IJAT Vol.9 No.6 p. 611
doi: 10.20965/ijat.2015.p0611


Special Issue on Micro-Nano Materials and Processing

Seiichi Hata

November 5, 2015
With MEMS/NEMS being intensively developed for both consumer and industrial products, micro-nanofabrication is now moving from academics to industrial use. MEMS/NEMS and precision microdevices used in conventional photolithography, technology and suitable fabrication methods are now being selected based on materials, device structure, and fabrication cost, among others. These fabrication methods could become the frontier of manufacturing technology in many application areas. The themes treated in this special issue include the latest advanced research on micro-nanomaterials and processing for MEMS/NEMS and precision microdevices. These papers are expected to contribute much to further developing MEMS/NEMS and precision microdevices. In closing, I would like to thank the authors for their valuable submissions and the reviewers for their incisive efforts, without which this special issue would not have been possible. We are most grateful to all who have contributed their time and effort to ensuring this issue’s success.
Cite this article as:
S. Hata, “Special Issue on Micro-Nano Materials and Processing,” Int. J. Automation Technol., Vol.9 No.6, p. 611, 2015.
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