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JRM Vol.5 No.4 pp. 344-348
doi: 10.20965/jrm.1993.p0344
(1993)

Paper:

Positioning of an X-Y Stage Using the Horizontal Acceleration Signal of the Base Plate

Shinji Wakui, Mikio Sato, Katsumi Asada
and Takeshi Sawada

Canon Inc., Control Research Dept., 53 Imaikamimachi, Nakahara-ku, Kawasaki, Kanagawa, 211 Japan

Received:
April 26, 1993
Accepted:
April 30, 1993
Published:
August 20, 1993
Keywords:
Reduction stepper, X-Y stage, Acceleration feedback, Zeroing, Disturbance observer
Abstract

In this paper, we formulate the effectiveness of the horizontal acceleration feedback for an X-Y stage installed in the reduction stepper by. using the 2-degree-of-freedom mechanical model and show that its feedback is equivalent to the zeroing of disturbance. Furthermore, we propose the disturbance observer instead of acceleration feedback, and its superior performance is illustrated by using the numerical simulation.

Cite this article as:
S. Wakui, M. Sato, and K. Sawada, “Positioning of an X-Y Stage Using the Horizontal Acceleration Signal of the Base Plate,” J. Robot. Mechatron., Vol.5, No.4, pp. 344-348, 1993.
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Last updated on Apr. 19, 2019