Development of Micro Probe System for Micro Measurement Center
Ichiro Ogura and Yuichi Okazaki
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
We developed two types of contact probe for micromeasurement. The first type -a dynamic motion probe with a probe ball 200 μm in diameter- is driven in a circle by piezoelectric (PZT) actuators at a radius of 3 μm and frequency of 10 Hz. The signal noise ratio indicates that the probe’s angle resolution is 1° and contact detection resolution of 50 nm. The second type of contact probe is static and developed for compact design. In addition to having a structure similar to earlier probes developed with a crossbeam plate, this one has a measurement ball glued to the front and back of the center plate. Optical sensors measure ball movement, which is synchronized with the contact probe. Basic experiments confirmed that the new probe has a measurement resolution of 50 nm.
-  Y. Arai, W. Gao, et al., “On-machine Measurement of Aspherical Surface Profile,” Nanotechnology and Precision Engineering, 2, 3, pp. 210-216, 2004.
-  N. Ooyama, S. Kokaji, et al., “Desktop Machining Microfactory,” 2nd International Workshop on Microfactories, pp. 13-16, 2000.
-  Y. Okazaki and T. Kitahara, “NC micro-lathe to machine micro-parts,” Proc. ASPE 2000, Annual meeting, pp. 575-578, 2000.
-  H. Maekawa and K. Komoriya, “Development of a micro transfer arm for a microfactory,” Proc. of IEEE Int. Conf. On Robotics and Automation, pp. 1444-1451, 2001.
-  L. Ruisz-Huerta, “Basis for micro-factory : CNC micromachine tools,” Proc. ASPE 2001 Annual meeting, pp. 513-516, 2000.
-  T. Kurita and M. Hattori, “Hybrid Micro Machine tool and its application”, 3rd Int. Workshop on Microfactories, pp. 149-152, 2002.