Top > IJAT > Surface Encoders for a Mosaic Scale Grating

single-au.php

IJAT Vol.5 No.2 pp. 91-96
doi: 10.20965/ijat.2011.p0091
(2011)

Paper:

Views over last 60 days: 714

Surface Encoders for a Mosaic Scale Grating

Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu,
and Wei Gao

Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai 980-8579, Japan

Received:
November 30, 2010
Accepted:
December 22, 2010
Published:
March 5, 2011
Creative Commons License
Keywords:
surface encoder, mosaic grating, multiprobe, sensor
Abstract
The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder’s measurement range in plane - in the X and Y directions. The mosaic XY-axis scale grating we use to expand the measurement range in plane consists of multiple XY-axis scale gratings arranged in plane. We present two optical configurations for the mosaic XY-axis scale grating. To confirm our configurations’ effectiveness, we fabricated two prototypes that we tested in basic experiments using a mosaic single-axis scale grating.
Cite this article as:
K. Hosono, W. Kim, A. Kimura, Y. Shimizu, and W. Gao, “Surface Encoders for a Mosaic Scale Grating,” Int. J. Automation Technol., Vol.5 No.2, pp. 91-96, 2011.
Data files:
References
  1. [1] J. B. Bryan, “The Abbe Principle Revisited: An Updated Interpretation,” Precision Engineering, Vol.1, No.3, pp. 129-132, 1979.
  2. [2] W. Gao and A. Kimura, “A Three-axis Displacement Sensor with Nanometric Resolution,” Annals of the CIRP, Vol.56, No.1, pp. 529-532, 2007.
  3. [3] “International Technology Roadmap for Semiconductors,” ITRS 2009 Edition, Executive Summary, 2009.
  4. [4] R. K. Heilmann, C. G. Chen, P. T Konkola, and M. L. Schattenburg, “Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders,” Nanotechnology, Vol.15, No.10, pp. S504-S511, 2004.

Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Apr. 22, 2024