JRM Vol.34 No.3 pp. 677-682
doi: 10.20965/jrm.2022.p0677

Development Report:

Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, and Masayuki Sohgawa

Graduate School of Science and Technology, Niigata University
8050 Ikarashi 2-no-cho, Nishi-ku, Niigata 950-2181, Japan

March 5, 2021
January 10, 2022
June 20, 2022
tactile sensor, MEMS, microcantilever, high sensitivity
Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

The tactile sensor chip and cantilever

We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

Cite this article as:
Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, and Masayuki Sohgawa, “Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors,” J. Robot. Mechatron., Vol.34, No.3, pp. 677-682, 2022.
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Last updated on Jul. 01, 2022