Analysis of Measurement Errors of a Diffuse-Reflection-Type Laser Displacement Sensor for Profile Measurement
Yoshihiro Kimura, Atsushi Matsubara, and Yusuke Koike
Department of Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606-8501, Japan
In this paper, the measurement error of a diffusereflection-type laser displacement sensor is analyzed for profile measurement. Multi-reflection error is predicted by a simple-beam-tracking simulation. Based on the simulation results, the measurement range of a laser displacement sensor is tuned, and multireflection error is reduced. Then, measurement errors in the experimental measurement of a small die are evaluated.
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