single-au.php

IJAT Vol.11 No.5 pp. 787-794
doi: 10.20965/ijat.2017.p0787
(2017)

Paper:

Three-Dimensional Reconstruction by Time-Domain Optical Coherence Tomography Microscope with Improved Measurement Range

Shin Usuki*,†, Katsuaki Tamaki**, and Kenjiro T. Miura**

*Research Institute of Electronics, Shizuoka University
3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan

Corresponding author

**Graduate School of Engineering, Shizuoka University, Hamamatsu, Japan

Received:
December 30, 2016
Accepted:
April 14, 2017
Online released:
August 30, 2017
Published:
September 5, 2017
Keywords:
three-dimensional reconstruction, three-dimensional measurement, optical coherence tomography, optical microscopy
Abstract

The objective of this research was to develop a three-dimensional (3D) reconstruction system based on a time-domain optical coherence tomography (OCT) microscope. One of the critical drawbacks of OCT microscopes is that their axial measurement ranges are typically limited by their depths of field (DOFs), which are determined by the numerical apertures of their objective lenses and the central wavelengths of their light sources. If a low-coherence interference fringe is far outside the DOF, the measurement accuracy inevitably decreases, regardless of how well-adjusted the reference mirror is. To address this issue and improve the axial measurement range of the OCT microscope in this study, an object-scanning measurement scheme involving a Linnik interferometer was developed. To calibrate the system in the proposed technique, image post-processing is performed for a well-conditioned state to ensure that a low-coherence interference fringe is generated within the DOF, enabling 3D objects with high-aspect-ratio structures to be scanned along the axial direction. During object-scanning, this state is always monitored and is corrected by adjusting the reference mirror. By using this method, the axial measurement range can be improved up to the working distance (WD) of the objective lens without compromising the measurement accuracy. The WD is typically longer than 10 mm, while the DOF of the microscope is around 0.01 mm in general, although it varies depending on the imaging system. In this report, the experimental setup of a 3D reconstruction system is presented, a series of experimental verifications is described, and the results are discussed. The axial measurement range was improved to at least 35 times that of a typical OCT microscope with identical imaging optics.

References
  1. [1] S. Usuki and K. T. Miura, “Nano-micro geometric modeling using microscopic image,” Key Engineering Materials, Vol.523-524, pp. 345-349, 2012.
  2. [2] N. S. Claxton, T. J. Fellers, and M. W. Davidson, “Laser scanning confocal microscopy,” Department of Optical Microscopy and Digital Imaging National High Magnetic Field Laboratory, Florida State University, Unpublished (http://www.olympusfluoview.com/theory/LSCMIntro.pdf), 2005.
  3. [3] J. Pawley, “The development of field-emission scanning electron microscopy for imaging biological surfaces,” Scanning, Vol.19, No.5, pp. 324-336, 1997.
  4. [4] R. Howland and L. Benatar, “A Practical Guide to Scanning Probe Microscopy,” Park Scientific Instruments, 1993.
  5. [5] T. Yidong, W. Weiping, X. C. Xin, and Z. Shulian, “Laser confocal feedback tomography and nano-step height measurement,” Nature Scientific Reports 3, Article number: 2971, 2013.
  6. [6] H. Schreiber and J. H. Bruning. “Phase shifting interferometry,” Optical Shop Testing, Third Edition, pp. 547-666, 2006.
  7. [7] S. K. Nayar and Y. Nakagawa, “Shape from focus,” IEEE Trans. on Pattern Analysis and Machine Intelligence, Vol.16, No.8, pp. 824-831, 1994.
  8. [8] L. Bian, J. Suo, J. Chung, X. Ou, C. Yang, F. Chen, and Q. Dai, “Fourier ptychographic reconstruction using Poisson maximum likelihood and truncated Wirtinger gradient,” Nature Scientific Reports 6, Article number: 27384, 2016.
  9. [9] A. W. Lohmann et al., “Space–bandwidth product of optical signals and systems,” J. of the Optical Society of America A, Vol.13, No.3, pp. 470-473, 1996.
  10. [10] M. Levoy, R. Ng, A. Adams, M. Footer, and M. Horowitz, “Light field microscopy,” ACM Trans. on Graphics, Vol.25, No.3, pp. 924-934, 2006.
  11. [11] S. Usuki and K. T. Miura, “High-resolution tolerance against noise imaging technique based on active shift of optical axis,” Int. J. of Automation Technology, Vol.5, No.2, pp. 206-211, 2011.
  12. [12] S. Usuki, M. Uno, and K. T. Miura, “Digital shape reconstruction of a micro-sized machining tool using light-field microscopy,” Int. J. of Automation Technology, Vol.10, No.2, pp. 172-178, 2016.
  13. [13] M. R. Hee et al., “Optical coherence tomography of the human retina,” Archives of Ophthalmology, Vol.113, No.3, pp. 325-332, 1995.
  14. [14] A. Dubois et al., “High-resolution full-field optical coherence tomography with a Linnik microscope,” Applied Optics, Vol.41, No.4, pp. 805-812, 2002.
  15. [15] M. J. Savitzky and E. Golay, “Smoothing and differentiation of data by simplified least-squares procedures,” Analytical Chemistry, Vol.36, pp. 1627-1639, 1964.
  16. [16] S. Fleishman, D. Cohen-Or, and C. T. Silva, “Robust moving least-squares fitting with sharp features,” ACM Trans. on Graphics, Vol.24, No.3, pp. 544-552, 2005.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, IE9,10,11, Opera.

Last updated on Dec. 12, 2017