Application of   Micromechatronics

Shinji Hara; Toshihiko Sakuhara; Masao Washizu; Wataru Nakagawa; Yutaka Hirai; Hiroyuki Fujita

doi:10.20965/jrm.1993.p0316

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JRM Vol.5 No.4 pp. 316-325

doi: 10.20965/jrm.1993.p0316

(1993)

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Application of Micromechatronics

Shinji Hara^, Toshihiko Sakuhara^, Masao Washizu^,
Wataru Nakagawa^**, Yutaka Hirai^* and Hiroyuki Fujita^****

^*NTT Laboratory, 3-9-11 Midori-cho, Murashino, Tokyo 180, Japan

^**Seiko Instruments Inc., 6-31-1 Kameido, Koto-ku, Tokyo 136, Japan

^***Seikei University, 3-3-1 Kitamchi, Kichojouji, Murashino, Tokyo 180, Japan

^****Fuji Electric

^*****IIS, The University of Tokyo, 7-22-1 Roppongi, Tokyo, 106 Japan

Received:

March 3, 1993

Accepted:

March 15, 1993

Published:

August 20, 1993

Keywords:

Micromechatronics,. Micromachining, Micro work, SPM

Abstract

Cite this article as:

S. Hara, T. Sakuhara, M. Washizu, W. Nakagawa, Y. Hirai, and H. Fujita, “Application of Micromechatronics,” J. Robot. Mechatron., Vol.5 No.4, pp. 316-325, 1993.

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This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

Application of Micromechatronics

Shinji Hara*, Toshihiko Sakuhara**, Masao Washizu***, Wataru Nakagawa****, Yutaka Hirai***** and Hiroyuki Fujita******

Shinji Hara^, Toshihiko Sakuhara^, Masao Washizu^,
Wataru Nakagawa^**, Yutaka Hirai^* and Hiroyuki Fujita^****