IJAT Vol.7 No.5 pp. 489-497
doi: 10.20965/ijat.2013.p0489


Contact-Type Profile Measuring Device Using Laser Interferometry System Incorporating Hybrid Actuating System

Yung-Tien Liu*, Han-Lin Wu*, Je-Yi Wang*,
and Yutaka Yamagata**

*Department of Mechanical and Automation Engineering, National Kaohsiung First University of Science and Technology (FIRST TECH), No.1, University Rd., Yanchao District, Kaohsiung 824, Taiwan, R.O.C.

**Ultra High Precision Fabrication Team, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

March 13, 2013
July 9, 2013
September 5, 2013
linear motors, PZT actuator, laser interferometry system, dual-servo system
This paper proposes a contact-type profile measuring device using a laser interferometry system for precision components. This measuring device consists of an XY-table actuated by linear motors to obtain large operational ranges, an active contact probe driven by piezoelectric actuators to provide a small measuring force, and a specially configured optical path to reduce Abbe’s error. Fundamental experiments were performed to examine the control performance of the active probe, forward and backward motion behaviors of the hybrid actuating system, and contour measurement for an asphericmold. As one example of themeasured results, a maximum form error of 1.45 µm was obtained for an aspheric surface with a measured span of 4 mm and a sag of 37 µm. As a prototype highprecision measuring system, the effectiveness of the optical path and actuating system have been demonstrated. Further studies are suggested to improve the system performance by reducing the measuring force, increasing the measuring speed, and providing a scanning function.
Cite this article as:
Y. Liu, H. Wu, J. Wang, and Y. Yamagata, “Contact-Type Profile Measuring Device Using Laser Interferometry System Incorporating Hybrid Actuating System,” Int. J. Automation Technol., Vol.7 No.5, pp. 489-497, 2013.
Data files:
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  7. [7] Y.-T. Liu, J.-Y. Wang, H.-L. Wu, “Development of Contact-type Profile Measuring Device Using Linear Motors and Interferometry System,” The 5th Int. Conf. on Positioning Technology (ICPT 2012), Nov. 14-16, 2012, Kaohsiung, Taiwan, PSE-1, pp. 177-180.
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Last updated on Apr. 05, 2024