Status Monitoring of Ultraprecision Machining Using Micro Thermo Sensor and AE Sensor
Hayato Yoshioka, Mamoru Hayashi, and Hidenori Shinno
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
Higher machining accuracy and productivity have been recently required in various manufacturing industry. Machining monitoring requirements have grown increasingly severe. To meet these strict requirements, we developed machining status monitoring system for ultraprecision process combining an original micro thermo sensor and an acoustic emission (AE) sensor. Ultraprecision machining experiments confirmed that the developed monitoring system detects machining status using feature parameters defined relating output signals to machining conditions.
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