IJAT Vol.9 No.4 pp. 436-443
doi: 10.20965/ijat.2015.p0436


Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage

Yusuke Horikawa, Akio Mizutani, Tomoaki Noda, and Hisao Kikuta

Graduate School of Engineering, Osaka Prefecture University
1-1, Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan

April 10, 2015
June 11, 2015
July 5, 2015
3D measurement, digital image correlation, stereo camera
A stereo camera system with digital image correlation (DIC) was developed for accurate measurement of the position and orientation of a precision positioning stage. Stereo correspondence was carefully calculated by sub-image matching based on the DIC method. Camera parameters for the triangulation were determined from the measurement results of x, y, and z translation of an accurate positioning stage. The measured root mean square random errors were 0.6 μm in the in-plane direction and 1.7 μm in the out-of-plane direction. The proportional errors in the in-plane and out-of-plane directions were 0.2 μm/10 mm and 0.5μm/10 mm, respectively.
Cite this article as:
Y. Horikawa, A. Mizutani, T. Noda, and H. Kikuta, “Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage,” Int. J. Automation Technol., Vol.9 No.4, pp. 436-443, 2015.
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