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IJAT Vol.5 No.2 pp. 91-96
doi: 10.20965/ijat.2011.p0091
(2011)

Paper:

Surface Encoders for a Mosaic Scale Grating

Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu,
and Wei Gao

Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai 980-8579, Japan

Received:
November 30, 2010
Accepted:
December 22, 2010
Published:
March 5, 2011
Keywords:
surface encoder, mosaic grating, multiprobe, sensor
Abstract

The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder’s measurement range in plane – in the X and Y directions. The mosaic XY-axis scale grating we use to expand the measurement range in plane consists of multiple XY-axis scale gratings arranged in plane. We present two optical configurations for the mosaic XY-axis scale grating. To confirm our configurations’ effectiveness, we fabricated two prototypes that we tested in basic experiments using a mosaic single-axis scale grating.

Cite this article as:
K. Hosono, W. Kim, A. Kimura, Y. Shimizu, and <. Gao, “Surface Encoders for a Mosaic Scale Grating,” Int. J. Automation Technol., Vol.5, No.2, pp. 91-96, 2011.
Data files:
References
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Last updated on Nov. 18, 2019