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JRM Vol.3 No.1 pp. 28-33
doi: 10.20965/jrm.1991.p0028
(1991)

Paper:

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Silicon Microvalves and Their Applications

Masayoshi Esashi

Tohoku University, Aramaki-aza-Aoba, Aoba-ku, Sendai 980, Japan

Published:
February 20, 1991
Creative Commons License
Abstract
Cite this article as:
Masayoshi Esashi, “Silicon Microvalves and Their Applications,” J. Robot. Mechatron., Vol.3, No.1, pp. 28-33, 1991.
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Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 International License.

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