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IJAT Vol.7 No.5 pp. 564-570
doi: 10.20965/ijat.2013.p0564
(2013)

Paper:

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Decrease of Thermal Expansion of Ball Screw Used for Precision Positioning Devices by Peltier Module Cooling Based on Feedback Method

Ning Zhu*, Shigeomi Koshimizu**, Takashi Nozaki*,
Kenichi Taneishi***, Jiro Otsuka*, Takeki Shirai***,
Tetsuhiro Nishide***, and Tsutomu Togashi***

*Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Fukuroi, Shizuoka 437-8555, Japan

**Advanced Institute of Industrial Technology, 1-10-40 Higashi Oi, Shinagawa-ku, Tokyo 140-0011, Japan

***THK CO.,LTD, 4-9-16 Higashikoujiya, Ota-ku, Tokyo 144-0033, Japan

Received:
May 10, 2013
Accepted:
July 5, 2013
Published:
September 5, 2013
Creative Commons License
Keywords:
precision positioning device, ball screw, thermal expansion, Peltier module cooling
Abstract
Many methods of cooling precision positioning devices have been proposed and some have actually been applied. This paper proposes a new method by employing Peltier modules based on feedback to cool the stage as well as the bearing. A specially-designed experimental system is established for verification. As a result of a series of experiments, it is found that the total thermal expansion of the ball screw is within 0.5 µm.
Cite this article as:
N. Zhu, S. Koshimizu, T. Nozaki, K. Taneishi, J. Otsuka, T. Shirai, T. Nishide, and T. Togashi, “Decrease of Thermal Expansion of Ball Screw Used for Precision Positioning Devices by Peltier Module Cooling Based on Feedback Method,” Int. J. Automation Technol., Vol.7 No.5, pp. 564-570, 2013.
Data files:
References
  1. [1] J. Otsuka, “Ultraprecision Positioning Technology,” Youkenndou, 2009. (in Japanese)
  2. [2] NSK, “Nut-cooled Ball Screw,” Manufacturing of Japan Economy, 2010. (in Japanese)
  3. [3] NSK, “Catalog of Precision Machine,” 2009. (in Japanese)
  4. [4] Zhu, et al., “Cooling Precision Positioning Device by Peltier Effect,” Proc. of 4th Int. Symp. on Heat Transfer and Energy Conservation (ISHTEC2012), TC03-002, CD-ROM.

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