IJAT Vol.11 No.5 pp. 716-720
doi: 10.20965/ijat.2017.p0716


Surface Profile Measurement Based on the Concept of Multi-Step Division of Length

Eiki Okuyama, Kohei Konda, and Hiromi Ishikawa

Akita University
1-1 Tegatagakuen-cho, Akita-city, Akita 010-8502, Japan

Corresponding author

December 1, 2016
February 27, 2017
Online released:
August 30, 2017
September 5, 2017
straightness, surface profile measurement, software datum, error separation technique

Many error separation techniques to separate a surface profile from the parasitic motion of the instrument using multiple sensors and/or multiple scans have been proposed. In recent years, large-scale surface profile measurements have become required. When a measured surface profile is large, the number of sampling points becomes large. As the result, the influence of random error becomes large. Previously, a multi-step technique for the division of length was used to decide the short scale from the large scale. An important requirement of this multi-step technique for the division of length is to keep high accuracy at several key points. We applied this technique to the integration method for surface profile measurement and proposed a combination of the large-scale integration method and the short-scale integration method. The results of the theoretical analysis, simulation, and experiment show that this combination method decreases the influence of random error propagation for surface profile measurement.

  1. [1] D. J. Whitehouse, “Some theoretical aspects of error separation techniques in surface metrology,” J. of Physics E, Scientific Instruments, Vol.9, pp. 531-536, 1976.
  2. [2] D. G. Chetwynd and G. J. Siddall, “Improving the accuracy of roundness measurement,” J. of Physics E, Scientific Instruments, Vol.9, pp. 537-544, 1976.
  3. [3] C. J. Evans et al., “Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute testing’,” Annuals of CIRP, Vol.45, pp. 617-634, 1996.
  4. [4] R. R. Donaldson, “A simple method for separating the spindle error from test ball roundness error,” CIRP Annuals, Vol.21, No.1, pp. 125-126, 1972.
  5. [5] S. Cappa et al., “A sub-nanometre spindle error motion separation technique,” Precision Engineering, Vol.38, pp. 458-471, 2014.
  6. [6] S. Kiyono, “Ultra-Precision Measurement,” 2007 (in Japanese).
  7. [7] A. E. Ennos and M. S. Virdee, “High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation,” Precision Engineering, Vol.4, No.1, pp. 5-8, 1982.
  8. [8] G. Makosch and B. Dollinger, “Surface profile measurement with a scanning differential ac interferometer,” Applied Optics, Vol.23, No.24, pp. 4544-4553, 1984.
  9. [9] I. Weingartner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precision Engineering, Vol.28, pp. 164-170, 2004.
  10. [10] P. Yang et al., “Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy,” Precision Engineering, Vol.35, No.4, pp. 686-692, 2011.
  11. [11] T. Kume et al., “Large-scale accelerator alignment using an inclinomater,” Precision Engineering, Vol.37, No.4, pp. 825-830, 2013.
  12. [12] C. Hoffrogge et al., “Geradheitsprüfung von Linealen mit einem 2-Flächen-Verfahren,” messtechnik, Vol.80, No.9, pp. 263-266, 1972 (in German).
  13. [13] E. G. Thwaite, “A Method of Obtaining an Error Free Reference Line for the Measurement of Straightness,” messtechnik, Vol.81, No.10, pp. 317-318, 1973.
  14. [14] H. Tanaka and H. Sato, “Basic characteristics of straightness measurement method by two sequential points,” Trans. of the JSME (C), Vol.48, No.436, pp. 1930-1937, 1982 (in Japanese).
  15. [15] S. Kiyono, E. Okuyama, and M. Sumita, “Study on measurement of surface undulation (2nd Report),” J. of JSPE, Vol.54, No.3, pp. 513-518, 1988 (in Japanese).
  16. [16] E. Okuyama and H. Ishikawa, “Generalized Two-point Method Using Inverse Filtering for Surface Profile Measurement,” Int. J. Automation Technol., Vol.8, No.1, 2014.
  17. [17] E. Okuyama et al., “Generalized two-point method for straightness profile measurement,” Advanced Materials Research, Vol.939, pp. 600-606, 2014.
  18. [18] G. Makosch and B. Dollinger, “Surface profile measurement with a scanning differential ac interferometer,” Applied Optics, Vol.23, No.24, pp. 4544-4553, 1984.
  19. [19] M. Sawabe, “Bebefit drived from history of length measuring technology,” Bulletin of the Society of Historical Metrology, Japan, Vol.22, No.1, pp. 9-16, 2000 (in Japanese).
  20. [20] E. Okuyama and M. Ito, “Combination of double scale measurements for large scale surface profile measurement,” ISMTII, 2015.

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Last updated on Jan. 19, 2018