IJAT Vol.3 No.4 pp. 471-477
doi: 10.20965/ijat.2009.p0471


Development of Micro Probe System for Micro Measurement Center

Ichiro Ogura and Yuichi Okazaki

Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

February 2, 2009
March 30, 2009
July 5, 2009
probe, CMM, precision measurement, micro parts, microfactory
We developed two types of contact probe for micromeasurement. The first type -a dynamic motion probe with a probe ball 200 μm in diameter- is driven in a circle by piezoelectric (PZT) actuators at a radius of 3 μm and frequency of 10 Hz. The signal noise ratio indicates that the probe’s angle resolution is 1° and contact detection resolution of 50 nm. The second type of contact probe is static and developed for compact design. In addition to having a structure similar to earlier probes developed with a crossbeam plate, this one has a measurement ball glued to the front and back of the center plate. Optical sensors measure ball movement, which is synchronized with the contact probe. Basic experiments confirmed that the new probe has a measurement resolution of 50 nm.
Cite this article as:
I. Ogura and Y. Okazaki, “Development of Micro Probe System for Micro Measurement Center,” Int. J. Automation Technol., Vol.3 No.4, pp. 471-477, 2009.
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