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IJAT Vol.5 No.6 pp. 766-772
doi: 10.20965/ijat.2011.p0766
(2011)

Review:

Questionnaire Survey on Ultra-Precision Positioning

Takaaki Oiwa*1, Masahide Katsuki*2, Mitsuji Karita*3, Wei Gao*4, Susumu Makinouchi*5, Kaiji Sato*6, and Yasuji Oohashi*7

*1Department of Mechanical Engineering, Shizuoka University, 3-5-1 Johoku, Nakaku, Hamamatsu 432-8561, Japan

*2Toshiba Machine Co., Ltd.

*3Institute of Electrical Engineers of Japan

*4Tohoku University

*5Nikon Corporation

*6Tokyo Institute of Technology

*7KSS Co., Ltd.

Received:
March 29, 2011
Accepted:
May 24, 2011
Published:
November 5, 2011
Keywords:
ultra-precision positioning, questionnaire
Abstract

Surveys on ultra-precision positioning held seven times since 1986 are summarized in this paper. According to questionnaires in these surveys, including the latest in 2010, averaged recognition of “precision” is 1 µm and of “ultra-precision” 10 nm. Although positioning accuracy currently appears to have reached the development limit, accuracy under 1 nm is expected to be attained. Demand for higher speed, greater acceleration, and longer stroke increasing yearly has made the linear motor drive more popular. Improved displacement sensor performance now regularly uses the linear scale unit for practical reasons. Environmental concerns have led to hydraulic actuators being increasingly replaced by electromagnetic actuators, thus saving lubricating oil.

References
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  5. [5] T. Oiwa and M. Katsuki, “Survey of Questionnaire on Ultra-Precision Positioning,” J. of the Japan Society for Precision Engineering, Vol.74, No.10, pp. 1027-1032, 2008. (in Japanese)
  6. [6] T. Oiwa, M. Katsuki, M. Karita, G. Wei, S. Makinouchi, K. Sato, and Y. Oohashi, “Questionnaire Survey on Ultra-Precision Positioning,” Proc. of the 4th Int. Conf. on Positioning Technology, ICPT2010, pp. 160-165, 2010.

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Last updated on Sep. 20, 2017