Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage
Yusuke Horikawa, Akio Mizutani, Tomoaki Noda, and Hisao Kikuta
Graduate School of Engineering, Osaka Prefecture University
1-1, Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan
A stereo camera system with digital image correlation (DIC) was developed for accurate measurement of the position and orientation of a precision positioning stage. Stereo correspondence was carefully calculated by sub-image matching based on the DIC method. Camera parameters for the triangulation were determined from the measurement results of x, y, and z translation of an accurate positioning stage. The measured root mean square random errors were 0.6 μm in the in-plane direction and 1.7 μm in the out-of-plane direction. The proportional errors in the in-plane and out-of-plane directions were 0.2 μm/10 mm and 0.5μm/10 mm, respectively.
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