Decrease of Thermal Expansion of Ball Screw Used for Precision Positioning Devices by Peltier Module Cooling Based on Feedback Method
Ning Zhu*, Shigeomi Koshimizu**, Takashi Nozaki*,
Kenichi Taneishi***, Jiro Otsuka*, Takeki Shirai***,
Tetsuhiro Nishide***, and Tsutomu Togashi***
*Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Fukuroi, Shizuoka 437-8555, Japan
**Advanced Institute of Industrial Technology, 1-10-40 Higashi Oi, Shinagawa-ku, Tokyo 140-0011, Japan
***THK CO.,LTD, 4-9-16 Higashikoujiya, Ota-ku, Tokyo 144-0033, Japan
-  J. Otsuka, “Ultraprecision Positioning Technology,” Youkenndou, 2009. (in Japanese)
-  NSK, “Nut-cooled Ball Screw,” Manufacturing of Japan Economy, 2010. (in Japanese)
-  NSK, “Catalog of Precision Machine,” 2009. (in Japanese)
-  Zhu, et al., “Cooling Precision Positioning Device by Peltier Effect,” Proc. of 4th Int. Symp. on Heat Transfer and Energy Conservation (ISHTEC2012), TC03-002, CD-ROM.
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