Fabrication of Precision Micrograting on Resin Substrate Utilizing Ultrasonic-Assisted Molding
Sergey Bolotov, Ryuichi Kobayashi, Keita Shimada,
Masayoshi Mizutani, and Tsunemoto Kuriyagawa
Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki, Aoba, Aoba-ku, Sendai 980-8579, Japan
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