Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment

Yuuka Irie; Hisayuki Aoyama; Junichi Kubo; Takahiro Fujioka; Takashi Usuda

doi:10.20965/jrm.2009.p0635

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JRM Vol.21 No.5 pp. 635-641

doi: 10.20965/jrm.2009.p0635

(2009)

Paper:

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Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment

Yuuka Irie^, Hisayuki Aoyama^, Junichi Kubo^, Takahiro Fujioka^, and Takashi Usuda^***

^*The University of Electro-Communications
1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan

^**Opto-Module R and D Section, New Business Development Department, Nalux Co.,Ltd.
2-1-7 Yamazaki, Shimamoto-cho, Mishima-gun, Osaka 618-0001, Japan

^***National Metrology Institute Japan (NMIJ), Advanced Industrial Science and Technology (AIST)
1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

Received:

May 25, 2009

Accepted:

August 25, 2009

Published:

October 20, 2009

Keywords:

piezoelectric actuator, v-shaped groove guide, minute parts, inertia drive

Abstract

This paper details the development of an inertia-driven X-Y microstage and simple gripper for a pick-up lens in Blu-ray disc alignment incorporating inertia-driven microsliders on V-shaped grooves and a micropart handler. The microslider is driven by impact generated by a mass connected with a piezo element. We made a kinematic model for theoretical analysis on the X-Y microstage and gave the microinertia X-Y stage a sophisticated design.The X stage is stacked on the Y stage to provide fine in-plane positioning. Practical applications include multiple lens component assembly in which the optical lens must be centered within a tolerance of less than 100 nm. Experiments confirmed successful achievement of this microlens positioning in the center of the reference lens axis as observed by the laser interference fringe.

Cite this article as:

Y. Irie, H. Aoyama, J. Kubo, T. Fujioka, and T. Usuda, “Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment,” J. Robot. Mechatron., Vol.21 No.5, pp. 635-641, 2009.

Data files:

References

[1] T. Higuchi, M. Watanabe, and K. Kudoh, “Precise positioner utilizing rapid deformations of a piezoelectric elements,” The Japan society of precision engineering, pp. 75-80, 1988.
[2] T. Higuchi and Y. Yamagata, “Precise positioning mechanism utilizing rapid deformations of a piezoelectric elements (2nd report)-Motion Charactristics with enhanced friction-,” The Japan society of precision engineering, pp. 137-142, 1992.
[3] T. Morita, R. Yoshida, Y. Okamoto, M. K. Kurosawa, and T. Higuchi, “A smooth-impact rotation type motor using a multi-layered torsional piezoelectric actuator,” IEEE Trans. on Ultrasonic, Perroelectrics and Frequency Control, Vol.46, No.6, pp. 1439-1445, 1999.
[4] M. Ookoshi and S. Sakano, “Microstep X-Y-θ table using three-pole piezoelectreic tube actuator,” Trans. of the Japan Society of Mechanical Engineers. C, Vol.62, No.596 (19960425), pp. 146-150, 1996.
[5] T. Ito, T. Ogushi, and T. Hayashi, “Development of impulse-driven small capsule,” Robotics Society of Japan, Vol.26, 2008.
[6] Y. Nomura, O. Fuchiwaki, and H. Aoayama, “Development of inertia driven micro robot with nano tilting table for SEM operation,” ASME/JSME Joint Conf. on Micromechatronics for Information and Precision Equipment (MIPE 2006), Session15-04, Santa Clara California, 2006.
[7] K. Furutani and H. Isono, “Performance of AZARASHI (seal) positioning mechanism with friction control by inertial force,” The Japan Society of Applied Electromagnetics and Mechanics, Magnetodynamics Conf., pp. 83-86, 2007.
[8] M. Ookoshi and S. Sakano, “A research on microstep mechanism utilizing hysteresis of piezoelectreic element (certification of driving principle by analysis and experiment),” Trans. of the Japan Society of Mechanical Engineers. C, Vol.70, No.693, pp. 171-176, 2004.
[9] T. Higuchi, “Prospect of Micro Actuators (Special Issue Recent Technology of Micro-Actuator),” J. of the Japan Society of Precision Engineering, Vol.68, pp. 629-632, 2002.

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

[1] [1] T. Higuchi, M. Watanabe, and K. Kudoh, “Precise positioner utilizing rapid deformations of a piezoelectric elements,” The Japan society of precision engineering, pp. 75-80, 1988.

[2] [2] T. Higuchi and Y. Yamagata, “Precise positioning mechanism utilizing rapid deformations of a piezoelectric elements (2nd report)-Motion Charactristics with enhanced friction-,” The Japan society of precision engineering, pp. 137-142, 1992.

[3] [3] T. Morita, R. Yoshida, Y. Okamoto, M. K. Kurosawa, and T. Higuchi, “A smooth-impact rotation type motor using a multi-layered torsional piezoelectric actuator,” IEEE Trans. on Ultrasonic, Perroelectrics and Frequency Control, Vol.46, No.6, pp. 1439-1445, 1999.

[4] [4] M. Ookoshi and S. Sakano, “Microstep X-Y-θ table using three-pole piezoelectreic tube actuator,” Trans. of the Japan Society of Mechanical Engineers. C, Vol.62, No.596 (19960425), pp. 146-150, 1996.

[5] [5] T. Ito, T. Ogushi, and T. Hayashi, “Development of impulse-driven small capsule,” Robotics Society of Japan, Vol.26, 2008.

[6] [6] Y. Nomura, O. Fuchiwaki, and H. Aoayama, “Development of inertia driven micro robot with nano tilting table for SEM operation,” ASME/JSME Joint Conf. on Micromechatronics for Information and Precision Equipment (MIPE 2006), Session15-04, Santa Clara California, 2006.

[7] [7] K. Furutani and H. Isono, “Performance of AZARASHI (seal) positioning mechanism with friction control by inertial force,” The Japan Society of Applied Electromagnetics and Mechanics, Magnetodynamics Conf., pp. 83-86, 2007.

[8] [8] M. Ookoshi and S. Sakano, “A research on microstep mechanism utilizing hysteresis of piezoelectreic element (certification of driving principle by analysis and experiment),” Trans. of the Japan Society of Mechanical Engineers. C, Vol.70, No.693, pp. 171-176, 2004.

[9] [9] T. Higuchi, “Prospect of Micro Actuators (Special Issue Recent Technology of Micro-Actuator),” J. of the Japan Society of Precision Engineering, Vol.68, pp. 629-632, 2002.

Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment

Yuuka Irie*, Hisayuki Aoyama*, Junichi Kubo**, Takahiro Fujioka**, and Takashi Usuda***

Yuuka Irie^, Hisayuki Aoyama^, Junichi Kubo^, Takahiro Fujioka^, and Takashi Usuda^***