IJAT Vol.17 No.5 pp. 529-535
doi: 10.20965/ijat.2023.p0529

Research Paper:

A Study of Depth of Cut and Wear in Precision Grinding of CVD-SiC

Fengmin Ji* ORCID Icon, Kentaro Imai**,†, and Weimin Lin**

*Graduate School of Science and Technology, Gunma University
1-5-1 Tenjin-cho, Kiryu-shi, Gunma 376-8515, Japan

**Division of Mechanical Science and Technology, Gunma University
Gunma, Japan

Corresponding author

April 17, 2023
July 12, 2023
September 5, 2023
ductile mode grinding, CVD-SiC, Vickers indentation test, grinding wheel wear

In this study, the effects of critical depth of cut and wheel wear were investigated to realize efficient precision grinding of CVD-SiC by ductile mode grinding at low cost. To compare the results under experimental conditions, Vickers indentation tests and grinding experiments were conducted. As a result of the Vickers indentation test at an applied load of 0.015 N, the minimum indentation load in this study, the indentation depth was 1.3 μm, and cracks were observed at the corners of the indentation isotropically. Additionally, the pile-up was observed around the indentation, suggesting that plastic deformation due to shear flow was relatively large. Grinding experiments were conducted using grinding wheels with different grain sizes. All the grinding conditions in this study resulted in a surface with a mixture of brittle and ductile modes. The proportion of ductile modes was larger, and the surface roughness Ra was smaller when a grindstone with a smaller grain size was used. Additionally, the effect of wear was investigated. As wear progressed, the number of protruding grains decreased, resulting in a smaller surface roughness. These results indicate that the amount of protruding abrasive grains must be controlled to achieve stable ductile mode grinding.

Cite this article as:
F. Ji, K. Imai, and W. Lin, “A Study of Depth of Cut and Wear in Precision Grinding of CVD-SiC,” Int. J. Automation Technol., Vol.17 No.5, pp. 529-535, 2023.
Data files:
  1. [1] G. Uchida, T. Yamada, K. Ichihara, M. Harada, K. Miura, and H.-S. Lee, “Evaluation of Grinding Wheel Surface Shape on Difference Multiple Helical Dressing Condition,” Int. J. Automation Technol., Vol.15, No.1, pp. 57-64, 2021.
  2. [2] G. Uchida, T. Yamada, K. Ichihara, M. Harada, and T. Kohara, “Evaluation of the Relationship Among Dressing Conditions Using Prismatic Dresser, Dressing Resistance, and Grinding Characteristics,” Int. J. Automation Technol., Vol.16, No.1, pp. 12-20, 2022.
  3. [3] G. Uchida, T. Yamada, and Y. Iwasaki, “Evaluation of Dressing Condition Based on Quantification of Grinding Wheel Surface Conditions,” Int. J. Automation Technol., Vol.17, No.1, pp. 21-31, 2023.
  4. [4] H. Tsuwa, “On the Behaviors of Abrasive Grains in Grinding Process. (Report 1),” J. Jpn. Soc. Precis. Eng., Vol.26, No.303, pp. 199-205, 1960 (in Japanese).
  5. [5] H. Yoshikawa, “Process of Wear in Grinding Wheel with Fracture of Bond and Grain,” J. Jpn. Soc. Precis. Eng., Vol.26, No.310, pp. 691-700, 1960 (in Japanese).
  6. [6] S. Habu, Y. Ichida, H. Kajino, and M. Sato, “Wear behavior of grain cutting edges and wheel surface topography in grinding with vitrified diamond wheels,” J. Jpn. Soc. Abras. Technol., Vol.54, No.3, pp. 164-171, 2010 (in Japanese).
  7. [7] M. Fujimoto and K. Shimizu, “Microscopic Wear Characteristics of Ceramic Grinding Wheel in Creep Feed Grinding,” Int. J. Automation Technol., Vol.16, No.1, pp. 5-11, 2022.
  8. [8] M. Fujimoto and M. Fujita, “Three-Dimensional Evaluation of Microscopic Wheel Surface Topography in Creep Feed Grinding Using Ceramics Grinding Wheel,” Int. J. Automation Technol., Vol.17, No.1, pp. 14-20, 2023.
  9. [9] H. Suzuki, M. Hirano, M. Abe, Y. Niino, and Y. Namba, “Dactile Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors,” J. Jpn. Soc. Precis. Eng., Vol.61, No.4, pp. 571-575, 1995 (in Japanese).
  10. [10] H. Suzuki, M. Abe, and Y. Namba, “Ductile Grinding of Glass-Ceramics with Bronze-Bonded Diamond Wheels,” J. Jpn. Soc. Precis. Eng., Vol.63, No.4, pp. 535-539, 1997 (in Japanese).
  11. [11] C. H. Zhang, T. Kato, W. Li, and H. Ohmori, “A comparative study: surface characteristics of CVD-SiC ground with cast iron bond diamond wheel,” Int. J. Mach. Tool. Manu., Vol.40, No.4, pp. 527-537, 2000.
  12. [12] C. H. Zhang, H. Ohmori, T. Kato, and N. Morita, “Evaluation of surface characteristics of ground CVD-SiC using cast iron bond diamond wheels,” Precis. Eng., Vol.25, No.1, pp. 56-62, 2001.
  13. [13] A. Beaucamp, Y. Namba, H. Combrinck, P. Charlton, and R. Freeman, “Shape adaptive grinding of CVD silicon carbide,” CIRP Ann. Manuf. Technol., Vol.63, Issue 1, pp. 317-320, 2014.
  14. [14] A. Beaucamp, P. Simon, P. Charlton, C. King, A. Matsubara, and K. Wegener, “Brittle-ductile transition in shape adaptive grinding (SAG) of SiC aspheric optics,” Int. J. Mach. Tool Manu., Vol.115, pp. 29-37, 2017.
  15. [15] N. Horvath, A. Honeycutt, and M. A. Davies, “Grinding of additively manufactured silicon carbide surfaces for optical applications,” CIRP Ann. Manuf. Technol., Vol.69, Issue 1, pp. 509-512, 2020.
  16. [16] W. C. Oliver and G. M. Pharr, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res., Vol.7, No.6, pp. 1564-1583, 1992.
  17. [17] Y. Ochi, A. Ishii, S. Sasaki, S. Kurakazu, and M. Kawai, “Effects of Vickers Indented Load and Microstructure of Bending Strength and Fracture Toughness in Normal-Sintered Silicon Carbide,” J. Jpn. Soc. Mech. Eng., Vol.56, No.523, pp. 488-493, 1990 (in Japanese).
  18. [18] A. Moradkhani, H. Baharvandi, M. Tajdari, H. Latifi, and J. Martikainen, “Determination of fracture toughness using the area of micro-crack tracks left in brittle materials by Vickers indentation test,” J. Adv. Ceram., Vol.2, pp. 87-102, 2013.
  19. [19] R. F. Cook and G. M. Pharr, “Direct Observation and Analysis of Indentation Cracking in Glasses and Ceramics,” J. Am. Ceram. Soc., Vol.73, No.4, pp. 787-817, 1990.
  20. [20] B. R. Lawn and A. G. Evans, “A model for crack initiation in elastic/plastic indentation fields,” J. of Materials Science, Vol.12, pp. 2195-2199, 1977.
  21. [21] J. T. Hagan, “Micromechanics of crack nucleation during indentations,” J. Mater. Sci., Vol.14, pp. 2975-2980, 1979.
  22. [22] S. Aoyama and N. Shibata, “Low-Temperature SiC Film Coating on Metals by Microwave-Plasma Chemical Vapor Deposition,” J. Ceram. Soc. Jpn., Vol.102, No.11, pp. 1055-1059, 1994 (in Japanese).
  23. [23] M. Liu, J.-Y. Lin, K. A. Tieu, K. Zhou, and T. Koseki, “Progress in Indentation Study of Materials via Both Experimental and Numerical Methods,” Crystals, Vol.7, Issue 10, 258, 2017.
  24. [24] T. Roucel, J. I. Jang, and U. Ramamurty, “Indentation of glasses,” Prog. Mater. Sci., Vol.121, 100834, 2021.
  25. [25] Y. Kato, H. Yamazaki, S. Yoshida, and J. Matsuoka, “Effect on densification on crack initiation under Vickers indentation test,” J. Non-Cryst. Solids, Vol.356, Issues 35-36, pp. 1768-1773, 2010.
  26. [26] E. Antwi, K. Liu, and H. Wang, “A review on ductile mode cutting on brittle materials,” Front. Mech. Eng., Vol.13, No.2, pp. 251-263, 2018.

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Last updated on Jul. 23, 2024