Paper:
Generalized Two-Point Method Using Inverse Filtering for Surface Profile Measurement – Theoretical Analysis and Experimental Results for Error Propagation –
Eiki Okuyama and Hiromi Ishikawa
Akita University, Akita 010-8502, Japan
- [1] D. J. Whitehouse, “Some theoretical aspects of error separation techniques in surface metrology,” J. of Physics E, Scientific Instruments, 9, 531-536, 1976.
- [2] H. Tanaka and H. Sato, “Basic characteristics of straightness measurement method by two sequential points,” Transactions of the JSME(C), 48, 436, 1930-1937, 1982.
- [3] S. Kiyono, E. Okuyama, and M. Sumita, “Study on measurement of surface undulation (2nd report),” J. of JSPE, 54, 3, 513-518, 1988. (in Japanese)
- [4] C. J. Evans et. al., “Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute testing’,” Annuals of CIRP, 45, 617-634, 1996.
- [5] I. Weingartner and C. Elster, “System of four distance sensors for high-accuracy measurement of topography,” Precision Engineering, 28, 164-170, 2004.
- [6] P. Yang, et. al., “Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy,” Precision Engineering, 35, 686-692, 2011.
- [7] A. Dubra, C. Paterson, and C. Dainty, “Wave-front reconstruction from shear phase maps by use of the discrete Fourier transform,” Applied optics, 43, 5, 1108-1113, 2004.
- [8] C. Elster, “Exact wave-front reconstruction from two lateral shearing interferograms,” Optical society of America, 16, 9, 2281-2285, 1999.
- [9] X. Shen, K. Kotani, and K. Takamasu, “Study on spatial frequency domain 2-point method,” J. of JSPE, 73, 6, 653-658, 2007. (in Japanese)
- [10] E. Okuyama and Y. Ishizuka, “Generalized two-point method for straightness error motion measurement in low spatial frequency domain,” Proc. of the 12th EUSPEN int. conf., 2012.
- [11] E. Okuyama, Y. Ishizuka, and H. Ishikawa, “Generalized twopoint method using inverse filtering for straightness profile measurement,” Proc. of the ICPT, 2012.
- [12] E. Okuyama, H. Takahashi, and H. Ishikawa, “Software Datum Design for Cross-Axis Motion Measurement of X-Stage Based on Least Uncertainty Criterion,” Int. J. of Automation Technology, Vol.5, No.2, 2011.
This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.