A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe
Terutake Hayashi†, Toshiki Seri, and Syuhei Kurokawa
Department of Mechanical Engineering, Graduate School of Engineering, Kyushu University
774 Motooka, Nishiku, Fukuoka, Fukuoka 819-0395, Japan
In this study, a novel particle sizing method is proposed based on Brownian diffusion analysis for abrasive particles using fluorescent probing. A fluorescent probe is used to measure the average dynamic viscosity of the nanoparticle dispersion in a solvent. By measuring both the average dynamic viscosity and the size of the nanoscale abrasive particles simultaneously, the uncertainty of the particle sizing is considered to be improved based on the viscosity compensation for the Brownian diffusion of nanoparticles. In this research, the authors investigate the difference between the nanoviscosity and the shear viscosity of the solvent to verify the efficacy in using viscosity compensation for nanoparticle sizing.
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