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JRM Vol.34 No.3 pp. 677-682
doi: 10.20965/jrm.2022.p0677
(2022)

Development Report:

Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, and Masayuki Sohgawa

Graduate School of Science and Technology, Niigata University
8050 Ikarashi 2-no-cho, Nishi-ku, Niigata 950-2181, Japan

Received:
March 5, 2021
Accepted:
January 10, 2022
Published:
June 20, 2022
Keywords:
tactile sensor, MEMS, microcantilever, high sensitivity
Abstract

We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

The tactile sensor chip and cantilever

The tactile sensor chip and cantilever

Cite this article as:
R. Kaneta, T. Hasegawa, J. Kido, T. Abe, and M. Sohgawa, “Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors,” J. Robot. Mechatron., Vol.34 No.3, pp. 677-682, 2022.
Data files:
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Last updated on Dec. 06, 2024