Development of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot
Minh Duc Duong*, Kazuhiko Terashima*, Toshio Kamigaki**, and Hirotoshi Kawamura**
*Department of Production Systems Engineering, Toyohashi University of Technology
1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
**New Products Development Laboratory, Shinko Electric Co., Ltd. Toyohashi Plant
150 Aza-Motoyashiki, Mitsuya-cho, Toyohashi, Aichi 441-3195, Japan
Speed up movement to increase productivity may cause problems such as vibration. The tool we propose to suppress vibration is based on input preshaping, and its visual graphical user interface makes it easy to use. Testing of the tool at high speed suppressing vibration in a semiconductor wafer transfer robot confirmed the feasibility of our proposal.
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