The Technical Committee for Ultra-Precision Positioning, the Japan Society for Precision Engineering has conducted a questionnaire survey on ultra-precision positioning technology comprising precision mechatronics and precision measurements every four years since 1986, analyzing the status and evolution of positioning technology and specific problems. This article presents an overview of the results of the latest survey conducted in 2022, as well as the results by equipment of interest to the respondents. Furthermore, attention is paid to the results of the survey on energy saving and the environmental impact of positioning equipment, and the efforts of the survey respondents to reduce the environmental impact are reported.

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