Development of Inspection Machine that Detect Small Particles Added on Surface with Precise Pattern by Capturing Backwards Scattered Polarized Light
Tsuyoshi Nomura, Tatsuo Nagasaki, and Masami Ito
Panasonic Corporation, 2-7 Matsuba-cho, Kadoma City, Osaka 571-8502, Japan
The paper discusses the development of inspectionmachine to detect small particle by capturing backwards scattered polarized light. The proposed optical system consists of very low angle (2°) horizontal line laser light with S polarized characteristics and angle 150° backwards line CCD Camera to capture P polarized light from particles on wafer or glass and so on. This system is confirmed to apply the real production of wafer or glass.
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