Planeness Measurement of Computer Harddisk Surface Based on Opto-Mechatronics Technology
Rui-Yin Tang*,**, Zhou-Mo Zeng*, Hong-Kun He**,
and Zhi-Kun Chen**
*State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, 92 Weijin Road, Nankai District, Tianjin, P.R.China
**College of Electrical Engineering, Hebei United University, 46 Xinhua Road, Tangshan, China
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