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IJAT Vol.11 No.5 pp. 716-720
doi: 10.20965/ijat.2017.p0716
(2017)

Paper:

Surface Profile Measurement Based on the Concept of Multi-Step Division of Length

Eiki Okuyama, Kohei Konda, and Hiromi Ishikawa

Akita University
1-1 Tegatagakuen-cho, Akita-city, Akita 010-8502, Japan

Corresponding author

Received:
December 1, 2016
Accepted:
February 27, 2017
Online released:
August 30, 2017
Published:
September 5, 2017
Keywords:
straightness, surface profile measurement, software datum, error separation technique
Abstract

Many error separation techniques to separate a surface profile from the parasitic motion of the instrument using multiple sensors and/or multiple scans have been proposed. In recent years, large-scale surface profile measurements have become required. When a measured surface profile is large, the number of sampling points becomes large. As the result, the influence of random error becomes large. Previously, a multi-step technique for the division of length was used to decide the short scale from the large scale. An important requirement of this multi-step technique for the division of length is to keep high accuracy at several key points. We applied this technique to the integration method for surface profile measurement and proposed a combination of the large-scale integration method and the short-scale integration method. The results of the theoretical analysis, simulation, and experiment show that this combination method decreases the influence of random error propagation for surface profile measurement.

Cite this article as:
E. Okuyama, K. Konda, and H. Ishikawa, “Surface Profile Measurement Based on the Concept of Multi-Step Division of Length,” Int. J. Automation Technol., Vol.11, No.5, pp. 716-720, 2017.
Data files:
References
  1. [1] D. J. Whitehouse, “Some theoretical aspects of error separation techniques in surface metrology,” J. of Physics E, Scientific Instruments, Vol.9, pp. 531-536, 1976.
  2. [2] D. G. Chetwynd and G. J. Siddall, “Improving the accuracy of roundness measurement,” J. of Physics E, Scientific Instruments, Vol.9, pp. 537-544, 1976.
  3. [3] C. J. Evans et al., “Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute testing’,” Annuals of CIRP, Vol.45, pp. 617-634, 1996.
  4. [4] R. R. Donaldson, “A simple method for separating the spindle error from test ball roundness error,” CIRP Annuals, Vol.21, No.1, pp. 125-126, 1972.
  5. [5] S. Cappa et al., “A sub-nanometre spindle error motion separation technique,” Precision Engineering, Vol.38, pp. 458-471, 2014.
  6. [6] S. Kiyono, “Ultra-Precision Measurement,” 2007 (in Japanese).
  7. [7] A. E. Ennos and M. S. Virdee, “High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation,” Precision Engineering, Vol.4, No.1, pp. 5-8, 1982.
  8. [8] G. Makosch and B. Dollinger, “Surface profile measurement with a scanning differential ac interferometer,” Applied Optics, Vol.23, No.24, pp. 4544-4553, 1984.
  9. [9] I. Weingartner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precision Engineering, Vol.28, pp. 164-170, 2004.
  10. [10] P. Yang et al., “Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy,” Precision Engineering, Vol.35, No.4, pp. 686-692, 2011.
  11. [11] T. Kume et al., “Large-scale accelerator alignment using an inclinomater,” Precision Engineering, Vol.37, No.4, pp. 825-830, 2013.
  12. [12] C. Hoffrogge et al., “Geradheitsprüfung von Linealen mit einem 2-Flächen-Verfahren,” messtechnik, Vol.80, No.9, pp. 263-266, 1972 (in German).
  13. [13] E. G. Thwaite, “A Method of Obtaining an Error Free Reference Line for the Measurement of Straightness,” messtechnik, Vol.81, No.10, pp. 317-318, 1973.
  14. [14] H. Tanaka and H. Sato, “Basic characteristics of straightness measurement method by two sequential points,” Trans. of the JSME (C), Vol.48, No.436, pp. 1930-1937, 1982 (in Japanese).
  15. [15] S. Kiyono, E. Okuyama, and M. Sumita, “Study on measurement of surface undulation (2nd Report),” J. of JSPE, Vol.54, No.3, pp. 513-518, 1988 (in Japanese).
  16. [16] E. Okuyama and H. Ishikawa, “Generalized Two-point Method Using Inverse Filtering for Surface Profile Measurement,” Int. J. Automation Technol., Vol.8, No.1, 2014.
  17. [17] E. Okuyama et al., “Generalized two-point method for straightness profile measurement,” Advanced Materials Research, Vol.939, pp. 600-606, 2014.
  18. [18] G. Makosch and B. Dollinger, “Surface profile measurement with a scanning differential ac interferometer,” Applied Optics, Vol.23, No.24, pp. 4544-4553, 1984.
  19. [19] M. Sawabe, “Bebefit drived from history of length measuring technology,” Bulletin of the Society of Historical Metrology, Japan, Vol.22, No.1, pp. 9-16, 2000 (in Japanese).
  20. [20] E. Okuyama and M. Ito, “Combination of double scale measurements for large scale surface profile measurement,” ISMTII, 2015.

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Last updated on Dec. 18, 2018