Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows
Toshinori Fujita*1, Kazutoshi Sakai*2, Yusuke Takagi*3,
Kenji Kawashima*4, and Toshiharu Kagawa*4
*1Department of Mechanical Engineering, Tokyo Denki University, 2-2 Kanda-Nishiki-cho, Chiyoda-ku, Tokyo 101-8457, Japan
*2Corporate Planning & Development, Sumitomo Heavy Industries, Ltd., 1-1 Osaki 2-chome, Shinagawa-ku, Tokyo 141-6025, Japan
*3Yamaha Motor Co.,Ltd., 882 Soude, Naka-ku, Hamamatsu, Shizuoka 435-0054, Japan
*4Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 R2-45 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
Ultra precise positioning techniques that support nanotechnologies led by the semiconductor industry mainly require precision of nanometer order. Currently, it is piezoelectric elements that are most often used for positioning control of this order. Piezoelectric elements, however, are deficient in strokes and durability. In this research, we propose to use for ultra precise positioning control pneumatic bellows instead of piezoelectric elements, because the durability of pneumatic bellows is well proven. Specifically, we manufacture an elastic-hinge-guided, fine-motion stage which is driven by pneumatic bellows. In addition, we have developed a mathematical model for this fine-motion stage as well as its dynamic characteristics. We review feedback control to achieve ultra precise positioning, using the developed stage and mathematical model. As a result, we have succeeded in developing a fine-motion stage with longer strokes than ones driven by piezoelectric elements, though it is inferior in response. Positioning accuracy of the pneumatic-bellowdriven stage is ±5 [nm], which is tantamount to that achieved by piezoelectric elements.
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