Fabrication of Ultrafine Tools Using a Desktop Microgrinder

Hitoshi Ohmori; Yoshihiro Uehara; Kazutoshi Katahira

doi:10.20965/ijat.2010.p0097

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IJAT Vol.4 No.2 pp. 97-102

doi: 10.20965/ijat.2010.p0097

(2010)

Paper:

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Fabrication of Ultrafine Tools Using a Desktop Microgrinder

Hitoshi Ohmori, Yoshihiro Uehara, and Kazutoshi Katahira

Materials Fabrication Laboratory, the Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

Received:

October 12, 2009

Accepted:

February 12, 2010

Published:

March 5, 2010

Keywords:

electrolytic in-process dressing (ELID) grinding, microtool, desktop microgrinder

Abstract

Microtools require exceptionally high-quality surface features controlled to the nanometer level. The specialized cylindrical desktop grinder we designed with electrolytic in-process dressing (ELID) features two opposed grinding-wheel heads arranged to pinch the workpiece. Grinding performance was demonstrated in fabricating staged pins with an end diameter of 50 microns and an aspect ratio of 30, together with other polygonal shapes, including quadrangular, hexagonal, and octagonal cross-sections. Satisfactory results were also achieved using microtools produced with this grinder for fine milling experiments involving the fabrication of microgrooves and micromolds.

Cite this article as:

H. Ohmori, Y. Uehara, and K. Katahira, “Fabrication of Ultrafine Tools Using a Desktop Microgrinder,” Int. J. Automation Technol., Vol.4 No.2, pp. 97-102, 2010.

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References

[1] H. K. Toenshoff, T. Friemuth, and J. C. Becker, “Process monitoring in grinding,” Annals of the CIRP Vol.51, No.2, pp. 551-571, 2002.
[2] H. Onikura, O. Ohnishi, and Y. Take, “Fabrication of micro carbide tools by ultrasonic vibration grinding,” Annals of the CIRP Vol.49, No.1, pp. 257-260, 2000.
[3] Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro fresnel lenses by means of nonrotational diamond grooving,” Annals of the CIRP Vol.51, No.1, pp. 343-346, 2002.
[4] T. Masuzawa and M. Kimura, “Electrochemical surface finishing of tungsten carbide alloy,” Annals of the CIRP Vol.40, No.1, pp. 199-202, 1991.
[5] T. Masuzawa, C. L. Kuo, andM. Fujino, “A combined electrical machining process for micronozzle fabrication,” Annals of the CIRP Vol.43, No.1, pp. 189-192, 1994.
[6] M. Vasile, C. Friedrich, B. Kikkeri, and R. McElhannon, “Micronscale machining; Tool fabrication and initial results,” Journal of Precision Engineering Vol.2, No.3, pp. 180-186, 1996.
[7] C. Friedrich and M. Vasile, “The micromilling process for high aspect ratio microstructures,” Microsystem Technologies Vol.2, No.3, pp. 144-148, 1996.
[8] C. Friedrich and B. Kithiganahalli, “Deflection compensation model for the machining of microshafts,” Proc. ASPE Annual Conference, pp. 461-464, 1994.
[9] P. M. Lonardo, D. A. Lucca, and L. De Chiffre, “Emerging trends in surface metrology,” Annals of the CIRP Vol.51, No.2, pp. 701-723, 2002.
[10] H. Ohmori, “Electrolytic in-process dressing (ELID) grinding for optical parts manufacturing,” Proc. International Progress in Precision Engineering IPES 7, pp.134-148, 1993.
[11] H. Ohmori and T. Nakagawa, “Analysis of mirror surface generation of hard and brittle materials by ELID (Electrolytic In-Process Dressing) grinding with superfine grain metallic bond wheels,” Annals of the CIRP Vol.44, No.1, pp. 287-290, 1995.
[12] H. Ohmori and T. Nakagawa, “Utilization of nonlinear conditions in precision grinding with ELID (Electrolytic In-Process Dressing) for fabrication of hard material components,” Annals of the CIRP Vol.46, No.1, pp. 261-264, 1997.
[13] H. Ohmori, K. Katahira, Y. Uehara, Y. Watanabe, and W. Lin, “Improvement of mechanical strength of micro tools by controlling surface characteristics,” Annals of the CIRP Vol.52, No.1, pp. 467-470, 2003.
[14] Y. Uehara, H. Ohmori, Y. Yamagata, W. Lin, K. Kumakura, S. Morita, T. Shimizu, and T. Sasaki, “Development of small tool by micro fabrication system applying ELID grinding technique,” Initiatives of precision engineering at the beginning of a millennium, Kluwer academic publishers, pp. 491-495, 2001.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

[1] [1] H. K. Toenshoff, T. Friemuth, and J. C. Becker, “Process monitoring in grinding,” Annals of the CIRP Vol.51, No.2, pp. 551-571, 2002.

[2] [2] H. Onikura, O. Ohnishi, and Y. Take, “Fabrication of micro carbide tools by ultrasonic vibration grinding,” Annals of the CIRP Vol.49, No.1, pp. 257-260, 2000.

[3] [3] Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro fresnel lenses by means of nonrotational diamond grooving,” Annals of the CIRP Vol.51, No.1, pp. 343-346, 2002.

[4] [4] T. Masuzawa and M. Kimura, “Electrochemical surface finishing of tungsten carbide alloy,” Annals of the CIRP Vol.40, No.1, pp. 199-202, 1991.

[5] [5] T. Masuzawa, C. L. Kuo, andM. Fujino, “A combined electrical machining process for micronozzle fabrication,” Annals of the CIRP Vol.43, No.1, pp. 189-192, 1994.

[6] [6] M. Vasile, C. Friedrich, B. Kikkeri, and R. McElhannon, “Micronscale machining; Tool fabrication and initial results,” Journal of Precision Engineering Vol.2, No.3, pp. 180-186, 1996.

[7] [7] C. Friedrich and M. Vasile, “The micromilling process for high aspect ratio microstructures,” Microsystem Technologies Vol.2, No.3, pp. 144-148, 1996.

[8] [8] C. Friedrich and B. Kithiganahalli, “Deflection compensation model for the machining of microshafts,” Proc. ASPE Annual Conference, pp. 461-464, 1994.

[9] [9] P. M. Lonardo, D. A. Lucca, and L. De Chiffre, “Emerging trends in surface metrology,” Annals of the CIRP Vol.51, No.2, pp. 701-723, 2002.

[10] [10] H. Ohmori, “Electrolytic in-process dressing (ELID) grinding for optical parts manufacturing,” Proc. International Progress in Precision Engineering IPES 7, pp.134-148, 1993.

[11] [11] H. Ohmori and T. Nakagawa, “Analysis of mirror surface generation of hard and brittle materials by ELID (Electrolytic In-Process Dressing) grinding with superfine grain metallic bond wheels,” Annals of the CIRP Vol.44, No.1, pp. 287-290, 1995.

[12] [12] H. Ohmori and T. Nakagawa, “Utilization of nonlinear conditions in precision grinding with ELID (Electrolytic In-Process Dressing) for fabrication of hard material components,” Annals of the CIRP Vol.46, No.1, pp. 261-264, 1997.

[13] [13] H. Ohmori, K. Katahira, Y. Uehara, Y. Watanabe, and W. Lin, “Improvement of mechanical strength of micro tools by controlling surface characteristics,” Annals of the CIRP Vol.52, No.1, pp. 467-470, 2003.

[14] [14] Y. Uehara, H. Ohmori, Y. Yamagata, W. Lin, K. Kumakura, S. Morita, T. Shimizu, and T. Sasaki, “Development of small tool by micro fabrication system applying ELID grinding technique,” Initiatives of precision engineering at the beginning of a millennium, Kluwer academic publishers, pp. 491-495, 2001.