Analysis of Measurement Errors of a Diffuse-Reflection-Type Laser Displacement Sensor for Profile Measurement

Yoshihiro Kimura; Atsushi Matsubara; Yusuke Koike

doi:10.20965/ijat.2012.p0724

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IJAT Vol.6 No.6 pp. 724-727

doi: 10.20965/ijat.2012.p0724

(2012)

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Analysis of Measurement Errors of a Diffuse-Reflection-Type Laser Displacement Sensor for Profile Measurement

Yoshihiro Kimura, Atsushi Matsubara, and Yusuke Koike

Department of Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606-8501, Japan

Received:

April 20, 2012

Accepted:

July 20, 2012

Published:

November 5, 2012

Keywords:

diffuse reflection, laser displacement sensor, multi-reflection error, on-machine measurement

Abstract

In this paper, the measurement error of a diffusereflection-type laser displacement sensor is analyzed for profile measurement. Multi-reflection error is predicted by a simple-beam-tracking simulation. Based on the simulation results, the measurement range of a laser displacement sensor is tuned, and multireflection error is reduced. Then, measurement errors in the experimental measurement of a small die are evaluated.

Cite this article as:

Y. Kimura, A. Matsubara, and Y. Koike, “Analysis of Measurement Errors of a Diffuse-Reflection-Type Laser Displacement Sensor for Profile Measurement,” Int. J. Automation Technol., Vol.6 No.6, pp. 724-727, 2012.

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References

[1] Y. Kakino, Y. Ihara, Y. Iwasaki, A. Matsubara, and H. Otsubo, “Study on Amendable Machining System by Using Machining and Measuring Center (1st Report): Amendable Grinding of 2 Dimensional Parts with High Accuracy,” The Japan Society for Precision Engineering, Vol.59, No.10, pp. 1689-1694, 1993.
[2] Y. Koike, D. Kono, A. Matsubara, and I. Yamaji, “In-situ Measurement by Using a Measurement-Fused Machining System,” J. of the Japan Society for Precision Engineering, Vol.76, No.8, pp. 945-949, 2010.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

[1] [1] Y. Kakino, Y. Ihara, Y. Iwasaki, A. Matsubara, and H. Otsubo, “Study on Amendable Machining System by Using Machining and Measuring Center (1st Report): Amendable Grinding of 2 Dimensional Parts with High Accuracy,” The Japan Society for Precision Engineering, Vol.59, No.10, pp. 1689-1694, 1993.

[2] [2] Y. Koike, D. Kono, A. Matsubara, and I. Yamaji, “In-situ Measurement by Using a Measurement-Fused Machining System,” J. of the Japan Society for Precision Engineering, Vol.76, No.8, pp. 945-949, 2010.