IJAT Vol.12 No.2 pp. 187-198
doi: 10.20965/ijat.2018.p0187


Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

Chengwu Wang*1,†, Syuhei Kurokawa*2, Julong Yuan*3, Li Fan*1, Huizong Lu*3, Zhe Wu*4, Weifeng Yao*5, Kehua Zhang*1, Yu Zhang*1, and Toshiro Doi*3,*6

*1College of Engineering, Zhejiang Normal University
Jinhua 321004, China

Corresponding author

*2Graduate School of Engineering, Kyushu University, Fukuoka, Japan

*3Zhejiang University of Technology, Hangzhou, China

*4School of Mechanical Engineering, Hefei University of Technology, Xuancheng, China

*5Shaoxing University, Shaoxing, China

*6Global Innovation Center, Kyushu University, Fukuoka, Japan

August 17, 2017
February 13, 2018
Online released:
March 1, 2018
March 5, 2018
4H-SiC, femtosecond (fs) laser, surface morphology, pseudo-radical site, precision processing

4H-SiC substrate was ablated by linearly polarized femtosecond (fs) laser in three direct write methods at different parameters, such as repetition rate, scanning velocity and fluence, etc. Two processing modes, transverse scanning mode (TSM) and cross irradiation mode (CIM), were introduced. The surface morphologies were observed by scanning electron microscopy (SEM) for detailed investigation. It was found that the surface morphologies differed remarkably at different processing parameters. Firstly, the shapes of micro craters fabricated at different repetition rates and ablation time duration were respectively investigated. The shape of fs laser spot was demonstrated to play an important role for the generation of micro craters. Secondly, the effect of scanning velocity on the formation of nanoripples and micro grooves were investigated. It was found that the spatial ripples could be refabricated during repeated fs laser ablation; periodic ripples and micro grooves depended on fs laser scanning velocity. Agglomerative substance was fabricated especially at slow scanning velocity. Furthermore, rippled surfaces induced at different fluence were achieved and exhibited. Regular and uniform surfaces with periodic ripples were fabricated at the fluence of 0.31∼0.38 J/cm2. Finally, CMP was carried out to study the effect of fs laser ablation on polishing.

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Last updated on Mar. 16, 2018