Repair Equipment for Large-Scale Panel by Penning Discharge Micro-Sputtering Method
Hiroyuki Funamoto*, Osamu Koseki* and Toshio Sugita**
*Seiko Instruments Inc., Nakase 1-8, Mihama-ku, Chiba-shi, Chiba, 271 Japan
**Department of Electrical Engineering, Science University of Tokyo, Shinjuku-ku, Tokyo, 162 Japan
Repair equipment for a large panel, such as photomask and a liquid crystal panel, is developed by using the Penning gauge-type discharge micro-sputtering (PDMS) method. The equipment allows a local evacuated area to be creased on a panel to deposit or (for a clear defect) to etch a small portion of a metallic film (for an opaque defect) while the whole panel remains in atmospheric condition. The repair equipment includes the PDMS apparatus, an X-Y-θ stage, a TV monitor, and a vacuum pump unit. The defect to be repaired is at first detected by the monitor and the monitor, and the X-Y-θ stage is set on the position. Then, the PDMS device is evacuated, and discharge takes place to deposit or etch a metallic film. The shape of the repair spot is controlled by an aperture made of stainless steel sheet. The equipment is evacuated with respect to positioning precision, adherence quality and electrical conductivity necessary for a photomask and a liquid crystal panel.