precision Engineering, Vol.68, pp. 106-123, 2021. https://doi.org/10.1016/j.precisioneng.2020.11.009
- [170] C.-H. Lin and K.-T. Chang, “Micrometer backstepping control system for linear motion single axis robot machine drive,” Sensors, Vol.19, No.16, Article No.3616, 2019. https://doi.org/10.3390/s19163616
- [171] W. Chen, K.-S. Chen, and M.-C. Tsai, “Finite element input shaping design for vibration suppression of mechatronics systems,” 2019 IEEE Int. Conf. on Mechatronics, pp. 37-42, 2019. https://doi.org/10.1109/ICMECH.2019.8722868
- [172] F.-C. Wang, J.-F. Lu, T.-T. Chung, and J.-Y. Yen, “Iterative parameter optimization for multiple switching control applied to a precision stage for microfabrication,” Machines, Vol.9, No.8, Article No.153, 2021. https://doi.org/10.3390/machines9080153
- [173] S. T. Smith, “Flexures: Elements of Elastic Mechanisms,” CRC Press, 2000. https://doi.org/10.1201/9781482282962
- [174] D.-A. Wang, J.-H. Chen, and H.-T. Pham, “A constant-force bistable micromechanism,” Sensors and Actuators A: Physical, Vol.189, pp. 481-487, 2013. https://doi.org/10.1016/j.sna.2012.10.042
- [175] T.-P. Dao and S.-C. Huang, “Robust design for a flexible bearing with 1-DOF translation using the Taguchi method and the utility concept,” J. of Mechanical Science and Technology, Vol.29, No.8, pp. 3309-3320, 2015. https://doi.org/10.1007/s12206-015-0728-3
- [176] S.-C. Huang and T.-P. Dao, “Design and computational optimization of a flexure-based XY positioning platform using FEA-based response surface methodology,” Int. J. of Precision Engineering and Manufacturing, Vol.17, No.8, pp. 1035-1048, 2016. https://doi.org/10.1007/s12541-016-0126-5
- [177] T.-P. Dao and S.-C. Huang, “Optimization of a two degrees of freedom compliant mechanism using Taguchi method-based grey relational analysis,” Microsystem Technologies, Vol.23, No.10, pp. 4815-4830, 2017. https://doi.org/10.1007/s00542-017-3292-1
- [178] N.-T. Huynh, S.-C. Huang, and T.-P. Dao, “Optimal displacement amplification ratio of bridge-type compliant mechanism flexure hinge using the Taguchi method with grey relational analysis,” Microsystem Technologies, Vol.27, No.4, pp. 1251-1265, 2021. https://doi.org/10.1007/s00542-018-4202-x
- [179] T.-H. Nguyen, H.-T. Pham, N. D. K. Tran, and D.-A. Wang, “Kinetostatic modeling of an asymmetrical double-stepped beam for displacement amplification,” J. of Mechanisms and Robotics, Vol.17, No.1, Article No.011003, 2025. https://doi.org/10.1115/1.4065521
- [180] H.-R. Lin, C.-H. Cheng, and S.-K. Hung, “Design and quasi-static characteristics study on a planar piezoelectric nanopositioner with ultralow parasitic rotation,” Mechatronics, Vol.31, pp. 180-188, 2015. https://doi.org/10.1016/j.mechatronics.2015.08.003
- [181] T.-P. Dao, S.-C. Huang, and N. L. Chau, “Robust parameter design for a compliant microgripper based on hybrid Taguchi-differential evolution algorithm,” Microsystem Technologies, Vol.24, No.3, pp. 1461-1477, 2018. https://doi.org/10.1007/s00542-017-3534-2
- [182] T.-P. Dao and S.-C. Huang, “A compact quasi-zero stiffness vibration isolator using flexure-based spring mechanisms capable of tunable stiffness,” Int. J. of Mechanical and Mechatronics Engineering, Vol.10, No.8, pp. 1572-1581, 2016. https://doi.org/10.5281/zenodo.1126329
- [183] Y.-S. Chang, V. N. D. Kieu, and S.-C. Huang, “Optimal design of a leaf flexure compliant mechanism based on 2-DOF tuned mass damping stage analysis,” Micromachines, Vol.13, No.6, Article No.817, 2022. https://doi.org/10.3390/mi13060817
- [184] G.-H. Feng and Y.-L. Pan, “Establishing a cost-effective sensing system and signal processing method to diagnose preload levels of ball screws,” Mechanical Systems and Signal Processing, Vol.28, pp. 78-88, 2012. https://doi.org/10.1016/j.ymssp.2011.10.004
- [185] G.-H. Feng and Y.-L. Pan, “Investigation of ball screw preload variation based on dynamic modeling of a preload adjustable feed-drive system and spectrum analysis of ball-nuts sensed vibration signals,” Int. J. of Machine Tools and Manufacture, Vol.52, No.1, pp. 85-96, 2012. https://doi.org/10.1016/j.ijmachtools.2011.09.008
- [186] C.-R. Wang, D.-S. Liu, C.-H. Huang, and T.-N. Shiau, “Numerical investigation into dynamic behavior of adjustable preload double-nut ball screw,” J. of Mechanical Science and Technology, Vol.30, No.10, pp. 4489-4496, 2016. https://doi.org/10.1007/s12206-016-0916-9
- [187] C.-C. Wei and R.-S. Lai, “Kinematical analyses and transmission efficiency of a preloaded ball screw operating at high rotational speeds,” Mechanism and Machine Theory, Vol.46, No.7, pp. 880-898, 2011. https://doi.org/10.1016/j.mechmachtheory.2011.02.009
- [188] C. C. Wei and J. H. Horng, “Vibration analysis and transmission for high speed ball screw,” Advanced Science Letters, Vol.12, No.1, pp. 84-89, 2012. https://doi.org/10.1166/asl.2012.2808
- [189] C.-C. Wei, W.-L. Liou, and R.-S. Lai, “Wear analysis of the offset type preloaded ball–screw operating at high speed,” Wear, Vols.292-293, pp. 111-123, 2012. https://doi.org/10.1016/j.wear.2012.05.024
- [190] J.-H. Horng, S.-Y. Chern, C.-L. Li, and Y.-Y. Chen, “Surface temperature and wear particle analysis of vertical motion double-nut ball screws,” Industrial Lubrication and Tribology, Vol.69, No.6, pp. 952-962, 2017. https://doi.org/10.1108/ILT-10-2016-0244
- [191] Y.-C. Huang, C.-H. Kao, and S.-J. Chen, “Diagnosis of the hollow ball screw preload classification using machine learning,” Applied Sciences, Vol.8, No.7, Article No.1072, 2018. https://doi.org/10.3390/app8071072
- [192] J. P. Hung, G. N. Kuo, and T. L. Luo, “Analysis of the dynamic characteristics of the feeding stage with different guideway systems,” Applied Mechanics and Materials, Vols.423-426, pp. 1492-1495, 2013. https://doi.org/10.4028/www.scientific.net/AMM.423-426.1492
- [193] J. P. Hung, Y. L. Lai, and Y. R. Chen, “Dynamic characteristics of a gantry milling machine under the influence of linear guide preload,” Applied Mechanics and Materials, Vol.404, pp. 194-199, 2013. https://doi.org/10.4028/www.scientific.net/AMM.404.194
- [194] A. Miftakhova, Y.-Y. Chen, and J.-H. Horng, “Effect of rolling on the friction coefficient in three-body contact,” Advances in Mechanical Engineering, Vol.11, No.8, 2019. https://doi.org/10.1177/1687814019872303
- [195] P. C. Tsai, C. C. Cheng, and Y. C. Cheng, “A novel method based on operational modal analysis for monitoring the preload degradation of linear guideways in machine tools,” Mechanical Engineering J., Vol.4, No.2, Article No.16-00480, 2017, https://doi.org/10.1299/mej.16-00480
- [196] G.-H. Feng and C.-C. Wang, “Examining the misalignment of a linear guideway pair on a feed drive system under different ball screw preload levels with a cost-effective MEMS vibration sensing system,” Precision Engineering, Vol.50, pp. 467-481, 2017. https://doi.org/10.1016/j.precisioneng.2017.07.001
- [197] C.-C. Liu, M.-S. Tsai, and C.-C. Cheng, “Development of a novel transmission engaging model for characterizing the friction behavior of a feed drive system,” Mechanism and Machine Theory, Vol.134, pp. 425-439, 2019. https://doi.org/10.1016/j.mechmachtheory.2019.01.009
- [198] T.-Y. Huang, M.-S. Tsai, M.-T. Lin, and C.-C. Cheng, “Novel dynamic modeling of feed drive system using subspace method,” J. of the Chinese Institute of Engineers, Vol.42, No.5, pp. 385-400, 2019. https://doi.org/10.1080/02533839.2019.1598290
- [199] S.-H. Chen and M.-Y. Lin, “Development and design of intelligent lubricating equipment for feed systems,” Heliyon, Vol.10, No.4, Article No.e26124, 2024. https://doi.org/10.1016/j.heliyon.2024.e26124
- [200] Y.-Y. Chen and J.-H. Horng, “Investigation of lubricant viscosity and third-particle contribution to contact behavior in dry and lubricated three-body contact conditions,” Frontiers in Mechanical Engineering, Vol.10, Article No.1390335, 2024. https://doi.org/10.3389/fmech.2024.1390335
- [201] M.-K. Liu and P.-Y. Weng, “Fault diagnosis of ball bearing elements: A generic procedure based on time-frequency analysis,” Measurement Science Review, Vol.19, No.4, pp. 185-194, 2019. https://doi.org/10.2478/msr-2019-0024
- [202] W.-L. Chu, C.-J. Lin, and K.-C. Kao, “Fault diagnosis of a rotor and ball-bearing system using DWT integrated with SVM, GRNN, and visual dot patterns,” Sensors, Vol.19, No.21, Article No.4806, 2019. https://doi.org/10.3390/s19214806
- [203] C.-J. Lin, W.-L. Chu, C.-C. Wang, C.-K. Chen, and I.-T. Chen, “Diagnosis of ball-bearing faults using support vector machine based on the artificial fish-swarm algorithm,” J. of Low Frequency Noise, Vibration and Active Control, Vol.39, No.4, pp. 954-967, 2020. https://doi.org/10.1177/1461348419861822
- [204] C.-F. Han et al., “Determinations of thermoelastic instability for ball-bearing-like specimens with spacers and in grease lubrications,” Tribology Int., Vol.151, Article No.106415, 2020. https://doi.org/10.1016/j.triboint.2020.106415
- [205] R.-C. Cheng and K.-S. Chen, “Ball bearing multiple failure diagnosis using feature-selected autoencoder model,” The Int. J. of Advanced Manufacturing Technology, Vol.120, No.7, pp. 4803-4819, 2022. https://doi.org/10.1007/s00170-022-09054-x
- [206] C.-C. Wang, “Bifurcation analysis of high speed spindle air bearings,” J. of Vibration and Control, Vol.17, No.1, pp. 103-114, 2011. https://doi.org/10.1177/1077546309349906
- [207] C.-C. Wang, R.-M. Lee, H.-T. Yau, and T.-E. Lee, “Nonlinear analysis and simulation of active hybrid aerodynamic and aerostatic bearing system,” J. of Low Frequency Noise, Vibration and Active Control, Vol.38, Nos.3-4, pp. 1404-1421, 2019. https://doi.org/10.1177/1461348418792737
- [208] C.-C. Wang and C.-J. Lin, “Dynamic analysis and machine learning prediction of a nonuniform slot air bearing system,” J. of Computational and Nonlinear Dynamics, Vol.18, No.1, Article No.011007, 2023. https://doi.org/10.1115/1.4056227
- [209] J.-C. Renn, W.-J., Hsu, and Y.-R. Li, “Development of hydrostatic bearing with spool-type restrictor for large single column vertical lathe,” Acta Technica Corviniensis – Bulletin of Engineering, Vol.10, No.2, pp. 27-32, 2017.
- [210] D.-C. Chen, M.-F. Chen, C.-H. Pan, and J.-Y. Pan, “Study of membrane restrictors in hydrostatic bearing,” Advances in Mechanical Engineering, Vol.10, No.9, 2018. https://doi.org/10.1177/1687814018799604
- [211] W.-C. Kao, Y.-F. Chang, Y.-Y. Yang, Y.-C. Tseng, and C.-K. Sung, “Improving the stiffness of hydrostatic bearings using multilayer perceptron,” J. of the Chinese Society of Mechanical Engineers, Vol.39, No.6, pp. 585-590, 2018.
- [212] J. C. Renn and G. Y. Wu, “A study on active closed-loop gap control for hydrostatic bearing,” Applied Mechanics and Materials, Vol.894, pp. 51-59, 2019. https://doi.org/10.4028/www.scientific.net/AMM.894.51
- [213] R.-M. Lee, Z.-B. Wu, C.-C. Wang, and T.-C. Chen, “Multi-hybrid active magnetic bearing design for milling spindle applications,” Sensors and Materials, Vol.32, No.1, pp. 375-385, 2020. https://doi.org/10.18494/SAM.2020.2600
- [214] J. Lin, C. Y. Wu, and J. Chang, “Design and implementation of a multi-degrees-of-freedom cable-driven parallel robot with gripper,” Int. J. of Advanced Robotic Systems, Vol.15, No.5, 2018. https://doi.org/10.1177/1729881418803845
- [215] M.-L. Wang, I.-H. Kuo, and J.-J. Lee, “Motion modeling of cable-driven continuum robots using vector form intrinsic finite element method,” J. of the Chinese Institute of Engineers, Vol.45, No.5, pp. 423-436, 2022. https://doi.org/10.1080/02533839.2022.2061601
- [216] Y.-C. Teng and K.-S. Chen, “Analysis, design, and control of a novel elastomeric bearing positioning stage,” Inventions, Vol.1, No.3, Article No.17, 2016. https://doi.org/10.3390/inventions1030017
- [217] Y.-H. Lee, K.-L. Wu, C.-T. Bai, C.-Y. Liao, and B.-H. Yan, “Planetary motion combined with two-dimensional vibration-assisted magnetic abrasive finishing,” The Int. J. of Advanced Manufacturing Technology, Vol.76, No.9, pp. 1865-1877, 2015. https://doi.org/10.1007/s00170-014-6370-x
- [218] K.-H. Tseng, C.-Y. Chang, M.-J. Chen, and Y.-K. Tseng, “Novel electrical discharge machining system with real-time control and monitoring for preparing nanoiron colloid,” Advances in Mechanical Engineering, Vol.10, No.8, 2018. https://doi.org/10.1177/1687814018791705
- [219] J.-P. Hung and W.-Z. Lin, “Investigation of the dynamic characteristics and machining stability of a bi-rotary milling tool,” Advances in Science and Technology Research J., Vol.13, No.1, pp. 14-22, 2019. https://doi.org/10.12913/22998624/100449
- [220] D.-S. Liu, J.-C. Lu, M.-S. Tsai, C.-T. Wu, and Z.-W Zhuang, “Development of a novel dynamic modeling approach for a three-axis machine tool in mechatronic integration,” Machines, Vol.10, No.11, Article No.1102, 2022. https://doi.org/10.3390/machines10111102
- [221] P. Zhang, D. Gao, Y. Lu, F. Wang, and Z. Liao, “A novel smart toolholder with embedded force sensors for milling operations,” Mechanical Systems and Signal Processing, Vol.175, Article No.109130, 2022. https://doi.org/10.1016/j.ymssp.2022.109130
- [222] S.-C. Chang, C.-P. Chang, Y.-C. Wang, and C.-C. Chu, “Leveling maintenance mechanism by using the Fabry-Perot interferometer with machine learning technology,” Tehnički Glasnik, Vol.17, No.2, pp. 268-272, 2023. https://doi.org/10.31803/tg-20230425154156
- [223] S.-H. Chen and J.-X. Tsao, “The application of uniform design and fuzzy analysis to CNC machine tool leveling accuracy adjustment,” Int. J. of Precision Engineering and Manufacturing, Vol.25, No.8, pp. 1651-1667, 2024. https://doi.org/10.1007/s12541-024-00982-0
- [224] E.-T. Hwu, E. Nazaretski, Y. S. Chu, H.-H. Chen, Y.-S. Chen, W. Xu, Y. Hwu, “Design and characterization of a compact nano-positioning system for a portable transmission X-ray microscope,” Review of Scientific Instruments, Vol.84, No.12, Article No.123702, 2013. https://doi.org/10.1063/1.4838635
- [225] W.-C. Wang, J.-W. Lee, K.-S. Chen, and Y.-H. Liu, “Design and vibration control of a notch-based compliant stage for display panel inspection applications,” J. of Sound and Vibration, Vol.333, No.10, pp. 2701-2718, 2014. https://doi.org/10.1016/j.jsv.2014.01.012
- [226] M.-K. Liu, M.-Q. Tran, and P.-Y. Weng, “Fusion of vibration and current signatures for the fault diagnosis of induction machines,” Shock and Vibration, Vol.2019, Article No.7176482, 2019. https://doi.org/10.1155/2019/7176482
- [227] H.-W. Lee and C.-H. Liu, “Vision servo motion control and error analysis of a coplanar XXY stage for image alignment motion,” Mathematical Problems in Engineering, Vol.2013, Article No.592312, 2013. https://doi.org/10.1155/2013/592312
- [228] C.-J. Lin, H.-H. Hsu, C.-H. Cheng, and Y.-C. Li, “Design of an image-servo mask alignment system using dual CCDs with an XXY stage,” Applied Sciences, Vol.6, No.2, Article No.42, 2016. https://doi.org/10.3390/app6020042
- [229] Y.-C. Huang and Y.-C, Chan, “Manipulating XXY planar platform positioning accuracy by computer vision based on reinforcement learning,” Sensors, Vol.23, No.6, Article No.3027, 2023. https://doi.org/10.3390/s23063027
- [230] J.-T. Tsai, C.-T. Lin, C.-C. Chang, and J.-H. Chou, “Optimized positional compensation parameters for exposure machine for flexible printed circuit board,” IEEE Trans. on Industrial Informatics, Vol.11, No.6, pp. 1366-1377, 2015. https://doi.org/10.1109/TII.2015.2489578
- [231] C.-Y. Huang et al., “Alignment turning system for precision lens cells,” The Int. J. of Advanced Manufacturing Technology, Vol.100, No.5, pp. 1383-1392, 2019. https://doi.org/10.1007/s00170-018-2699-x
- [232] J.-C. Tsai, C.-Y. Chang, Y.-J. Wang, and Y.-J. Chiu, “An Investigation on assembly accuracy adjustment of a parallel-kinematic machine at multiple positions,” Advances in Mechanism and Machine Science: Proc. of the 16th IFToMM World Congress, Vol.3, pp. 436-444, 2024. https://doi.org/10.1007/978-3-031-45709-8_43
- [233] C.-S. Liu, J.-J Lai, and Y.-T. Luo, “Design of a measurement system for six-degree-of-freedom geometric errors of a linear guide of a machine tool,” Sensors, Vol.19, No.1, Article No.5, 2019. https://doi.org/10.3390/s19010005
- [234] Y.-T. Chen, P. More, C.-S. Liu, and C.-C. Cheng, “Identification and compensation of position-dependent geometric errors of rotary axes on five-axis machine tools by using a touch-trigger probe and three spheres,” The Int. J. of Advanced Manufacturing Technology, Vol.102, No.9, pp. 3077-3089, 2019. https://doi.org/10.1007/s00170-019-03413-x
- [235] S. Tien and S. Devasia, “Rapid AFM imaging of large soft samples in liquid with small forces,” Asian J. of Control, Vol.11, No.2, pp. 154-165, 2009. https://doi.org/10.1002/asjc.91
- [236] C.-C. Wang and H.-T. Yau, “Application of the differential transformation method to bifurcation and chaotic analysis of an AFM probe tip,” Computers & Mathematics with Applications, Vol.61, No.8, pp. 1957-1962, 2011. https://doi.org/10.1016/j.camwa.2010.08.019
- [237] H.-S. Liao et al., “Rotational positioning system adapted to atomic force microscope for measuring anisotropic surface properties,” Review of Scientific Instruments, Vol.82, No.11, Article No.113710, 2011. https://doi.org/10.1063/1.3664617
- [238] W.-M. Wang, K.-Y. Huang, H.-F. Huang, I.-S. Hwang, and E.-T. Hwu, “Low-voltage and high-performance buzzer-scanner based streamlined atomic force microscope system,” Nanotechnology, Vol.24, No.45, Article No.455503, 2013. https://doi.org/10.1088/0957-4484/24/45/455503
- [239] H.-S. Liao et al., “High-speed atomic force microscope based on an astigmatic detection system,” Review of Scientific Instruments, Vol.85, No.10, Article No.103710, 2014. https://doi.org/10.1063/1.4898019
- [240] S.-K. Hung, C.-H. Cheng, and C.-L. Chen, “Automatic-patterned sapphire substrate nanometrology using atomic force microscope,” IEEE Trans. on Nanotechnology, Vol.14, No.2, pp. 292-296, 2015. https://doi.org/10.1109/TNANO.2015.2392128
- [241] C.-L. Chen, J.-W. Wu, Y.-T. Lin, L.-C. Fu, and M.-Y. Chen, “Precision sinusoidal local scan for large-range atomic force microscopy with auxiliary optical microscopy,” IEEE/ASME Trans. on Mechatronics, Vol.20, No.1, pp. 226-236, 2015. https://doi.org/10.1109/TMECH.2014.2313351
- [242] J.-W. Wu et al., “Effective tilting angles for a dual probes AFM system to achieve high-precision scanning,” IEEE/ASME Trans. on Mechatronics, Vol.21, No.5, pp. 2512-2521, 2016. https://doi.org/10.1109/TMECH.2016.2577739
- [243] H.-S. Liao, K. K. Lei, and Y. F. Tseng, “High-speed force mapping based on an astigmatic atomic force microscope,” Measurement Science and Technology, Vol.30, No.2, Article No.027002, 2019. https://doi.org/10.1088/1361-6501/aafa62
- [244] H.-S. Liao et al., “Open-source controller for low-cost and high-speed atomic force microscopy imaging of skin corneocyte nanotextures,” HardwareX, Vol.12, Article No.e00341, 2022. https://doi.org/10.1016/j.ohx.2022.e00341
- [245] H.-C. Chen, S.-A. Lee, K.-W. Huang, S.-W. Peng, and L.-C. Fu, “Omnidirectional 3-D AFM integrated with a rotary stage for high-precision sidewall structure,” IEEE Trans. on Instrumentation and Measurement, Vol.73, Article No.1503013, 2024. https://doi.org/10.1109/TIM.2024.3461789
- [246] Y.-S. Lu and P.-C. Lee, “Integration of capacitive and piezoelectric accelerometers using a digital approach,” Int. J. of Electrical and Electronic Engineering and Telecommunications, Vol.8, No.6, pp. 346-351, 2019. https://doi.org/10.18178/ijeetc.8.6.346-351
- [247] S.-H. Wang, “The optimization design of thin piezoelectric force sensor and theoretical analysis of static loading estimation,” J. of Low Frequency Noise, Vibration and Active Control, Vol.40, No.1, pp. 577-587, 2021. https://doi.org/10.1177/1461348419881276
- [248] Y.-S. Lu and C.-W. Lu, “Low-frequency compensation of piezoelectric accelerometers for motion control systems,” J. of Electrical Engineering & Technology, Vol.16, No.4, pp. 2221-2234, 2021. https://doi.org/10.1007/s42835-021-00735-3
- [249] C.-Y. Li et al., “Design and development of a low-power wireless MEMS lead-free piezoelectric accelerometer system,” IEEE Trans. on Instrumentation and Measurement, Vol.72, Article No.2001811, 2023. https://doi.org/10.1109/TIM.2023.3242016
- [250] G.-H. Feng and C.-T. Yeh, “Ferroelectric film-based stretch sensor with successive stretch and release motions characterized by a combined piezoelectric and electrostrictive effect,” Smart Materials and Structures, Vol.32, No.12, Article No.125017, 2023. https://doi.org/10.1088/1361-665X/ad0b94
- [251] C.-T. Hsieh, H.-T. Yau, and C.-C. Wang, “Control circuit design and chaos analysis in an ultrasonic machining system,” Engineering Computations, Vol.34, No.7, pp. 2189-2211, 2017. https://doi.org/10.1108/EC-02-2017-0044
- [252] Y. Ting, J.-H. Tang, J.-C. Chen, and C.-H. Yu, “Using piezoelectric sensor and actuator for ultrasonic assisted system,” Ferroelectrics, Vol.520, pp. 83-92, 2017. https://doi.org/10.1080/00150193.2017.1375311
- [253] F.-C. Wang, K.-A. Wang, T.-T. Chung, and J.-Y. Yen, “Fabrication of large-scale micro-structures by two-photon polymerization with a long-stroke precision stage,” Advances in Mechanical Engineering, Vol.9, No.4, 2017. https://doi.org/10.1177/1687814017695757
- [254] F.-C. Wang, Y.-K. Peng, J.-F. Lu, T.-T. Chung, and J.-Y. Yen, “Micro-lens fabrication by a long-stroke precision stage with switching control based on model response prediction,” Microsystem Technologies, Vol.28, No.1, pp. 45-58, 2022. https://doi.org/10.1007/s00542-019-04374-7
- [255] K.-M. Chang, J.-L. Cheng, and Y.-T. Liu, “Machining control of non-axisymmetric aspheric surface based on piezoelectric fast tool servo system,” Precision Engineering, Vol.76, pp. 160-172, 2022. https://doi.org/10.1016/j.precisioneng.2022.02.013
- [256] K.-H. Tseng, M.-Y. Chung, C.-Y. Chang, C.-L. Hsieh, and Y.-K. Tseng, “Parameter optimization of nanosilver colloid prepared by electrical spark discharge method using Ziegler-Nichols method,” J. of Physics and Chemistry of Solids, Vol.148, Article No.109650, 2021. https://doi.org/10.1016/j.jpcs.2020.109650
- [257] J. W. Liang and H. Y. Chen, “Development of a piezoelectric-actuated drop-on-demand droplet generator using adaptive wavelet neural network control scheme,” Key Engineering Materials, Vol.625, pp. 615-620, 2014. https://doi.org/10.4028/www.scientific.net/KEM.625.615
- [258] Y.-J. Wang, C. Lee, Y.-B Jiang, and K.-C Fu, “Design and dynamic analysis of a piezoelectric linear stage for pipetting liquid samples,” Smart Materials and Structures, Vol.26, No.6, Article No.065004, 2017. https://doi.org/10.1088/1361-665X/aa6ced
- [259] Y. Ting, C.-H. Yu, S. Abbas, and Y.-C. Chien, “Using a traveling-wave piezoelectric device to generate a liquid wave for efficient lightweight particle transfer,” IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.69, No.9, pp. 2696-2702, 2022. https://doi.org/10.1109/TUFFC.2022.3190877
- [260] S. C. Shen, P. C. Tsai, Y. J. Wang, and H. J. Huang, “A new type of multi-degree-of-freedom miniaturization actuator using symmetric piezoelectric pusher element for a pocket sun-tracking system,” Sensors and Actuators A: Physical, Vol.182, pp. 114-121, 2012. https://doi.org/10.1016/j.sna.2012.05.016
- [261] T.-H. Ngo, I.-T. Chi, M.-Q. Chau, and D.-A. Wang, “An energy harvester based on a bistable origami mechanism,” Int. J. of Precision Engineering and Manufacturing, Vol.23, No.2, pp. 213-226, 2022. https://doi.org/10.1007/s12541-021-00614-x
- [262] K.-Y. Chen, T.-L. Wu, and R.-F. Fung, “Hamiltonian-based minimum-energy trajectory planning and tracking control for a motor-table system: Part I Minimum-energy methods in trajectory planning,” Int. J. of Dynamics and Control, Vol.7, No.3, pp. 866-874, 2019. https://doi.org/10.1007/s40435-019-00537-6
- [263] Y.-C. Cheng, P.-J. Chen, T.-H. Lin, and L.-W. Lee, “Design and implementation of transformable tracked robots,” Int. J. of iRobotics, Vol.6, No.1, pp. 17-22, 2023.
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