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JRM Vol.15 No.2 pp. 244-250
doi: 10.20965/jrm.2003.p0244
(2003)

Paper:

A Valve-Integrated Microactuator Using Homogeneous ER Fluid

Kazuhiro Yoshida*, Hiroshi Yano**, Jung-Ho Park*, and Shinichi Yokota*

*Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama, 226-8503 Japan

**Graduate School, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama, 226-8503 Japan

Received:
November 11, 2002
Accepted:
December 9, 2002
Published:
April 20, 2003
Keywords:
microactuator, ER (electro-rheological) fluid, microvalve, diaphragm, micromachine, functional fluid, liquid crystal, polyimide
Abstract

For micromachines using fluid power with high power density, a valve-integrated microactuator using homogeneous ER (electro-rheological) fluid is proposed and developed. For higher performance of the micro ER valve that controls the flow of homogeneous ER fluid using the viscosity change due to the applied electric field, the characteristics of the micro ER valve with different ER fluids are experimentally investigated. Also, a polyimide-diaphragm fluid microactuator is proposed, fabricated, and tested. Then the valve-integrated microactuator is fabricated using above devices and the characteristics are experimentally examined. A micro gripper driven by the microactuator is demonstrated.

Cite this article as:
Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho Park, and Shinichi Yokota, “A Valve-Integrated Microactuator Using Homogeneous ER Fluid,” J. Robot. Mechatron., Vol.15, No.2, pp. 244-250, 2003.
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Last updated on Jun. 08, 2021