IJAT Vol.9 No.5 pp. 502-507
doi: 10.20965/ijat.2015.p0502


Calibration of Invar Angular Interferometer Optics with Multi-Step Method

Zi Xue, Yao Huang, Heyan Wang, and Hu Lin

National Institute of Metrology
No.18, Bei San Huan Dong Lu, Beijing 100029, China

February 1, 2015
April 21, 2015
September 5, 2015
angle measurement, angle interferometer, calibration, multi-step method

At the National Institute of Metrology (NIM), China, the Small Angle Measuring System, which is based on the sine principle, was developed as the national primary standard for the plane angle in an angular measuring range of ±5°. The measurement uncertainty of this system is dominated by the accuracy of an invar angular interferometer optical system. To calibrate this angle interferometer system, a series of known reference standards were generated with a multi-step method using a double-deck rotary table. The measurement uncertainty of the calibration is estimated to be approximately 0.05’’ (k=2).

Cite this article as:
Z. Xue, Y. Huang, H. Wang, and H. Lin, “Calibration of Invar Angular Interferometer Optics with Multi-Step Method,” Int. J. Automation Technol., Vol.9, No.5, pp. 502-507, 2015.
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Last updated on Aug. 21, 2019