Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and Photolithographic Processes
Jiwang Yan*, Kenta Watanabe**, and Yutaro Nakagawa**
*Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
**Department of Mechanical Systems and Design, Graduate School of Engineering, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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