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IJAT Vol.15 No.2 pp. 225-233
doi: 10.20965/ijat.2021.p0225
(2021)

Paper:

Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool

Hao Duan*, Shinya Morita*,†, Takuya Hosobata**, Masahiro Takeda**, and Yutaka Yamagata**

*Tokyo Denki University
5 Senju Asahi-cho, Adachi-ku, Tokyo 120-8551, Japan

Corresponding author

**RIKEN Center for Advanced Photonics, Wako, Japan

Received:
January 30, 2020
Accepted:
September 25, 2020
Published:
March 5, 2021
Keywords:
on-machine measurement, ultrahigh precision machine tool, confocal chromatic probe
Abstract

An on-machine measurement (OMM) system is an effective apparatus for achieving an efficient profile compensation and improving machining conditions in ultrahigh precision machining. Herein, we report a new OMM system with a confocal chromatic probe on a five-axis ultrahigh precision machine tool constructed using a real-time position capturing method. The probe and machine tool positions are captured synchronously using a personal computer to generate profile measurement data. Long- and short-term stability, micro step response, and repeatability tests using an optical flat indicates that the system has a precision of approximately ±10 nm. The profile measurement test using a reference sphere indicates that the precision of the OMM system deteriorated at a large slope angle of ±45°. However, the overall accuracy is estimated to be within ±100 nm at a slope angle within ±15°. The linearity test at various slope angles indicates that the decrease in reflected light from a mirror-like surface deteriorates the performance of the probe.

Cite this article as:
Hao Duan, Shinya Morita, Takuya Hosobata, Masahiro Takeda, and Yutaka Yamagata, “Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool,” Int. J. Automation Technol., Vol.15, No.2, pp. 225-233, 2021.
Data files:
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Last updated on Apr. 13, 2021