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IJAT Vol.19 No.4 pp. 397-404
doi: 10.20965/ijat.2025.p0397
(2025)

Research Paper:

Development of Planar Stage with Movable Magnet Array and Coil Switching Control

Motohiro Takahashi

Research and Development Group, Hitachi, Ltd.
832-2 Horiguchi, Hitachinaka, Ibaraki 312-0034, Japan

Corresponding author

Received:
December 12, 2023
Accepted:
October 4, 2024
Published:
July 5, 2025
Keywords:
ultra-precision positioning, magnetic levitation, planar stage
Abstract

In recent years, as semiconductors have become finer and finer, their manufacturing equipment has been required to have nanometer-scale positioning. In such systems, the main sources of positioning error are friction, thermal deformation, and strain from the roller guides. Throughput is mainly limited by the heat generated by the motor coils and thermal deformation of the stage due to friction of the roller guides. Magnetic levitation (maglev) guides can prevent these two effects that limit positioning accuracy because they can provide non-contact support for the table. In particular, compared to a stacked maglev stage, a planar-type-maglev stage has a dramatically smaller moving mass, enabling high-speed movement with high positioning accuracy. From the viewpoint of reducing heat generation in the moving unit, it is desirable to install the magnet on the levitating side and the coil on the fixed side. However, a movable magnet type planar stage requires the use of a coil switching control system. In this study, a new magnetic levitation planar stage system with the movable magnet array and the coil switching control system was prototyped and evaluated. The basic characteristics of the prototype magnetic levitation stage were evaluated. As a result, stable levitation positioning by coil switching control was confirmed.

Cite this article as:
M. Takahashi, “Development of Planar Stage with Movable Magnet Array and Coil Switching Control,” Int. J. Automation Technol., Vol.19 No.4, pp. 397-404, 2025.
Data files:
References
  1. [1] L. Zhou and J. Wu, “Magnetic levitation technology for precision motion systems: A review and future perspectives,” Int. J. Automation Technol., Vol.16, No.4, pp. 386-402, 2022. https://doi.org/10.20965/ijat.2022.p0386
  2. [2] D. Laro, E. Boots, J. van Eijk, and L. Sanders, “Design and control of a through wall 450 mm vacuum compatible wafer stage,” Proc. of the 13th euspen Int. Conf., 2013.
  3. [3] M. Takahashi, H. Ogawa, and T. Kato, “Compact maglev stage system for nanometer-scale positioning,” Precision Engineering, Vol.66, pp. 519-530, 2020. https://doi.org/10.1016/j.precisioneng.2020.08.016
  4. [4] M. Takahashi, “Design concept and structural configuration of magnetic levitation stage with Z-assist system,” Int. J. Automation Technol., Vol.15, No.5, pp. 706-714, 2021. https://doi.org/10.20965/ijat.2021.p0706
  5. [5] L. Zhou and D. L. Trumper, “Finite element model for pre-magnetized linear hysteresis motors,” 33th Annual Conf. of American Society of Precision Engineering, pp. 121-126, 2019.
  6. [6] K. Tanaka, “Development of 6DOF magnetic levitation stage for Lithography tool – proof of concept (second report) –,” J. of the Japan Society for Precision Engineering, Vol.75, No.5, pp. 605-611, 2009 (in Japanese). https://doi.org/10.2493/jjspe.75.605
  7. [7] L. Zhou and D. L. Trumper, “Magnetically levitated linear stage for in-vacuum transportation tasks,” 33rd Annual Conf. of ASPE, pp. 1-6, 2018.
  8. [8] I. J. C. Compter, “Electro-dynamic planar motor,” Precision Engineering, Vol.28, No.2, pp. 171-180, 2004. https://doi.org/10.1016/j.precisioneng.2003.08.002
  9. [9] L. Kramer, T. van den Dool, and G. Witvoet, “Demonstrator for nano-precision multi-agent MagLev positioning platform for high throughput metrology,” IFAC-PapersOnLine, Vol.52, No.15, pp. 471-476, 2019. https://doi.org/10.1016/j.ifacol.2019.11.720
  10. [10] J. W. Jansen, C. M. M. van Lierop, E. A. Lomonova, and A. J. A. Vandenput, “Magnetically levitated planar actuator with moving magnets,” IEEE Trans. on Industry Applications, Vol.44, No.4, pp. 1108-1115, 2008. https://doi.org/10.1109/TIA.2008.926065
  11. [11] A. Goos and R. Gloess, “Sensor array and algorithms for current control in a 6-DOF magnetic levitation actuator,” ACTUATOR 2018; 16th Int. Conf. on New Actuators, pp. 1-4, 2018.
  12. [12] I.-U.-R. Usman and X. Lu, “Force ripple attenuation of 6-DOF direct drive permanent magnet planar levitating synchronous motors,” IEEE Trans. on Magnetics, Vol.51, No.12, pp. 1-8, 2015. https://doi.org/10.1109/TMAG.2015.2461611
  13. [13] I. Proimadis et al., “Active deformation control for a magnetically levitated planar motor mover,” IEEE Trans. on Industry Applications, Vol.58, No.1, pp. 242-249, 2022. https://doi.org/10.1109/TIA.2021.3119005
  14. [14] M. Takahashi, “Development of magnet array movable planar magnetic levitation stage,” Proc. of the 23rd euspen Int. Conf., 2023.

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Last updated on Jul. 04, 2025