JRM Vol.32 No.2 pp. 281-288
doi: 10.20965/jrm.2020.p0281


Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review

Ahmad Athif Mohd Faudzi*,**, Yaser Sabzehmeidani*, and Koichi Suzumori***

*Centre for Artificial Intelligence and Robotics, Universiti Teknologi Malaysia
Jalan Sultan Yahya Petra, Kampung Datuk Keramat, Kuala Lumpur 54100, Malaysia

**School of Electrical Engineering, Universiti Teknologi Malaysia
Johor Bahru 81310, Malaysia

***School of Engineering, Tokyo Institute of Technology
2-12-1 Ookayama, Meguro-ku, Tokyo 152-8552, Japan

September 21, 2019
February 19, 2020
April 20, 2020
MEMS, robotic, sensor, actuator, micro-machining

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.

MEMS structure as sensor and actuator in various devices and technologies

MEMS structure as sensor and actuator in various devices and technologies

Cite this article as:
A. Faudzi, Y. Sabzehmeidani, and K. Suzumori, “Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review,” J. Robot. Mechatron., Vol.32 No.2, pp. 281-288, 2020.
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