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JRM Vol.3 No.1 pp. 8-11
doi: 10.20965/jrm.1991.p0008
(1991)

Review:

Evaluation of Thin Film Material for Micromechanisms

Osamu Tabata and Susumu Sugiyama

Toyota Central R & D Labs. Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan

Published:
February 20, 1991
Abstract
Cite this article as:
O. Tabata and S. Sugiyama, “Evaluation of Thin Film Material for Micromechanisms,” J. Robot. Mechatron., Vol.3, No.1, pp. 8-11, 1991.
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Last updated on Aug. 21, 2019