Surface Encoders for a Mosaic Scale Grating
Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu,
and Wei Gao
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai 980-8579, Japan
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