Surface Encoders for a Mosaic Scale Grating
Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu,
and Wei Gao
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai 980-8579, Japan
The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder’s measurement range in plane – in the X and Y directions. The mosaic XY-axis scale grating we use to expand the measurement range in plane consists of multiple XY-axis scale gratings arranged in plane. We present two optical configurations for the mosaic XY-axis scale grating. To confirm our configurations’ effectiveness, we fabricated two prototypes that we tested in basic experiments using a mosaic single-axis scale grating.
-  J. B. Bryan, “The Abbe Principle Revisited: An Updated Interpretation,” Precision Engineering, Vol.1, No.3, pp. 129-132, 1979.
-  W. Gao and A. Kimura, “A Three-axis Displacement Sensor with Nanometric Resolution,” Annals of the CIRP, Vol.56, No.1, pp. 529-532, 2007.
-  “International Technology Roadmap for Semiconductors,” ITRS 2009 Edition, Executive Summary, 2009.
-  R. K. Heilmann, C. G. Chen, P. T Konkola, and M. L. Schattenburg, “Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders,” Nanotechnology, Vol.15, No.10, pp. S504-S511, 2004.
This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.