This paper deals with an equivalent circuit model of a stacked piezoelectric actuator. The displacement of a piezoelectric actuator is usually controlled by adjusting the applied voltage. However, the displacement shows hysteresis relative to the applied voltage. The proposed model is based on Martin’s model for a stacked piezoelectric actuator in which the mechanical compliance is represented with a Cauer circuit composed of Zener diodes and nonlinear capacitances using hyperbolic tangent functions. The parameters were identified from the initial displacement during polarization or the hysteresis loop in a steady state. The trends of the hysteresis of the displacement relative to the applied voltage coincided with the results of experiments on static displacement and frequency characteristics. Less hysteresis in the displacement by controlling the supplied charge was also represented.

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