Evaluation of Thin Film Material for Micromechanisms

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JRM Vol.3 No.1 pp. 8-11

doi: 10.20965/jrm.1991.p0008

(1991)

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Osamu Tabata and Susumu Sugiyama

Toyota Central R & D Labs. Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan

Published:

February 20, 1991

Abstract

Cite this article as:

Osamu Tabata and Susumu Sugiyama, “Evaluation of Thin Film Material for Micromechanisms,” J. Robot. Mechatron., Vol.3, No.1, pp. 8-11, 1991.

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