Positioning of an X-Y Stage Using the Horizontal Acceleration Signal of the Base Plate
Shinji Wakui, Mikio Sato, Katsumi Asada
and Takeshi Sawada
Canon Inc., Control Research Dept., 53 Imaikamimachi, Nakahara-ku, Kawasaki, Kanagawa, 211 Japan
In this paper, we formulate the effectiveness of the horizontal acceleration feedback for an X-Y stage installed in the reduction stepper by. using the 2-degree-of-freedom mechanical model and show that its feedback is equivalent to the zeroing of disturbance. Furthermore, we propose the disturbance observer instead of acceleration feedback, and its superior performance is illustrated by using the numerical simulation.
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