IJAT Vol.11 No.5 pp. 716-720
doi: 10.20965/ijat.2017.p0716


Surface Profile Measurement Based on the Concept of Multi-Step Division of Length

Eiki Okuyama, Kohei Konda, and Hiromi Ishikawa

Akita University
1-1 Tegatagakuen-cho, Akita-city, Akita 010-8502, Japan

Corresponding author

December 1, 2016
February 27, 2017
Online released:
August 30, 2017
September 5, 2017
straightness, surface profile measurement, software datum, error separation technique

Many error separation techniques to separate a surface profile from the parasitic motion of the instrument using multiple sensors and/or multiple scans have been proposed. In recent years, large-scale surface profile measurements have become required. When a measured surface profile is large, the number of sampling points becomes large. As the result, the influence of random error becomes large. Previously, a multi-step technique for the division of length was used to decide the short scale from the large scale. An important requirement of this multi-step technique for the division of length is to keep high accuracy at several key points. We applied this technique to the integration method for surface profile measurement and proposed a combination of the large-scale integration method and the short-scale integration method. The results of the theoretical analysis, simulation, and experiment show that this combination method decreases the influence of random error propagation for surface profile measurement.

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Last updated on Sep. 20, 2017