Micro Cutting of Glass with Multiedge Tool
Takashi Matsumura and Tatsuya Namiki
Tokyo Denki University, 2-2 Kanda Nishiki-cho, Chiyoda-ku, Tokyo 101-8457, Japan
Glass cutting with a multiedge tool is presented to machine micro-scale grooves at high machining rates in a planning manner. The critical depth of cut at the ductile-brittle transition was measured to design the edge shape in the glass cutting tests. 13 rectangular edges 2 µm wide and 2 µm high were manufactured on a single crystal diamond tool by the focused ion beam. The cutting tests were conducted on a micro/nano-scale cutting machine, which controls the depth of cut of less than 1 µm. The glass cutting process with the multiedge tool is discussed with measuring the cutting force. The cutting force changes with the cutting mode: sliding/ploughing and cutting. Based on the measured cutting force, the compliance of the machine-tool-workpiece system, the friction coefficient of the tool on the glass surface and the specific cutting force are estimated. Then, 13 grooves 2 µm wide 0.3 µm deep were machined simultaneously in a feed of the multiedge tool. The machining accuracy was verified in optical diffraction tests.
-  K. E. Puttick, M. R. Rudma et al., “Single-Point Diamond Machining of Glasses,” Proc. of Royal Society of London, Ser. A., 426, pp. 19-30. 1989.
-  T. G. Bifano, T. A. Dow et al., “Ductile-Regime Grinding: A New Technology for Machining Brittle Materials,” Trans. of ASME, J. of Engineering for Industry, 113, pp.184-189, 1991.
-  T. Nakatsuji, S. Kodera et al., “Diamond Turning of Brittle Materials for Optical Components,” Annals of CIRP, 39, 1, pp. 89-92, 1990.
-  I. Ogura and Y. Okazaki, “Ductile-Regime Machining of Optical Glasses by Means of Single Point Diamond Turning,” J. of the Japan Society for Precision Engineering, 66, pp. 1431-1435, 2000 (in Japanese).
-  M. Yoshino, T. Aoki et al., “Scratching Test of Hard-brittle Materials under Hydrostatics Pressure,” Trans. of ASME, J. of Manufacturing Science and Engineering, 123, pp. 231-239, 2001.
-  M. V. Swain, “Microfracture scratch in brittle solids,” Proc. of Royal Society of London, Ser. A, pp. 575-579, 1979.
-  R. Komanduri, D. A. Lucca et al., “Technological Advance in Fine Abrasive Processes,” Annals of CIRP, 46, 2, pp. 545-596, 1997.
-  B. K. A. Ngoi and P. S. Sreejith, “Ductile Regime Finish Machining – A Review,” Int. J. Adv. Manufacturing Technology, 16, pp. 547-550, 2000.
-  T. Moriwaki, E. Shamoto et al., “Ultra-precision Ductile Cutting of Glass by Applying Ultrasonic Vibration,” Annals of CIRP, 41, 1, pp. 141-144, 1992.
-  M. Zhou, B. K. A. Ngoi et al., “Tool wear and surface finish in diamond cutting of optical glass,” J. of Materials Processing Technology, 174, pp. 29-33, 2006.
-  Y. Takeuchi, K. Sawada et al., “Ultraprecision 3D Micromachining of Glass,” Annals of CIRP, 45, 1, pp. 401-404, 1996.
-  T. Matsumura and T. Ono, “Cutting process of glass with inclined ball end mills,” J.of Material Processing Technology, 200, pp. 356-363, 2008.
-  T. Ono and T. Matsumura, “Influence of tool inclination on brittle fracture in glass cutting with ball end mills,” J. of Material Processing Technology, 202, pp. 61-69, 2008.
-  T. Matsumura and T. Ono, “Cutting process of glass with end mill,” Int. J. of Machining and Machinability of Materials, 6, 1/2, pp, 139-158, 2009.
This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.