Review:
Questionnaire Survey on Ultra-Precision Positioning
Takaaki Oiwa*1, Masahide Katsuki*2, Mitsuji Karita*3, Wei Gao*4, Susumu Makinouchi*5, Kaiji Sato*6, and Yasuji Oohashi*7
*1Department of Mechanical Engineering, Shizuoka University, 3-5-1 Johoku, Nakaku, Hamamatsu 432-8561, Japan
*2Toshiba Machine Co., Ltd.
*3Institute of Electrical Engineers of Japan
*4Tohoku University
*5Nikon Corporation
*6Tokyo Institute of Technology
*7KSS Co., Ltd.
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