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IJAT Vol.11 No.5 pp. 716-720
doi: 10.20965/ijat.2017.p0716
(2017)

Paper:

Surface Profile Measurement Based on the Concept of Multi-Step Division of Length

Eiki Okuyama, Kohei Konda, and Hiromi Ishikawa

Akita University
1-1 Tegatagakuen-cho, Akita-city, Akita 010-8502, Japan

Corresponding author

Received:
December 1, 2016
Accepted:
February 27, 2017
Online released:
August 30, 2017
Published:
September 5, 2017
Keywords:
straightness, surface profile measurement, software datum, error separation technique
Abstract

Many error separation techniques to separate a surface profile from the parasitic motion of the instrument using multiple sensors and/or multiple scans have been proposed. In recent years, large-scale surface profile measurements have become required. When a measured surface profile is large, the number of sampling points becomes large. As the result, the influence of random error becomes large. Previously, a multi-step technique for the division of length was used to decide the short scale from the large scale. An important requirement of this multi-step technique for the division of length is to keep high accuracy at several key points. We applied this technique to the integration method for surface profile measurement and proposed a combination of the large-scale integration method and the short-scale integration method. The results of the theoretical analysis, simulation, and experiment show that this combination method decreases the influence of random error propagation for surface profile measurement.

Cite this article as:
E. Okuyama, K. Konda, and H. Ishikawa, “Surface Profile Measurement Based on the Concept of Multi-Step Division of Length,” Int. J. Automation Technol., Vol.11 No.5, pp. 716-720, 2017.
Data files:
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