single-rb.php

JRM Vol.14 No.3 pp. 221-226
doi: 10.20965/jrm.2002.p0221
(2002)

Paper:

Micromanipulation by Miniature Robots in a SEM Vacuum Chamber

Ohmi Fuchiwaki and Hisayuki Aoyama

Dept. of Mechanical Engineering and Intelligent Systems, University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan

Received:
November 14, 2001
Accepted:
February 31, 2002
Published:
June 20, 2002
Keywords:
microrobot, cooperation, micromanipulation, remote operation, real-time SEM monitoring
Abstract

In this paper, we describe flexible micromanipulation organized by insect size robots in scanning electron microscopy. Small robots composed of piezo elements and electromagnets move in the SEM chamber with submicron resolution. They manipulate small objects in cooperation with each other. As a basic operation, one small robot, which has a sliding microtable transports samples at the SEM focus point precisely and this sliding table can be also positioned by the other small robot’s manipulation. This two-robot cooperation provides x-y accurate positioning at any location within the chamber. On the sample table, a small robot with a micromanipulator handles small objects for picking up and putting down. The operator controls each robot easily with real-time monitoring of SEM images. This cooperation of small robots in SEM provides flexible, accurate microprocessing performance with low cost.

Cite this article as:
Ohmi Fuchiwaki and Hisayuki Aoyama, “Micromanipulation by Miniature Robots in a SEM Vacuum Chamber,” J. Robot. Mechatron., Vol.14, No.3, pp. 221-226, 2002.
Data files:

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Jun. 19, 2021