Influence of Tool Run-Out on Machining Accuracy with Multi-Tooth Endmill
Daisuke Goto*, Yukio Maeda*,†, Hideaki Tanaka**, Kazuya Kato**, and Takanori Yazawa***
*Toyama Prefectural University
5180 Kurokawa, Imizu-shi, Toyama 939-0398, Japan
**Shonan Institute of Technology, Kanagawa, Japan
***Nagasaki University, Nagasaki, Japan
Micro-channel chips, which are used in micro total analysis systems, are attracting attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture micro-channel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. Therefore, this study examines an approach to form a fine groove by cutting with micro-endmills, and experimentally examined a method for reducing the influence of tool run-out on machining accuracy with multi-tooth endmills. As a result, the effects of tool run-out on micro-groove milling, such as a decrease in groove increment, are clarified.
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