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JRM Vol.3 No.4 pp. 346-353
doi: 10.20965/jrm.1991.p0346
(1991)

Paper:

A Vertical X-ray Stepper for SOR Lithography

Sunao Ishihara, Atsunobu Une, Munenori Kanai, Masanori Suzuki, Makoto Fukuda and Fujio Omata

LSI Laboratory, Nippon Telegram and Telephone Corporation, 3-1 Morinosato-Wakamiya, Atsugi-shi, Kanagawa 243-01, Japan

Received:
June 30, 1991
Accepted:
July 20, 1991
Published:
August 20, 1991
Keywords:
SOR, X-ray lithography, X-ray stepper, Air bearing, X-Y stage, Optical-heterodyne interferometry
Abstract

A vertical x-ray stepper for SOR lithography has been developed. The stepper exposes wafers in a normal atmosphere to vertically-scanned SOR with continuous alignment control during exposure. The key devices of the stepper are a vertical X-Y stage and an opticalheterodyne alignment system. The X-Y stage uses airlubricated components, including air bearing lead screws, linear sliders and radial/thrust bearings. The optical-heterodyne alignment system detects the displacement between the mask and wafer gratings with precision of 8.3nm. Several exposure experiments proved that the alignment capability is better than ±0.1μm for a 3σ-value.

Cite this article as:
S. Ishihara, A. Une, M. Kanai, M. Suzuki, M. Fukuda, and F. Omata, “A Vertical X-ray Stepper for SOR Lithography,” J. Robot. Mechatron., Vol.3, No.4, pp. 346-353, 1991.
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