single-rb.php

JRM Vol.3 No.1 pp. 8-11
doi: 10.20965/jrm.1991.p0008
(1991)

Review:

Views over last 60 days: 208

Evaluation of Thin Film Material for Micromechanisms

Osamu Tabata and Susumu Sugiyama

Toyota Central R & D Labs. Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan

Published:
February 20, 1991
Creative Commons License
Abstract
Cite this article as:
Osamu Tabata and Susumu Sugiyama, “Evaluation of Thin Film Material for Micromechanisms,” J. Robot. Mechatron., Vol.3, No.1, pp. 8-11, 1991.
Data files:

Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Jul. 01, 2022