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JRM Vol.5 No.4 pp. 316-325
doi: 10.20965/jrm.1993.p0316
(1993)

Review:

Application of Micromechatronics

Shinji Hara*, Toshihiko Sakuhara**, Masao Washizu***,
Wataru Nakagawa****, Yutaka Hirai***** and Hiroyuki Fujita******

*NTT Laboratory, 3-9-11 Midori-cho, Murashino, Tokyo 180, Japan

**Seiko Instruments Inc., 6-31-1 Kameido, Koto-ku, Tokyo 136, Japan

***Seikei University, 3-3-1 Kitamchi, Kichojouji, Murashino, Tokyo 180, Japan

****Fuji Electric

*****IIS, The University of Tokyo, 7-22-1 Roppongi, Tokyo, 106 Japan

Received:
March 3, 1993
Accepted:
March 15, 1993
Published:
August 20, 1993
Keywords:
Micromechatronics,. Micromachining, Micro work, SPM
Abstract
Cite this article as:
S. Hara, T. Sakuhara, M. Washizu, <. Nakagawa, Y. Hirai, and H. Fujita, “Application of Micromechatronics,” J. Robot. Mechatron., Vol.5, No.4, pp. 316-325, 1993.
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Last updated on Dec. 05, 2019