Letter:
Multi-Layered Electrostatic Actuator
T. Higuchi and S. Egawa
Institute of Industrial Science, University of Tokyo 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan
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Letter:
Institute of Industrial Science, University of Tokyo 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan
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Last updated on Feb. 25, 2021