IJAT Vol.5 No.3 pp. 300-306
doi: 10.20965/ijat.2011.p0300


Micro Cutting of Glass with Multiedge Tool

Takashi Matsumura and Tatsuya Namiki

Tokyo Denki University, 2-2 Kanda Nishiki-cho, Chiyoda-ku, Tokyo 101-8457, Japan

January 30, 2011
April 19, 2011
May 5, 2011
micro cutting, diamond tool, glass, cutting force, surface roughness

Glass cutting with a multiedge tool is presented to machine micro-scale grooves at high machining rates in a planning manner. The critical depth of cut at the ductile-brittle transition was measured to design the edge shape in the glass cutting tests. 13 rectangular edges 2 µm wide and 2 µm high were manufactured on a single crystal diamond tool by the focused ion beam. The cutting tests were conducted on a micro/nano-scale cutting machine, which controls the depth of cut of less than 1 µm. The glass cutting process with the multiedge tool is discussed with measuring the cutting force. The cutting force changes with the cutting mode: sliding/ploughing and cutting. Based on the measured cutting force, the compliance of the machine-tool-workpiece system, the friction coefficient of the tool on the glass surface and the specific cutting force are estimated. Then, 13 grooves 2 µm wide 0.3 µm deep were machined simultaneously in a feed of the multiedge tool. The machining accuracy was verified in optical diffraction tests.

Cite this article as:
Takashi Matsumura and Tatsuya Namiki, “Micro Cutting of Glass with Multiedge Tool,” Int. J. Automation Technol., Vol.5, No.3, pp. 300-306, 2011.
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