IJAT Vol.3 No.3 pp. 227-232
doi: 10.20965/ijat.2009.p0227


Multi-Axis Controlled Ultraprecision Machining and Measurement

Hirofumi Suzuki

Department of Mechanical Engineering, Faculty of Engineering, Chubu University
1200 Matsumoto, Kasugai, Aichi 487-8501, Japan

March 1, 2009
April 18, 2009
May 5, 2009
multi-axis control, ultraprecision grinding of complicated micro surface, ultrasonic vibration assisted polishing, on-measuring measurement, ultraprecision mold/die
Demands of micro aspheric optical components such as lenses and mirrors are increasing for installing to the digital devices. As the devices become to be more compact and complicated, the molds shapes of lens and mirrors would become more difficult to be machined and measured. In this study, multi-axis controlled ultra precision machining/grinding and on-machine measurement technologies are developed for manufacturing of the complicated and micro molds. In this paper, the next four technologies are focused: (1) micro fresnel grinding, (2) Micro lens array grinding, (3) Ultrasonic vibration assisted polishing, and (4) Contact type of multi axis controlled on-machine measuring system.
Cite this article as:
H. Suzuki, “Multi-Axis Controlled Ultraprecision Machining and Measurement,” Int. J. Automation Technol., Vol.3 No.3, pp. 227-232, 2009.
Data files:
  1. [1] Y. Yamamato, H. Suzuki, T. Moriwaki, T. Okino, and T. Higuchi, “Precision Grinding of Micro Fresnel Lens Molding Die (2nd report),” Journal of Japan Society for Precision Engineering, 73(6), pp. 688-692, 2007 (in Japanese).
  2. [2] Y. Yamamato, H. Suzuki, T. Onishi, T. Okino, and T. Moriwaki, “Precision Grinding of Microarray Lens Molding Die with 4-axes,” Science and Technology of Advanced Materials, 8, pp. 173-176, 2007.
  3. [3] H. Suzuki, T. Moriwaki, T. Okino, and Y. Ando, “Development of Ultrasonic Vibration Assisted Polishing Machine for Micro Aspheric Die and Mold,” Annals of the CIRP, 55(1), pp. 385-388, 2006.
  4. [4] H. Suzuki, T. Onishi, T. Moriwaki, M. Fukuta, and J. Sugawara, “Development of 45 degrees tilted on-machine measuring system for small optical parts,” Annals of the CIRP, 57(1), M10, 2008.

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